Name: fabrication of nanopillar-based split ring resonators for displacement current mediated resonances in terahertz metamaterials
Uploaded: 2017-03-23T14:00:00.000+00:00
Duration: 10 min 28 s
Description: Watch this Scientific Journal Video about Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials at JoVE.com

Bu malzeme Minnesota, Twin Cities Üniversitesi&#39;nde bir start-up fonu tarafından desteklenen çalışma dayanmaktadır. Bu çalışmanın parçaları Karakterizasyonu Tesisi, Minnesota, MRSEC programı üzerinden NSF tarafından finanse edilen malzemeler Araştırma Olanakları Ağı (www.mrfn.org) üyesi Üniversitesi&#39;nde gerçekleştirildi. Bu çalışmanın bir kısmı da NNCI programı aracılığıyla NSF kısmi destek almaktadır Minnesota Nano Merkezi&#39;nde gerçekleştirildi.

Dikkat: Bu sentezlerde kullanılan kimyasalların bazıları son derece yanıcı, toksik, ve dokunulduğunda veya solunduğunda tahriş ve şiddetli organ hasarına neden olabilir. işlerken uygun kişisel koruyucu ekipman (KKE) giyiniz. İlk altın (Au) Nanopillar Dizilerinin Katman (Şekil 2a-c ve Şekil 2e-g) 1. Hazırlık <ol><li> Au galvanik için Bakır (Cu) Tohum tabakaların hazırlanması (Şekil 2a, b ve Şekil 2E, f) <ol><li> 4 &quot;yüksek direnç, silikon (Si) gofret kullanın.: - Alt tabaka olarak (direnç 560 840 Ω • cm) silisyum N tipi katkılı ve bir tarafa (Şekil 2a, e) parlatılır. </li><li> daha sonra kullanılmak üzere 2.5 cm adet x 2 cm içine Si gofret kesin. </li><li> Si ve Cu arasındaki bir yapışma tabakası gibi bir elektron ışını (E-ışını) buharlaştırma işlemi kullanılarak Si örnek 5 mil krom (Cr) katmanın. </li><li> Bir kullanarak mevcut Cr tabakanın üzerine 10 mil Cu katmanınAu galvanik için tohum katmanı olarak e-ışın buharlaştırma işlemi (Şekil 2b, f). </li></ol></li><li> Au nanopillar dizi Elektrolitik (Şekil 2c, g) <ol><li> Nanopillar dizi desenlendirme <ol><li> 60 saniye boyunca 2000 rpm&#39;de bölüm 1.1 hazırlanan numune üzerinde kat ışığa Spin. </li><li> 60 saniye boyunca 115 ° C&#39;de bir sıcak plaka üzerinde örnek fırında. </li><li> 22 saniye süreyle nanopillar desen binlerce içeren bir Cr photomask ile ultraviyole (UV) altında ışığa-ışık (güç ~ 15 mW / cm2) Açığa. </li><li> ajitasyon ile 90 saniye boyunca bir geliştirici ile geliştirin. </li><li> deiyonize (DI) su ile numuneyi durulayın ve bir hava tabancası ile örnek fön. </li></ol></li><li> Au nanopillar dizi Elektrolitik <ol><li> elektrot bağlantısı için Cu tohum katmanı ortaya çıkarmak için aseton ile numune üzerinde fotorezist üst bölümünü kaldırın. </li><li> Sam bağlayınple bir kelepçe ve bir tel kullanarak bir kaynak metre negatif terminaline (Cu tohum tabakası). Bu durumda, örnek galvanoplasti işlemi esnasında anodtur. </li><li> (Pt) kaplı Si (örnek olarak aynı boyutta) Kaynak metre pozitif terminaline platin bir parça bağlayın. Pt elektrokaplama işlemi sırasında bir katodudur. </li><li> Au elektro çözeltisi Pt katot ve anot, Cu hem daldırın. Yaklaşık 1 cm&#39;lik bir mesafe ile birbirine bakan iki elektrot tutun. </li><li> kaynağı metre açın ve 8 dakika için örnek 1.12 V. elektrolizle Au sabit bir gerilim kaynağı (çökelme hızı: ~ 100 nm / dakika). </li><li> fotodirencin kaldırmak için aseton, ardından DI su ile numuneyi, durulayın. </li><li> Yine DI suyla örnek durulayın ve fön hava tabancası ile. </li><li> mikroskop altında elektrolitik Au nanopillar dizi kontrol edin. </li><li> bir profilometre (kalınlığı ile Au nanopillars kalınlığını ölçmekAu nanopillars) ~ 800 nm. NOT: Sabit akım set-up da Au nanopillars electroplate için kullanılabilir. hem sabit gerilim ve sabit akım set-up, Au galvanik için kullanılan ideal bir akım ve gerilim deneme yanılma yolu ile elde edilebilir. </li></ol></li></ol></li></ol> Au Nanopillars arasında Nano boşlukların 2. Yaratma (Şekil 2d, h) <ol><li> Cr ve Cu tabakaların kaldırılması <ol><li> Cu renk kaybolana kadar Cu etchant numuneyi Batmak. </li><li> DI su ile numuneyi durulayın ve fön hava tabancası ile. </li><li> mikroskop altında Au nanopillars kontrol edin. </li><li> 10 s Cr maske etchant numuneyi Batmak. </li><li> DI su ile numuneyi durulayın ve fön hava tabancası ile. </li><li> mikroskop altında Au nanopillars kontrol edin. </li></ol></li><li> Nano-ölçekli Alüminyum Oksit Fabrikasyon (Al 2 O 3) boşluklar <ol><li> ALD sistemi cham ısıtın200 ° C&#39;ye ber. </li><li> odasının merkezinde örnek yerleştirin. </li><li> Bir vakum odasına aşağı pompa ve 100 devir sayısını ayarlamak (biriktirme oranı: ~ 1 Å / döngü). </li><li> Sıralı ve alternatif olarak eşit numune Al 2 O 3 tabakalarının odasına 0.015 sn bir süre ile 0.015 S ve su (H2O) buharın bir zaman süresi ile trimetilalüminyum (TMA) gaz nabız. Her darbe arasındaki zaman farkı 5 saniyedir. TMA darbe sırasında oda basıncı 10 Torr ve H 2 O buhar darbesi sırasında basınç 2 Torr olduğunu. </li><li> Temizle ve birikimi her çevrim arasındaki odasına vakum. Depozito 100 devir için Al 2 O 3 ve odasından örnek almak. </li><li> Bir elipsometre kullanarak ALD Al 2 O 3 kalınlığını ölçün. </li></ol></li></ol> Bir Au İnce Film İkinci Katman 3. Hazırlama (Şekil 2i-l ve Şekil 2m-p) <ol><li> Au galvanik için Cu Tohum katmanlarının Hazırlama (Şekil 2i, m) <ol><li> E-ışın evaporatör numune tutucu ortasına örnek yerleştirin. </li><li> E-ışın demeti buharlaştırıcı içinde numunenin dönme kapatın. </li><li> Al 2 O 3 ve Cu arasında bir yapışma tabakası olarak hareket etmek numune üzerinde bir 5 nm Cr katmanı bırakın. örnek rotasyon olmadan bir e-ışını buharlaştırma işlemi kullanın. </li><li> Deposit Au galvanik için tohum tabakası olarak örnek rotasyon olmadan E-ışını ile buharlaştırma işlemi kullanılarak, mevcut Cr tabakanın üzerine 10 mil Cu. </li></ol></li><li> Au ince film Elektrolitik (Şekil 2j, n) <ol><li> bir kelepçe ve bir tel kullanarak kaynak metre negatif terminaline örnek (Cu tohum tabakası) bağlayın. Bu durumda, örnek galvanoplasti işlemi esnasında anodtur. </li><li> Kaynak metre pozitif terminaline Pt katot bağlayın. </li><li> Pt katot ve anot Cu hem BatmakAu elektro çözeltide ör. Yaklaşık 1 cm&#39;lik bir mesafe ile birbirine bakan iki elektrot tutun. </li><li> Kaynak metre açın ve 1.35 V sabit gerilim kurmak ve 16 dakika süreyle numune üzerinde Au electroplate. </li><li> DI su ile numuneyi durulayın ve fön hava tabancası ile. </li><li> Elektroliz Au ve mikroskop altında daha önce elektrolitik Au nanopillar dizi kontrol edin. </li><li> bir profilometre ile Au nanopillars kalınlığını ölçmek (Au nanopillars kalınlığı ~ 400 nm). NOT: Bölüm 1.2.2 Au elektrokaplama benzer şekilde, sabit akım set-up da au ince film electroplate için kullanılabilir. hem sabit gerilim ve sabit akım set-up, Au galvanik için kullanılan ideal bir akım ve gerilim deneme yanılma yolu ile elde edilebilir. </li></ol></li><li> Cr ve Cu katmanları (Şekil 2k, o) çıkarılması <ol><li> 10 s Cu etchant numuneyi Batmak. </li><li> DI suyun ile örnek durulayınd darbe kuru bir hava tabancası ile. </li><li> mikroskop altında Au nanopillars kontrol edin. </li><li> 10 s Cr maske etchant numuneyi Batmak. </li><li> DI su ile numuneyi durulayın ve fön hava tabancası ile. </li><li> mikroskop altında Au nanopillars kontrol edin. Not: Alternatif olarak, Cr ve Cu (aşama 3.3) çıkarılmasından sonra, ikinci elektro Au tabakanın üzerine Au ilave katmanın tekrar Au elektro çözelti içinde numune daldırın. Bu ekstra Au tabakası, ikinci Au tabakasının toplam kalınlığı artar Au tabakası ve Al 2 O 3 katman (Şekil 2R, p) arasında iyi bir temas sağlar. </li></ol></li></ol> C-şekil SRR&#39;ın 4. Tanımı (Şekil 2q-ler ve Şekil 2u-w) <ol><li> C-şekil SRR desenlendirme (Şekil 2 k, u) <ol><li> 60 saniye için 2.000 rpm&#39;de kaplamaz numune üzerinde bir ışığa dönerler. </li><li> 60 saniye boyunca 115 ° C sıcak bir plaka üzerine örnek fırında. </li><li&gt; UV ışığı altında ışığa 22 saniye boyunca bir Cr photomask ile (~ 15 mW / cm2 güç) Açığa. </li><li> ajitasyon ile 90 saniye boyunca bir geliştirici ile geliştirin. </li><li> DI su ile örnek durulayın ve bir hava tabancası ile örnek fön. </li></ol></li><li> Cı-şekil tanımı (W, Şekil 2R, V ve Şekil 2S) iyon değirmeni kullanılarak <ol><li> çift ​​taraflı Cu iletken bant kullanarak bir iyon değirmen numune tutucu numuneyi takın. </li><li> 6 ° C iyonu öğütücü bölme soğutun. </li><li> İyon tesis 300 V bir ışın gerilimi ve 30 dakika ~ 125 mA olan bir ışın akımı ile örnek. </li><li> örnek almak ve C-şekil dışında Au nanopillars inceleyin. </li><li> Adımı tekrarlayın 4.2.3 ve Au hala C-şekil dışında görünür ise 4.2.4. </li><li> fotorezist kaldırmak için aseton içerisinde örnek sonikasyon. </li><li> DI su ile numuneyi durulayın ve fön hava tabancası ile. </li><li> Bir mikroskop altında örnek kontrol edin. </li><li> Adımı tekrarlayın 4.2.6 ve 4.2.7 Fotorezist tam kaldırılmış değilse. NOT: Alternatif olarak, uygulamak oksijen ışığa çıkarmadan önce fotorezist adımları yumuşatıcı karşı direnç gösterirler. Ancak, sonikasyon banyosu varsa ışığa çıkarmak için en etkili yöntemdir. </li></ol></li></ol> Hava Nano boşluklar Al 2 O 3 5. Temizleme (Şekil 2t x) <ol><li> Al 2 O 3 kaldırmak için 5 dakika boyunca,% 5 hidrojen fluorür (HF) çözeltisi içinde örnek daldırın. </li><li> DI su ile numuneyi durulayın ve fön hava tabancası ile. </li></ol>

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Yazarlar ifşa hiçbir şey yok.

Bu imalat tekniği, örneğin E-ışın demeti litografi ve kendi montaj gibi mevcut yöntemlere göre, nano ölçekli yapıları oluşturmak için önemli avantajları vardır. İlk olarak, nano-ölçekli yapılar E-ışın litografi süreci ile pratik değildir nanopillar dizileri, özellikleri bir photomask kullanarak geniş bir alana (tüm gofret) üzerinden gerçekleştirilebilir. İkinci olarak, üretim süreci E-ışın litografi ile karşılaştırıldığında, çok daha hızlı basit ve ucuz bir geleneksel gof...

Terahertz (THz) meta malzeme (MMS) biyomedikal sensörler ve frekans açısından hızlı cihazları 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11 geliştirilmiştir. THz MM sensörlerin hassasiyeti ve frekans seçiciliği artırmak için, bir nanopillar tabanlı bölünmüş halka rezonatör (SRR) (ultra yüksek kaliteli faktörler ile THz rezonansa heyecanlandırmak için nanopillar dizileri altın (Au) içinde oluşturulan değiştirme akımı kullanılarak dizayn edilmiştir Q-faktörler) (~ 450) (Şekil 1) 12. nanopillar tabanlı SRR&#39;ler yüksek Q-faktörleri ve gelecek vaat eden algılama yeteneklerini, bu tür nanostructur imalatını göstermek olsa dageniş bir alanda yüksek boy oranları (40&#39;dan fazla) ve nano ölçekli boşluklar (alt 10 nm) ile es zorlu 13 kalır. Nano-ölçekli yapıların imal etmek en yaygın olarak kullanılan teknik elektron ışını litografi (EBL) 14, 15, 16, 17 olduğunu. Ancak, EBL çözünürlüğü nedeniyle hala ışın spot büyüklüğü, elektron saçılması, karşı özellikleri ve gelişim süreci 18, 19 ile sınırlıdır. Buna ek olarak, bağlı yavaş bir süreç zaman geniş bir alan üzerinde EBL kullanılarak nano imal etmek pratik değildir ve büyük işlem 20 dir. Nano elde etmek için başka bir strateji, bir kendi kendine montaj tekniği 21, 22 kullanmaktır. bir çözelti ve util kendinden montaj metal nanocubes (NCS) ileelektrostatik etkileşim ve NC&#39;ler arasındaki polimer ligandların ilişki izing, nano ölçekli boşlukları ile iyi organize tek boyutlu NC dizisi 23 elde edilebilir. Nano boşluk boyutu NC&#39;ler arasında bir polimer ligandlara bağlıdır ve farklı molekül ağırlıkları 24, 25, 26 sahip olan farklı polimer malzeme uygulanarak kontrol edilebilir. Self-montaj ölçeklenebilir ve maliyet-etkin nano 23 ulaşmak için güçlü bir tekniktir. Bununla birlikte, imalat işlemi geleneksel mikro ve nano üretim işlemleri ile karşılaştırıldığında daha karmaşıktır, ve nano-boşluk boyutlarının kontrol elektronik cihaz uygulamaları için yeterince kesin değildir. başarıyla nanopillar tabanlı SRR&#39;larının imal etmek amacıyla, yeni bir üretim yöntemi aşağıdaki hedeflere ulaşmak için icat edilmelidir: i) üretim süreci uygulamak kolaydır ve kongre ile uyumludurEl mikro ve nano fabrikasyon süreçleri; ii) geniş bir alana fabrikasyon uygulanabilir; iii) nano boşluk boyutları kolayca ve tam olarak 0.1 nm çözünürlükte ile kontrol edilebilir ve 10 nm ya da daha düşük küçültülmüş olabilir. Bir yeni bir üretim yöntemi nanopillar tabanlı SRR&#39;larının imal etmek, bir elektro işleminin bir kombinasyonu ve bir atomik, tabaka (ALD) işlemi kullanılarak gösterilmiştir. galvanik düşük maliyet ile kendi kendini dolum işlemi olduğundan, geniş bir alana yapıları imal etmek kolaydır. ALD tam işlem sırasında, reaksiyon döngüsü ile kontrol edilebilir bir kimyasal buhar biriktirme (CVD) işlemidir. ALD ince film çözünürlüğü 0.1 nm olabilir, ve ince film homojen, nano ölçekli boşluklar 27, 28 oluşturmak için uygun olan bir yüksek kaliteli, kaplanır. 10 mil boşluklar ya da daha az olan Nanopillar bazlı SRR dizi başarılı 6 mm x 6 mm bir alan üzerinde imal edilebilir. Hem simulated ve ölçülen THz iletim spektrumu değiştirme akımı aracılığı nanopillar tabanlı SRR&#39;ların fizibilitesini kanıtlamaktadır, Q-faktörler ve geniş frekans kaymaları ultra-yüksek olan rezonans davranışlar gösterir. Ayrıntılı fabrikasyon süreci protokol bölümünde aşağıda tarif edilir ve video protokol uygulayıcıları fabrikasyon süreci anlamak ve nanopillar tabanlı SRR&#39;ların imalat ile ilişkili yaygın hatalardan kaçınmak için yardımcı olabilir.

<table><tbody><tr><td>Silicon Wafer</td><td>Siltronic AG</td><td>N/A</td><td>100 mm diameter, N-type, one-side polish, resitivity: 560-840 &amp;Omega;&amp;bull;cm</td></tr><tr><td>Chromium</td><td>Kurt J. Lesker Company</td><td>EVMCR35J</td><td>99.95% pure</td></tr><tr><td>Copper</td><td>Kurt J. Lesker Company</td><td>EVMCU40QXQJ</td><td>99.99% pure</td></tr><tr><td>E-Beam Evaporator System</td><td>Rocky Mountain Vacuum Tech.</td><td>N/A</td><td>RME-2000</td></tr><tr><td>S1813 Positive Photoresist</td><td>Microposit</td><td>10018348</td><td>N/A</td></tr><tr><td>Spinner</td><td>Best Tools</td><td>S0114031123</td><td>SMART COATER 100</td></tr><tr><td>Mask Aligner</td><td>Midas</td><td>MDA-400LJ</td><td>N/A</td></tr><tr><td>Digital Hot Plate</td><td>Thermo Scientific</td><td>HP131725</td><td>Super-Nuvoa series, maximum temperature: 370 &amp;deg;C</td></tr><tr><td>MF319 Developer</td><td>Microposit</td><td>10018042</td><td>N/A</td></tr><tr><td>Acetone</td><td>Fisher Chemical</td><td>A18P-4</td><td>N/A</td></tr><tr><td>Isopropyl Alcohol</td><td>Fisher Chemical</td><td>A416-4</td><td>N/A</td></tr><tr><td>Gold 25 ES RTU</td><td>Technic Inc.</td><td>391427</td><td>N/A</td></tr><tr><td>Source Meter</td><td>Keithley</td><td>N/A</td><td>2612 System SourceMeter</td></tr><tr><td>Microscope</td><td>Omax</td><td>NJF-120A</td><td>N/A</td></tr><tr><td>Profilometer</td><td>Tencor Instruments</td><td>N/A</td><td>Alpha-Step 200</td></tr><tr><td>APS Copper Etchant 100</td><td>Transfene Company, Inc.</td><td>N/A</td><td>N/A</td></tr><tr><td>CE-5 M Chromium Mask Etchant</td><td>Transfene Company, Inc.</td><td>N/A</td><td>N/A</td></tr><tr><td>Atomic Layer Deposition System</td><td>Cambridge Nano Tech inc.</td><td>N/A</td><td>Savannah series</td></tr><tr><td>Ion Mill Etching System</td><td>Intlvac Thin Film</td><td>N/A</td><td>Nanoquest series</td></tr><tr><td>Ultrasonic Cleaner</td><td>Crest Ultrasonics</td><td>N/A</td><td>Powersonic series</td></tr><tr><td>Hydrofluoric Acid</td><td>Sigma-Aldrich</td><td>244279</td><td>Diluted to 5%</td></tr><tr><td>Field Emission Gun Scanning Electron Microscope</td><td>Jeol Ltd.</td><td>N/A</td><td>JEOL 6700 series</td></tr></tbody></table>

fabrication of nanopillar-based split ring resonators for displacement current mediated resonances in terahertz metamaterials

SRR böyle rezonatör çevreleyen sıcaklık ve basınç gibi çevresel özelliklere etkilenmez çünkü Terahertz (THz) bölünmüş halka rezonatör (SRR) metamalzemeler (MMS) gaz, kimyasal ve biyomoleküler algılama uygulamaları için çalışılmıştır. THz frekanslarda elektromanyetik radyasyon kritik bir durum, özellikle biyomoleküler algılama uygulama için olan biyo-uyumlu olan. Ancak, kalite faktörü (Q-faktörü) ve geleneksel ince film tabanlı bölünmüş halka rezonatör frekans yanıtları (SRR) MMs sensörler olarak hassasiyetleri ve seçicilik sınırlar çok düşüktür. Bu çalışmada, yeni nanopillar tabanlı SRR MMs, yer değiştirme akımı kullanılarak, etrafında geleneksel ince film tabanlı MMS daha 45 kat daha yüksektir 450 kadar Q-faktörü, geliştirmek için tasarlanmıştır. Geliştirilmiş S-faktörü ile birlikte, nanopillar bazlı MMs geleneksel olarak elde edilen kayma ile karşılaştırıldığında daha geniş bir frekans kaymaları (17 kez sebepal ince film tabanlı MMS). Çünkü önemli ölçüde geliştirilmiş Q-faktörler ve frekans kaymaları yanı sıra biyouyumlu radyasyon özelliği, THz nanopillar tabanlı SRR Biyomalzemelere hasar veya bozulma neden olmadan yüksek hassasiyet ve seçicilik ile biyomoleküler sensörlerin geliştirilmesi için ideal MMs bulunmaktadır. Bir roman üretim süreci değiştirme akımı aracılı THz MMS nanopillar tabanlı SRR&#39;larının inşa etmek kanıtlanmıştır. İki safhalı altın (Au), elektro süreci ve bir atom, tabaka (ALD) işlemi Au nanopillars arasında alt 10 mil çaplı boşlukları oluşturmak için kullanılır. ALD işlemi konformal kaplama işlemi, (Al 2 O 3) nanometre ölçekli kalınlığında bir katman elde edilebilir tek tip, alüminyum oksit olduğu. Sırayla Al 2 O 3 ve Au, yakın bir dolu Au-Al nano ölçekli 2 O 3 -Au yapısı arasındaki boşlukları doldurmak için başka Au ince film elektroliz yoluyla Al 2 O 3 boşluklar olabilirfabrikasyon. Nano-boşlukların boyutu de tam olarak 0.1 nm&#39;lik bir doğruluğa sahiptir ALD işlemi, depozisyon döngüsü kontrol edilerek tanımlanabilir.

<html> Fabrikasyon düzenleri her adımı (Şekil 2a-x) göstermektedir. Optik görüntü (Şekil 2y-AC) ve taramalı elektron mikroskobu (SEM) görüntüleri (Şekil 2ad-ag) farklı imalat aşamalarında nanopillar tabanlı SRR&#39;ların için toplandı. Animasyonlar (Şekil 2a-c) elektrolitik Au nanopillars ilk katmanını ve elektro Au filmlerin ikinci kat yanı sıra aralarında oluşturulan nano boşluklar gösterme...

Watch this Scientific Journal Video about Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials at JoVE.com

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

tasarım ve yeni bir nanopillar tabanlı bölünmüş halka rezonatör (SRR) imalatı için bir protokol sunulmuştur.

Terahertz Metamalzemeler de Yerdeğiştirme Akımı aracılığı Rezonansları için Nanopillar Tabanlı Bölünmüş Yüzük Rezonatörler Fabrikasyon

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR ...

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7.7K Görüntüleme.  University of Minnesota.  tasarım ve yeni bir nanopillar tabanlı bölünmüş halka rezonatör (SRR) imalatı için bir protokol sunulmuştur. 

Video: Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

Fabrication of Silica Ultra High Quality Factor Microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.

Silika Ultra Yüksek Kalite Faktörü Microresonators Fabrikasyon

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

Mühendislik

Fabricating Metamaterials Using the Fiber Drawing Method

Metamaterials are man-made composite materials, fabricated by assembling components much smaller than the wavelength at which they operate 1. They owe their electromagnetic properties to the structure of their constituents, instead of the atoms that compose them. For example, sub-wavelength metal wires can be arranged to possess an effective electric permittivity that is either positive or negative at a given frequency, in contrast to the metals themselves 2. This unprecedented control over the behaviour of light can potentially lead to a number of novel devices, such as invisibility cloaks 3, negative refractive index materials 4, and lenses that resolve objects below the diffraction limit 5. However, metamaterials operating at optical, mid-infrared and terahertz frequencies are conventionally made using nano- and micro-fabrication techniques that are expensive and produce samples that are at most a few centimetres in size 6-7. Here we present a fabrication method to produce hundreds of meters of metal wire metamaterials in fiber form, which exhibit a terahertz plasmonic response 8. We combine the stack-and-draw technique used to produce microstructured polymer optical fiber 9 with the Taylor-wire process 10, using indium wires inside polymethylmethacrylate (PMMA) tubes. PMMA is chosen because it is an easy to handle, drawable dielectric with suitable optical properties in the terahertz region; indium because it has a melting temperature of 156.6 &deg;C which is appropriate for codrawing with PMMA. We include an indium wire of 1 mm diameter and 99.99% purity in a PMMA tube with 1 mm inner diameter (ID) and 12 mm outside diameter (OD) which is sealed at one end. The tube is evacuated and drawn down to an outer diameter of 1.2 mm. The resulting fiber is then cut into smaller pieces, and stacked into a larger PMMA tube. This stack is sealed at one end and fed into a furnace while being rapidly drawn, reducing the diameter of the structure by a factor of 10, and increasing the length by a factor of 100. Such fibers possess features on the micro- and nano- scale, are inherently flexible, mass-producible, and can be woven to exhibit electromagnetic properties that are not found in nature. They represent a promising platform for a number of novel devices from terahertz to optical frequencies, such as invisible fibers, woven negative refractive index cloths, and super-resolving lenses.

Metamaterials at terahertz frequencies offer unique opportunities, but are challenging to fabricate in bulk. We adapt the fabrication procedure for microstructured polymer optical fibers to inexpensively fabricate metamaterials potentially on an industrial scale. We produce polymethylmethacrylate fibers containing ~10 &mu;m diameter indium wires separated by ~100 &mu;m, which exhibit a terahertz plasmonic response.

Fiber Çizim Yöntemi Kullanma Fabricating meta malzeme

Metamaterials are man-made composite materials, fabricated by assembling components much smaller than the wavelength at which they operate 1. They owe ...

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic samples with a wide range of possible sensor designs such as interferometers and resonators 1,2. Most of the existing RI sensing applications focus on biological materials in aqueous solutions in visible and IR frequencies, such as DNA hybridization and genome sequencing. At terahertz frequencies, applications include quality control, monitoring of industrial processes and sensing and detection applications involving nonpolar materials.
Several potential designs for refractive index sensors in the terahertz regime exist, including photonic crystal waveguides 3, asymmetric split-ring resonators 4, and photonic band gap structures integrated into parallel-plate waveguides 5. Many of these designs are based on optical resonators such as rings or cavities. The resonant frequencies of these structures are dependent on the refractive index of the material in or around the resonator. By monitoring the shifts in resonant frequency the refractive index of a sample can be accurately measured and this in turn can be used to identify a material, monitor contamination or dilution, etc.
The sensor design we use here is based on a simple parallel-plate waveguide 6,7. A rectangular groove machined into one face acts as a resonant cavity (Figures 1 and 2). When terahertz radiation is coupled into the waveguide and propagates in the lowest-order transverse-electric (TE1) mode, the result is a single strong resonant feature with a tunable resonant frequency that is dependent on the geometry of the groove 6,8. This groove can be filled with nonpolar liquid microfluidic samples which cause a shift in the observed resonant frequency that depends on the amount of liquid in the groove and its refractive index 9.
Our technique has an advantage over other terahertz techniques in its simplicity, both in fabrication and implementation, since the procedure can be accomplished with standard laboratory equipment without the need for a clean room or any special fabrication or experimental techniques. It can also be easily expanded to multichannel operation by the incorporation of multiple grooves 10. In this video we will describe our complete experimental procedure, from the design of the sensor to the data analysis and determination of the sample refractive index.

The procedure for implementing a refractive index sensor for terahertz frequencies based on a grooved parallel-plate waveguide geometry is described here. The method yields a measurement of the refractive index of a small volume of liquid through monitoring of the shift in the resonant frequency of the waveguide structure

Paralel plaka Waveguide Sensor Kullanımı Terahertz Mikroakışkan Algılama

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic ...

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

Metamaterials (MM), artificial materials engineered to have properties that may not be found in nature, have been widely explored since the first theoretical1 and experimental demonstration2 of their unique properties. MMs can provide a highly controllable electromagnetic response, and to date have been demonstrated in every technologically relevant spectral range including the optical3, near IR4, mid IR5 , THz6 , mm-wave7 , microwave8 and radio9 bands. Applications include perfect lenses10, sensors11, telecommunications12, invisibility cloaks13 and filters14,15. We have recently developed single band16, dual band17 and broadband18 THz metamaterial absorber devices capable of greater than 80% absorption at the resonance peak. The concept of a MM absorber is especially important at THz frequencies where it is difficult to find strong frequency selective THz absorbers19. In our MM absorber the THz radiation is absorbed in a thickness of ~ &lambda;/20, overcoming the thickness limitation of traditional quarter wavelength absorbers. MM absorbers naturally lend themselves to THz detection applications, such as thermal sensors, and if integrated with suitable THz sources (e.g. QCLs), could lead to compact, highly sensitive, low cost, real time THz imaging systems.

This protocol outlines the simulation, fabrication and characterization of THz metamaterial absorbers. Such absorbers, when coupled with an appropriate sensor, have applications in THz imaging and spectroscopy.

THz metamalzeme Emiciler Simülasyon, Üretimi ve Karakterizasyonu

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

Microwave Photonics Systems Based on Whispering-gallery-mode Resonators

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various areas of technology and applied science, such as aerospace and communication engineering, sensing, metrology, nonlinear photonics, and quantum optics. In this article, we present the principal techniques used in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators. First detailed in this article is the protocol for resonator polishing, which is based on a grind-and-polish technique close to the ones used to polish optical components such as lenses or telescope mirrors. Then, a white light interferometric profilometer measures surface roughness, which is a key parameter to characterize the quality of the polishing. In order to launch light in the resonator, a tapered silica fiber with diameter in the micrometer range is used. To reach such small diameters, we adopt the "flame-brushing" technique, using simultaneously computer-controlled motors to pull the fiber apart, and a blowtorch to heat the fiber area to be tapered. The resonator and the tapered fiber are later approached to one another to visualize the resonance signal of the whispering gallery modes using a wavelength-scanning laser. By increasing the optical power in the resonator, nonlinear phenomena are triggered until the formation of a Kerr optical frequency comb is observed with a spectrum made of equidistant spectral lines. These Kerr comb spectra have exceptional characteristics that are suitable for several applications in science and technology. We consider the application related to ultra-stable microwave frequency synthesis and demonstrate the generation of a Kerr comb with GHz intermodal frequency.

The customized techniques developed in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators are presented. The protocols to obtain and characterize these resonators are detailed, and an explanation of some of their applications in microwave photonics is given.

Mikrodalga Fotonik Sistemleri Whispering-galeri-mod Rezonatörler dayanarak

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various ...

Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters

In this video article we present a detailed demonstration of a highly efficient method for generating terahertz waves. Our technique is based on photoconduction, which has been one of the most commonly used techniques for terahertz generation 1-8. Terahertz generation in a photoconductive emitter is achieved by pumping an ultrafast photoconductor with a pulsed or heterodyned laser illumination. The induced photocurrent, which follows the envelope of the pump laser, is routed to a terahertz radiating antenna connected to the photoconductor contact electrodes to generate terahertz radiation. Although the quantum efficiency of a photoconductive emitter can theoretically reach 100%, the relatively long transport path lengths of photo-generated carriers to the contact electrodes of conventional photoconductors have severely limited their quantum efficiency. Additionally, the carrier screening effect and thermal breakdown strictly limit the maximum output power of conventional photoconductive terahertz sources. To address the quantum efficiency limitations of conventional photoconductive terahertz emitters, we have developed a new photoconductive emitter concept which incorporates a plasmonic contact electrode configuration to offer high quantum-efficiency and ultrafast operation simultaneously. By using nano-scale plasmonic contact electrodes, we significantly reduce the average photo-generated carrier transport path to photoconductor contact electrodes compared to conventional photoconductors 9. Our method also allows increasing photoconductor active area without a considerable increase in the capacitive loading to the antenna, boosting the maximum terahertz radiation power by preventing the carrier screening effect and thermal breakdown at high optical pump powers. By incorporating plasmonic contact electrodes, we demonstrate enhancing the optical-to-terahertz power conversion efficiency of a conventional photoconductive terahertz emitter by a factor of 50 10.

We describe methods for the design, fabrication, and experimental characterization of plasmonic photoconductive emitters, which offer two orders of magnitude higher terahertz power levels compared to conventional photoconductive emitters.

Plasmonik Foto iletken Terahertz Vericiler Tasarımı, İmalatı ve Deneysel Karakterizasyonu

In this video article we present a detailed demonstration of a highly efficient method for generating terahertz waves. Our technique is based on ...

Implementation of a Reference Interferometer for Nanodetection

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing its free spectral range (FSR), the module is put in parallel with a fiber taper-microcavity system and then calibrated through isolating and eliminating random shifts in the laser frequency (i.e. laser jitter noise). To realize the taper-microcavity junction and to maximize the optical power that is transferred to the resonator, a single-mode optical fiber waveguide is pulled. Solutions containing polystyrene nanobeads are then prepared and flown to the microcavity in order to demonstrate the system&#8217;s ability to sense binding to the surface of the microcavity. Data is post-processed via adaptive curve fitting, which allows for high-resolution measurements of the quality factor as well as the plotting of time-dependent parameters, such as resonant wavelength and split frequency shifts. By carefully inspecting steps in the time-domain response and shifting in the frequency-domain response, this instrument can quantify discrete binding events.

A reference interferometer technique, which is designed to remove undesirable laser jitter noise for nanodetection, is utilized for probing an ultra-high quality factor microcavity. Instructions for assembly, setup, and data acquisition are provided, alongside the measurement process for specifying the cavity quality factor.

Nanodetection için bir referans Interferometer Uygulanması

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing ...

Utilization of Plasmonic and Photonic Crystal Nanostructures for Enhanced Micro- and Nanoparticle Manipulation

A method to manipulate the position and orientation of submicron particles nondestructively would be an incredibly useful tool for basic biological research. Perhaps the most widely used physical force to achieve noninvasive manipulation of small particles has been dielectrophoresis(DEP).1 However, DEP on its own lacks the versatility and precision that are desired when manipulating cells since it is traditionally done with stationary electrodes. Optical tweezers, which utilize a three dimensional electromagnetic field gradient to exert forces on small particles, achieve this desired versatility and precision.2 However, a major drawback of this approach is the high radiation intensity required to achieve the necessary force to trap a particle which can damage biological samples.3 A solution that allows trapping and sorting with lower optical intensities are optoelectronic tweezers (OET) but OET's have limitations with fine manipulation of small particles; being DEP-based technology also puts constraint on the property of the solution.4,5
This video article will describe two methods that decrease the intensity of the radiation needed for optical manipulation of living cells and also describe a method for orientation control. The first method is plasmonic tweezers which use a random gold nanoparticle (AuNP) array as a substrate for the sample as shown in Figure 1. The AuNP array converts the incident photons into localized surface plasmons (LSP) which consist of resonant dipole moments that radiate and generate a patterned radiation field with a large gradient in the cell solution. Initial work on surface plasmon enhanced trapping by Righini et al and our own modeling have shown the fields generated by the plasmonic substrate reduce the initial intensity required by enhancing the gradient field that traps the particle.6,7,8 The plasmonic approach allows for fine orientation control of ellipsoidal particles and cells with low optical intensities because of more efficient optical energy conversion into mechanical energy and a dipole-dependent radiation field. These fields are shown in figure 2 and the low trapping intensities are detailed in figures 4 and 5. The main problems with plasmonic tweezers are that the LSP's generate a considerable amount of heat and the trapping is only two dimensional. This heat generates convective flows and thermophoresis which can be powerful enough to expel submicron particles from the trap.9,10 The second approach that we will describe is utilizing periodic dielectric nanostructures to scatter incident light very efficiently into diffraction modes, as shown in figure 6.11 Ideally, one would make this structure out of a dielectric material to avoid the same heating problems experienced with the plasmonic tweezers but in our approach an aluminum-coated diffraction grating is used as a one-dimensional periodic dielectric nanostructure. Although it is not a semiconductor, it did not experience significant heating and effectively trapped small particles with low trapping intensities, as shown in figure 7. Alignment of particles with the grating substrate conceptually validates the proposition that a 2-D photonic crystal could allow precise rotation of non-spherical micron sized particles.10 The efficiencies of these optical traps are increased due to the enhanced fields produced by the nanostructures described in this paper.

Plasmonic tweezers and photonic crystal nanostructures are shown to produce useful enhancements in the efficiency and orientation control of optically trapping micro- and nano-particles.

Gelişmiş mikro ve Nanopartikül Manipülasyon Plasmonic ve Fotonik Kristal Nanoyapıların Kullanımı

A method to manipulate the position and orientation of submicron particles nondestructively would be an incredibly useful tool for basic biological ...

Biyomühendislik

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

Süperiletken Rezonatörler Fabrikasyon ve Karakterizasyonu

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using femtosecond laser-induced ablation. We show that thousands of periodic nano-craters are fabricated on an optical nanofiber by irradiating with just a single femtosecond laser pulse. For a typical sample, periodic nano-craters with a period of 350 nm and with diameter gradually varying from 50 - 250 nm over a length of 1 mm are fabricated on a nanofiber with diameter around 450 - 550 nm. A key aspect of such a nanofabrication is that the nanofiber itself acts as a cylindrical lens and focuses the femtosecond laser beam on its shadow surface. Moreover, the single-shot fabrication makes it immune to mechanical instabilities and other fabrication imperfections. Such periodic nano-craters on nanofiber, act as a 1-D PhC and enable strong and broadband reflection while maintaining the high transmission out of the stopband. We also present a method to control the profile of the nano-crater array to fabricate apodized and defect-induced PhC cavities on the nanofiber. The strong confinement of the field, both transverse and longitudinal, in the nanofiber-based PhC cavities and the efficient integration to the fiber networks, may open new possibilities for nanophotonic applications and quantum information science.

We present a protocol for fabricating 1-D photonic crystal cavities on subwavelength diameter silica fibers (optical nanofibers) using femtosecond laser-induced ablation.

Femtosaniye Lazer kaynaklı Ablasyonu kullanarak nanolif 1-D Fotonik Kristal Kavitenin Fabrikasyon

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using ...