Name: fabrication of nanopillar-based split ring resonators for displacement current mediated resonances in terahertz metamaterials
Uploaded: 2017-03-23T14:00:00.000+00:00
Duration: 10 min 28 s
Description: Watch this Scientific Journal Video about Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials at JoVE.com

이 자료는 미네소타 트윈 시티 대학의 시작 기금에서 지원하는 작업에 기초한다. 이 작품의 일부는 특성 시설, 미네소타의 MRSEC 프로그램을 통해 NSF 자금 재료 연구 시설 네트워크 (www.mrfn.org)의 회원 대학에서 수행되었다. 이 연구의 일부는 또한 NNCI 프로그램을 통해 NSF에서 일부 지원 받는다 미네소타 나노 센터에서 수행 하였다.

주의 :이 합성에 사용되는 화학 물질의 일부는 가연성, 독성 및 접촉 또는 흡입시 자극 심한 장기 손상의 원인이 될 수 있습니다. 취급시 적절한 개인 보호 장비 (PPE)를 착용하십시오. 첫 금 (Au) 나노 기둥 배열의 레이어 (그림 2a-C와 그림 2E-g) 1. 준비 <ol><li> 금 도금 용 구리 (Cu) 시드 층의 제조 (도 2A, B 및도 2e, F) <ol><li> 4 &quot;높은 저항 실리콘 (Si) 웨이퍼를 사용한다. : - 기판으로서 (560 저항 840 Ω · cm)을 Si를 웨이퍼 N 형 도핑 일측 (도 2a, E)에서 연마된다. </li><li> 나중에 사용하기 위해 2.5 cm 조각 × 2 cm로 Si 웨이퍼를 잘라. </li><li> 는 SI와 구리 사이에 접착층 등의 전자빔 (e-beam) 증착 프로세스를 이용하여 실리콘 시료 (5)에 나노 크롬 (CR) 층을 증착. </li><li> 를 사용하여 기존의 Cr 층 위에 10 nm의 Cu 층을 증착AU의 전기 도금을위한 시드 층과 같은 전자 빔 증착법 (도 2b, F). </li></ol></li><li> 금 나노 기둥 배열을 전기 도금 (그림 2C, g) <ol><li> 나노 기둥 배열을 패터닝 <ol><li> 60 초 동안 2,000 rpm에서 섹션 1.1에서 제조 된 샘플에 코트 포토 레지스트를 스핀. </li><li> 60 초 동안 115 ℃의 핫 플레이트상에서 샘플을 굽는다. </li><li> 22 초 동안 나노 기둥 패턴의 수천을 포함하는 CR 포토 마스크와 자외선 (UV)에서 포토 레지스트 - 빛 (전력 ~ 15 mW의 / cm 2) 노출. </li><li> 교반과 함께 90 초 동안 개발자와 함께 개발한다. </li><li> 탈 (DI) 물 샘플을 헹구고 공기 총을 가진 샘플을 불어 - 건조. </li></ol></li><li> 금 나노 기둥 배열을 전기 도금 <ol><li> 전극 접속 용 구리 시드 층을 노출 아세톤으로 시료의 레지스트의 상부 부분을 제거한다. </li><li> 샘 연결PLE 클램프 및 와이어를 이용하여 소스 미터의 음극 단말 (구리 시드 층). 이 경우, 샘플은 전기 도금 공정 동안 애노드이다. </li><li> (PT) 코팅시 (샘플과 동일한 크기) 소스 미터의 양극 단자에 백금의 조각을 연결합니다. 백금은 전기 도금 공정 중에 음극이다. </li><li> AU의 도금 용액의 캐소드의 Pt 및 Cu 애노드 모두 담근다. ~ 1cm의 거리를두고 서로 대향하는 두 개의 전극 유지. </li><li> 소스 미터를 켜고 8 분의 샘플에 1.12 V. 전기 도금 금의 일정한 전압을 공급 (증착 속도 : ~ 100 ㎚ / 분). </li><li> 포토 레지스트를 제거하기 위해 아세톤 다음 DI 물 샘플을 씻어. </li><li> 다시 DI 물 샘플을 씻어 통풍 건조 공기 총을. </li><li> 현미경 전기 도금 된 금 나노 기둥 배열을 검사합니다. </li><li> 프로파일로 (의 두께를 가진 금 나노 기둥의 두께를 측정금 나노 기둥) ~ 800 ㎚이다. 참고 : 정전류 셋업은 금 나노 기둥을 전기 도금하는 데 사용할 수 있습니다. 두 정전압 정전류 셋업에서, 금 전기 도금에 사용되는 이상적인 전류와 전압은 시행 착오에 의해 달성 될 수있다. </li></ol></li></ol></li></ol> 금 나노 기둥 사이의 나노 갭 2. 창조 (그림 2D, H) <ol><li> CR 및 Cu 층의 제거 <ol><li> 구리 색이 사라질 때까지 구리 식각액의 샘플 잠수함. </li><li> DI 물 샘플을 씻어 통풍 건조 공기 총을. </li><li> 현미경으로 금 나노 기둥을 검사합니다. </li><li> 10 초 동안 CR 마스크 에칭의 샘플 잠수함. </li><li> DI 물 샘플을 씻어 통풍 건조 공기 총을. </li><li> 현미경으로 금 나노 기둥을 검사합니다. </li></ol></li><li> 나노 크기의 산화 알루미늄의 제조 알루미늄 (Al 2 O 3) 틈새 <ol><li> ALD 시스템 참 가열200 ° C에 BER. </li><li> 챔버의 중앙에 시료를 놓는다. </li><li> 진공으로 챔버를 펌프 (100)에 대한 싸이클 횟수 설정 (증착 속도 : 1 ~ Å / 사이클). </li><li> 순차적으로 다르게 균일 샘플 알 2 O 3 층을 증착 챔버 내로 0.015 초의 시간으로 0.015 S와 물 (H 2 O) 증기의 기간과 트리메틸 알루미늄 (TMA) 가스 펄스. 각 펄스 사이의 시간 간격은 5 초입니다. TMA 펄스 동안 챔버 압력은 10 Torr로하고 H 2 O 증기 펄스 동안의 압력은 2 Torr로한다. </li><li> 제거 및 증착의 각 사이클 사이의 챔버를 진공. 보증금 100 사이클 알 2 O 3 챔버에서 샘플을 가져 가라. </li><li> 엘 립소 미터를 사용하여 ALD 알 2 O (3)의 두께를 측정한다. </li></ol></li></ol> Au를 박막의 2 층의 제조 (3) (도 2I -1-도 2m-P) <ol><li> 금 전기 도금 용 구리 시드 층의 제조 (그림 2I, m) <ol><li> 전자 빔 증발기 샘플 홀더의 중심에서 샘플을 놓는다. </li><li> 전자 빔 증발기에서 샘플의 회전을 끕니다. </li><li> 알 2 O 3 및 Cu 사이의 밀착 층의 역할을하도록 샘플 5 내지 CR 층을 증착. 샘플을 회전하지 않고 전자 빔 증착법을 사용한다. </li><li> 금고의 Au 도금을위한 시드 층과 같은 샘플 회전하지 않고 전자 빔 증착 프로세스를 이용하여 기존의 Cr 층 위에 10 nm의 구리. </li></ol></li><li> AU의 박막을 전해 도금 (도 2J, N) <ol><li> 클램프 및 와이어를 이용하여 소스 미터의 음극 단자에 샘플 (구리 시드 층)을 연결한다. 이 경우, 샘플은 전기 도금 공정 동안 애노드이다. </li><li> 소스 미터의 양극 단자 편 음극을 연결한다. </li><li> 백금 음극과 구리 ANOD 모두 잠수함AU의 도금 용액 E. ~ 1cm의 거리를두고 서로 대향하는 두 개의 전극 유지. </li><li> 소스 미터의 전원을 켜고 1.35 V의 일정한 전압을 설정하고 16 분 샘플에 금을 전기 도금. </li><li> DI 물 샘플을 씻어 통풍 건조 공기 총을. </li><li> 전기 도금 된 금과 현미경 이전에 전기 도금 된 금 나노 기둥 배열을 검사합니다. </li><li> 프로파일로하여 금 나노 기둥의 두께를 측정합니다 (금 나노 기둥의 두께 ~ 400 ㎚이다). 주 : 1.2.2 절에서의 Au 도금 마찬가지로, 정전류 셋업은 금 박막을 전기 도금하는데 사용될 수있다. 두 정전압 정전류 셋업에서, 금 전기 도금에 사용되는 이상적인 전류와 전압은 시행 착오에 의해 달성 될 수있다. </li></ol></li><li> CR 및 Cu 층 (그림 2K, O)의 제거 <ol><li> 10 초 동안 구리 식각액의 샘플 잠수함. </li><li> DI 물과 샘플을 씻어D 타격 건조 공기 총을. </li><li> 현미경으로 금 나노 기둥을 검사합니다. </li><li> 10 초 동안 CR 마스크 에칭의 샘플 잠수함. </li><li> DI 물 샘플을 씻어 통풍 건조 공기 총을. </li><li> 현미경으로 금 나노 기둥을 검사합니다. 주 : 또는 CR 및 Cu (단계 3.3)의 제거 후에 제 전해 금 층 위에 Au로의 추가 층을 증착하기 위해 다시 금 도금 용액에서 샘플을 침수. 이러한 추가적인 금 층은 제 금 층의 전체 두께를 증가시키고, 금 층 및 Al2O3의 층 (도 2I, P) 사이의 양호한 접촉을 보장한다. </li></ol></li></ol> C 형 SRR 4. 정의 (그림 2 분기-s와 그림 2U-w) <ol><li> ㄷ자 형의 SRR을 패터닝 (도 2Q, U) <ol><li> 60 초 동안 2,000 rpm으로 코트를 샘플에 포토 레지스트를 스핀. </li><li> 60 초 동안 115 ° C의 핫 플레이트에 샘플을 굽는다. </li><l난&gt; UV 빛에서 포토 레지스트 (22)의위한 CR 포토 마스크와 (~ 15 mW의 / cm 2의 전력) 노출. </li><li> 교반과 함께 90 초 동안 개발자와 함께 개발한다. </li><li> DI 물 샘플을 헹구고 공기 총을 가진 샘플을 불어 - 건조. </li></ol></li><li> C 형 정의 (W,도 2R, V도 2S) 이온 밀을 사용하여 <ol><li> 양면 구리 전도성 테이프를 사용하는 이온 밀 샘플 홀더에 샘플을 연결합니다. </li><li> 6 ° C에 이온 밀 실을 냉각. </li><li> 이온 밀링 300 V의 빔 전압 30 분 ~ 125 mA의 빔 전류를 샘플. </li><li> 샘플을 타고 C 형 외부의 금 나노 기둥을 검사합니다. </li><li> 단계를 반복 4.2.3과 금은 여전히 ​​C 형 외부에 표시되는 경우 4.2.4. </li><li> 포토 레지스트를 제거하는 아세톤에 샘플을 초음파 처리. </li><li> DI 물 샘플을 씻어 통풍 건조 공기 총을. </li><li> 현미경 샘플을 검사합니다. </li><li> 단계를 반복 4.2.6 및 4.2.도 7의 포토 레지스트가 완전히 제거되지 않은 경우. 참고 : 또는 적용 산소는 포토 레지스트를 제거하기 전에 포토 레지스트에 단계를 연화 레지스트. 그러나, 초음파 목욕 (해당되는 경우) 포토 레지스트를 제거하는 가장 효과적인 방법입니다. </li></ol></li></ol> 에어 나노 갭에 대한 알 2 O 3 5. 제거 (그림 2t, 배) <ol><li> 알 2 O 3을 제거하는 5 분 동안 5 %의 불화 수소 (HF) 용액에서 샘플을 담근다. </li><li> DI 물 샘플을 씻어 통풍 건조 공기 총을. </li></ol>

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J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Preferential+end-to-end+assembly+of+gold+nanorods+by+biotin-streptavidin+connectors.">Preferential end-to-end assembly of gold nanorods by biotin-streptavidin connectors.</a> J. Am. Chem. Soc. 125 (46), 13914-13915 (2003).</li><li>Liu, K., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Step-growth+polymerization+of+inorganic+nanoparticles.">Step-growth polymerization of inorganic nanoparticles.</a> Science. 329 (5988), 197-200 (2010).</li><li>Nie, Z., Fava, D., Kumacheva, E., Zou, S., Walker, G. C., Rubinstein, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Self-assembly+of+metal-polymer+analogues+of+amphiphilic+triblock+copolymers.">Self-assembly of metal-polymer analogues of amphiphilic triblock copolymers.</a> Nat. Mater. 6 (8), 609-614 (2007).</li><li>Chen, X., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Atomic+layer+lithography+of+wafer-scale+nanogap+arrays+for+extreme+confinement+of+electromagnetic+waves.">Atomic layer lithography of wafer-scale nanogap arrays for extreme confinement of electromagnetic waves.</a> Nat. 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저자는 공개 아무것도 없어.

이 제조 기술은 전자빔 리소그래피 및 자기 조립 등 기존의 방법을 통해 나노 구조체를 만들기위한 중요한 장점을 갖는다. 첫째, 나노 구조물은 전자 빔 리소그래피 프로세스에 실용적이지 나노 기둥 배열을 특징으로 포토 마스크를 이용하여 대 면적 (전체 웨이퍼)를 통해 실현 될 수있다. 둘째로, 제조 공정은 전자 빔 리소그래피에 비해 훨씬 빠르고 간단하며 저렴 전통적인 웨이퍼 스케일 마이?...

테라 헤르츠 (헤르츠) 메타 물질 (MMS)를 생물 의학적 센서 주파수 유연한 디바이스 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11을 위해 개발되었다. 테라 헤르츠 MM 센서의 감도 및 주파수 선택성을 개선하기 위해, 나노 기둥 기반 분할 링 공진기 (SRR)은 (매우 고품질 인자 테라 헤르츠 공진을 여기시키기 나노 기둥 배열을 금 (Au) 내부에서 발생하는 변위 전류를 이용하여 설계 한 Q-요인) (~ 450) (그림 1) 12. 나노 기둥 기반 SRR을 높은 Q-요인과 유망 감지 능력 등 nanostructur의 제조를 표시하더라도넓은 지역에 걸쳐 높은 종횡비 (40)와 나노 크기의 갭 (하위 10 ㎚)와 에스 도전 13 남아있다. 나노 크기 구조물을 제조하는 가장 일반적으로 사용되는 기술은 전자 빔 리소그래피 (EBL) 14, 15, 16, 17이다. 그러나, EBL의 분해능은 여전히 의한 빔 스폿 사이즈, 전자 산란의 레지스트 특성 및 개발 프로세스 (18, 19)에 한정된다. 또한 인한 느린 처리 시간으로 대 면적 EBL을 사용하는 나노 구조물을 제조하는 것이 실용적이지 큰 공정 (20)을 요한다. 나노 구조를 달성하는 또 다른 전략은 자기 조립 기술 (21, 22)을 사용하는 것이다. 솔루션 및 폴더의 유틸리티에 자기 조립 금속 나노 큐브 (나노)으로정전 상호 작용 사이의 나노 고분자 리간드의 연관 델링, 나노 갭으로 잘 구성된 일차원 NC 어레이 (23)를 얻을 수있다. 나노 갭 크기는 나노 결정의 고분자 리간드에 따라 상이한 분자량 24, 25, 26 다른 중합체 물질을인가함으로써 제어 될 수있다. 자기 조립은 확장 가능하고 비용 효율적인 나노 구조물 (23)을 달성하기위한 강력한 방법이다. 그러나, 제조 공정은 종래의 마이크로 및 나노 제작 방법에 비하여 더 복잡하고, 나노 갭 크기의 제어는 전자 장치 애플리케이션을위한 충분히 정확하지 않다. 성공적 나노 기둥 SRR을 기반를 제작하기 위하여, 신규 한 제조 방법은 다음과 같은 목적을 달성하기 위해 개발되어야한다 : I)의 제조 공정을 적용하는 것이 용이하고 협약과 호환알 마이크로 및 나노 제조 공정; ⅱ) 대 면적 제조에 적용한다; ⅲ) 나노 틈새의 크기는 쉽고 정확하게 0.1 nm의 분해능으로 제어 할 수 있고, 10 nm 이하로 축소 될 수있다. 신규 한 제조 방법은 나노 기둥 SRR을 기반을 제조하기위한 전기 도금 공정의 조합과 원자 층 증착 (ALD) 공정을 이용하여 설명된다. 전기가 저가로 자체 충전 프로세스이기 때문에 대 면적 구조를 제조하기 쉽다. ALD 정확하게 프로세스 중에 반응 사이클에 의해 제어 될 수있는 화학 기상 증착 (CVD) 공정이다. ALD 박막의 해상도는 0.1 나노 미터 일 수 있고, 박막은 균일 한 나노 크기의 간극 (27), (28)을 만들 적합한 고품질로 코팅된다. 10 nm의 간격 이하의 나노 기둥 기반 SRR 어레이 성공적 6mm × 6mm의 면적 위에 제조 될 수있다. 둘이야imulated 측정 테라 헤르츠 투과 스펙트럼은 변위 전류에 의해 매개되는 나노 기둥 기반 SRR을 가능성을 증명하는 Q 팩터 큰 주파수 시프트 초고 공진 동작을 도시한다. 상세한 제조 과정은 상기 프로토콜 절에서 설명하고, 상기 비디오 프로토콜 실무자 제조 프로세스를 이해하고, 나노 기둥 SRR을 기반의 제조와 관련된 공통적 인 실수를 방지 할 수 있습니다.

<table><tbody><tr><td>Silicon Wafer</td><td>Siltronic AG</td><td>N/A</td><td>100 mm diameter, N-type, one-side polish, resitivity: 560-840 &amp;Omega;&amp;bull;cm</td></tr><tr><td>Chromium</td><td>Kurt J. Lesker Company</td><td>EVMCR35J</td><td>99.95% pure</td></tr><tr><td>Copper</td><td>Kurt J. Lesker Company</td><td>EVMCU40QXQJ</td><td>99.99% pure</td></tr><tr><td>E-Beam Evaporator System</td><td>Rocky Mountain Vacuum Tech.</td><td>N/A</td><td>RME-2000</td></tr><tr><td>S1813 Positive Photoresist</td><td>Microposit</td><td>10018348</td><td>N/A</td></tr><tr><td>Spinner</td><td>Best Tools</td><td>S0114031123</td><td>SMART COATER 100</td></tr><tr><td>Mask Aligner</td><td>Midas</td><td>MDA-400LJ</td><td>N/A</td></tr><tr><td>Digital Hot Plate</td><td>Thermo Scientific</td><td>HP131725</td><td>Super-Nuvoa series, maximum temperature: 370 &amp;deg;C</td></tr><tr><td>MF319 Developer</td><td>Microposit</td><td>10018042</td><td>N/A</td></tr><tr><td>Acetone</td><td>Fisher Chemical</td><td>A18P-4</td><td>N/A</td></tr><tr><td>Isopropyl Alcohol</td><td>Fisher Chemical</td><td>A416-4</td><td>N/A</td></tr><tr><td>Gold 25 ES RTU</td><td>Technic Inc.</td><td>391427</td><td>N/A</td></tr><tr><td>Source Meter</td><td>Keithley</td><td>N/A</td><td>2612 System SourceMeter</td></tr><tr><td>Microscope</td><td>Omax</td><td>NJF-120A</td><td>N/A</td></tr><tr><td>Profilometer</td><td>Tencor Instruments</td><td>N/A</td><td>Alpha-Step 200</td></tr><tr><td>APS Copper Etchant 100</td><td>Transfene Company, Inc.</td><td>N/A</td><td>N/A</td></tr><tr><td>CE-5 M Chromium Mask Etchant</td><td>Transfene Company, Inc.</td><td>N/A</td><td>N/A</td></tr><tr><td>Atomic Layer Deposition System</td><td>Cambridge Nano Tech inc.</td><td>N/A</td><td>Savannah series</td></tr><tr><td>Ion Mill Etching System</td><td>Intlvac Thin Film</td><td>N/A</td><td>Nanoquest series</td></tr><tr><td>Ultrasonic Cleaner</td><td>Crest Ultrasonics</td><td>N/A</td><td>Powersonic series</td></tr><tr><td>Hydrofluoric Acid</td><td>Sigma-Aldrich</td><td>244279</td><td>Diluted to 5%</td></tr><tr><td>Field Emission Gun Scanning Electron Microscope</td><td>Jeol Ltd.</td><td>N/A</td><td>JEOL 6700 series</td></tr></tbody></table>

fabrication of nanopillar-based split ring resonators for displacement current mediated resonances in terahertz metamaterials

SRR 그러한 공진기 주변의 온도 및 압력 등의 환경의 특성에 의해 영향을받지 않기 때문에 헤르츠 (헤르츠) 분할 링 공진기 (SRR) 메타 물질 (MMS)는 가스, 화학 및 생체 분자 감지 애플리케이션에 대해 검토되고있다. 테라 헤르츠 주파수의 전자기 방사선은 중요한 조건이 특히 생체 분자 센서의 응용 프로그램 인 생체 적합성이다. 그러나, 품질 계수 (Q 값) 및 기존의 박막 계 분할 링 공진기의 주파수 반응 (SRR) MMS는 센서로서의 감도 및 선택성을 제한하는 매우 낮다. 본 연구에서는 새로운 나노 기둥 기반 SRR의 MMS는이 변위 전류를 이용하여, 주위에 기존의 박막 기반의 MMS는보다 45 배 높은 450까지의 Q 팩터를 향상시키기 위해 설계되었습니다. 인핸스 Q 팩터에 더하여, 나노 기둥 계는 MMS는 전통 의해 얻어진 시프트에 비해 더 큰 주파수 변화 (17 배 유도알 박막을 기반으로 MMS). 때문에 크게 향상된 Q-요인과 주파수 변화뿐만 아니라 생체 적합성 방사선의 재산, 테라 헤르츠 나노 기둥 기반 SRR은 생체 물질의 손상 또는 왜곡을 유발하지 않고 높은 감도와 선택성을 가진 생체 분자 센서의 개발을위한 이상적인 MMS는 있습니다. 신규 한 제조 공정은 변위 전류 매개 테라 헤르츠 보호용 나노 기둥 기반 SRR을 구축하는 것으로 입증되었다. 두 단계의 금 (Au) 도금 공정 및 원자 층 증착 (ALD) 공정이 금 나노 기둥 사이의 서브 -10 나노 스케일 갭을 생성하기 위해 사용된다. ALD 프로세스는 컨 포멀 코팅에있어서, 알루미늄 (Al 2 O 3) 나노 스케일 두께의 층이 달성 될 수있는 균일 한 산화 알루미늄 때문이다. 순차적으로 알 2 O 3, 금, 근접 포장의 Au-Al 계 나노 스케일 2 O 3 -Au 구조 사이의 공간을 채우기 위해 다른 금 박막을 전기 도금으로 알 2 O 3 갭이 될 수 있습니다만드는. 나노 갭의 크기는 잘 정확하게 0.1 nm의 정확도를 갖는 ALD 공정의 증착주기를 제어함으로써 정의 될 수있다.

<html> 제조 방식은 각 단계 (도 2a-X)를 보여줍니다. 광학 상 (도 2Y-AC) 및 주사 전자 현미경 (SEM) 화상 (도 2AD-AG)은 다양한 제조 단계에서의 나노 기둥 기반 SRR을 수집 하였다. 애니메이션 (도 2A-C)는 전기 금 나노 기둥의 제 1 층과 전해 금 필름의 두번째 층뿐만 아니라 그들 사이에 나노 갭을 나타낸다. 도 2d는 알 <s...

Watch this Scientific Journal Video about Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials at JoVE.com

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

디자인과 새로운 나노 기둥 기반의 분할 링 공진기 (SRR)의 제조를위한 프로토콜이 표시됩니다.

테라 헤르츠 메타 물질의 변위 현재 중재 공명은을위한 나노 기둥 기반 분할 링 공진기의 제작

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR ...

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Electromagnetic Induction

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7.7K 조회수.  University of Minnesota.  디자인과 새로운 나노 기둥 기반의 분할 링 공진기 (SRR)의 제조를위한 프로토콜이 표시됩니다. 

비디오: Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

Fabrication of Silica Ultra High Quality Factor Microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.

실리카 초고 품질 팩터 Microresonators의 제작

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

연구

공학

Fabricating Metamaterials Using the Fiber Drawing Method

Metamaterials are man-made composite materials, fabricated by assembling components much smaller than the wavelength at which they operate 1. They owe their electromagnetic properties to the structure of their constituents, instead of the atoms that compose them. For example, sub-wavelength metal wires can be arranged to possess an effective electric permittivity that is either positive or negative at a given frequency, in contrast to the metals themselves 2. This unprecedented control over the behaviour of light can potentially lead to a number of novel devices, such as invisibility cloaks 3, negative refractive index materials 4, and lenses that resolve objects below the diffraction limit 5. However, metamaterials operating at optical, mid-infrared and terahertz frequencies are conventionally made using nano- and micro-fabrication techniques that are expensive and produce samples that are at most a few centimetres in size 6-7. Here we present a fabrication method to produce hundreds of meters of metal wire metamaterials in fiber form, which exhibit a terahertz plasmonic response 8. We combine the stack-and-draw technique used to produce microstructured polymer optical fiber 9 with the Taylor-wire process 10, using indium wires inside polymethylmethacrylate (PMMA) tubes. PMMA is chosen because it is an easy to handle, drawable dielectric with suitable optical properties in the terahertz region; indium because it has a melting temperature of 156.6 &deg;C which is appropriate for codrawing with PMMA. We include an indium wire of 1 mm diameter and 99.99% purity in a PMMA tube with 1 mm inner diameter (ID) and 12 mm outside diameter (OD) which is sealed at one end. The tube is evacuated and drawn down to an outer diameter of 1.2 mm. The resulting fiber is then cut into smaller pieces, and stacked into a larger PMMA tube. This stack is sealed at one end and fed into a furnace while being rapidly drawn, reducing the diameter of the structure by a factor of 10, and increasing the length by a factor of 100. Such fibers possess features on the micro- and nano- scale, are inherently flexible, mass-producible, and can be woven to exhibit electromagnetic properties that are not found in nature. They represent a promising platform for a number of novel devices from terahertz to optical frequencies, such as invisible fibers, woven negative refractive index cloths, and super-resolving lenses.

Metamaterials at terahertz frequencies offer unique opportunities, but are challenging to fabricate in bulk. We adapt the fabrication procedure for microstructured polymer optical fibers to inexpensively fabricate metamaterials potentially on an industrial scale. We produce polymethylmethacrylate fibers containing ~10 &mu;m diameter indium wires separated by ~100 &mu;m, which exhibit a terahertz plasmonic response.

섬유 그리기 방법을 사용하여 제조 Metamaterials

Metamaterials are man-made composite materials, fabricated by assembling components much smaller than the wavelength at which they operate 1. They owe ...

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic samples with a wide range of possible sensor designs such as interferometers and resonators 1,2. Most of the existing RI sensing applications focus on biological materials in aqueous solutions in visible and IR frequencies, such as DNA hybridization and genome sequencing. At terahertz frequencies, applications include quality control, monitoring of industrial processes and sensing and detection applications involving nonpolar materials.
Several potential designs for refractive index sensors in the terahertz regime exist, including photonic crystal waveguides 3, asymmetric split-ring resonators 4, and photonic band gap structures integrated into parallel-plate waveguides 5. Many of these designs are based on optical resonators such as rings or cavities. The resonant frequencies of these structures are dependent on the refractive index of the material in or around the resonator. By monitoring the shifts in resonant frequency the refractive index of a sample can be accurately measured and this in turn can be used to identify a material, monitor contamination or dilution, etc.
The sensor design we use here is based on a simple parallel-plate waveguide 6,7. A rectangular groove machined into one face acts as a resonant cavity (Figures 1 and 2). When terahertz radiation is coupled into the waveguide and propagates in the lowest-order transverse-electric (TE1) mode, the result is a single strong resonant feature with a tunable resonant frequency that is dependent on the geometry of the groove 6,8. This groove can be filled with nonpolar liquid microfluidic samples which cause a shift in the observed resonant frequency that depends on the amount of liquid in the groove and its refractive index 9.
Our technique has an advantage over other terahertz techniques in its simplicity, both in fabrication and implementation, since the procedure can be accomplished with standard laboratory equipment without the need for a clean room or any special fabrication or experimental techniques. It can also be easily expanded to multichannel operation by the incorporation of multiple grooves 10. In this video we will describe our complete experimental procedure, from the design of the sensor to the data analysis and determination of the sample refractive index.

The procedure for implementing a refractive index sensor for terahertz frequencies based on a grooved parallel-plate waveguide geometry is described here. The method yields a measurement of the refractive index of a small volume of liquid through monitoring of the shift in the resonant frequency of the waveguide structure

병렬 판 도파관 센서를 사용하여 Terahertz 마이크로 감지

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic ...

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

Metamaterials (MM), artificial materials engineered to have properties that may not be found in nature, have been widely explored since the first theoretical1 and experimental demonstration2 of their unique properties. MMs can provide a highly controllable electromagnetic response, and to date have been demonstrated in every technologically relevant spectral range including the optical3, near IR4, mid IR5 , THz6 , mm-wave7 , microwave8 and radio9 bands. Applications include perfect lenses10, sensors11, telecommunications12, invisibility cloaks13 and filters14,15. We have recently developed single band16, dual band17 and broadband18 THz metamaterial absorber devices capable of greater than 80% absorption at the resonance peak. The concept of a MM absorber is especially important at THz frequencies where it is difficult to find strong frequency selective THz absorbers19. In our MM absorber the THz radiation is absorbed in a thickness of ~ &lambda;/20, overcoming the thickness limitation of traditional quarter wavelength absorbers. MM absorbers naturally lend themselves to THz detection applications, such as thermal sensors, and if integrated with suitable THz sources (e.g. QCLs), could lead to compact, highly sensitive, low cost, real time THz imaging systems.

This protocol outlines the simulation, fabrication and characterization of THz metamaterial absorbers. Such absorbers, when coupled with an appropriate sensor, have applications in THz imaging and spectroscopy.

THz Metamaterial Absorbers 시뮬레이션, 제조 및 특성

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

Microwave Photonics Systems Based on Whispering-gallery-mode Resonators

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various areas of technology and applied science, such as aerospace and communication engineering, sensing, metrology, nonlinear photonics, and quantum optics. In this article, we present the principal techniques used in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators. First detailed in this article is the protocol for resonator polishing, which is based on a grind-and-polish technique close to the ones used to polish optical components such as lenses or telescope mirrors. Then, a white light interferometric profilometer measures surface roughness, which is a key parameter to characterize the quality of the polishing. In order to launch light in the resonator, a tapered silica fiber with diameter in the micrometer range is used. To reach such small diameters, we adopt the "flame-brushing" technique, using simultaneously computer-controlled motors to pull the fiber apart, and a blowtorch to heat the fiber area to be tapered. The resonator and the tapered fiber are later approached to one another to visualize the resonance signal of the whispering gallery modes using a wavelength-scanning laser. By increasing the optical power in the resonator, nonlinear phenomena are triggered until the formation of a Kerr optical frequency comb is observed with a spectrum made of equidistant spectral lines. These Kerr comb spectra have exceptional characteristics that are suitable for several applications in science and technology. We consider the application related to ultra-stable microwave frequency synthesis and demonstrate the generation of a Kerr comb with GHz intermodal frequency.

The customized techniques developed in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators are presented. The protocols to obtain and characterize these resonators are detailed, and an explanation of some of their applications in microwave photonics is given.

마이크로 웨이브 포토닉스 시스템 속삭이는 - 갤러리 모드 공진기를 기반으로

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various ...

Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters

In this video article we present a detailed demonstration of a highly efficient method for generating terahertz waves. Our technique is based on photoconduction, which has been one of the most commonly used techniques for terahertz generation 1-8. Terahertz generation in a photoconductive emitter is achieved by pumping an ultrafast photoconductor with a pulsed or heterodyned laser illumination. The induced photocurrent, which follows the envelope of the pump laser, is routed to a terahertz radiating antenna connected to the photoconductor contact electrodes to generate terahertz radiation. Although the quantum efficiency of a photoconductive emitter can theoretically reach 100%, the relatively long transport path lengths of photo-generated carriers to the contact electrodes of conventional photoconductors have severely limited their quantum efficiency. Additionally, the carrier screening effect and thermal breakdown strictly limit the maximum output power of conventional photoconductive terahertz sources. To address the quantum efficiency limitations of conventional photoconductive terahertz emitters, we have developed a new photoconductive emitter concept which incorporates a plasmonic contact electrode configuration to offer high quantum-efficiency and ultrafast operation simultaneously. By using nano-scale plasmonic contact electrodes, we significantly reduce the average photo-generated carrier transport path to photoconductor contact electrodes compared to conventional photoconductors 9. Our method also allows increasing photoconductor active area without a considerable increase in the capacitive loading to the antenna, boosting the maximum terahertz radiation power by preventing the carrier screening effect and thermal breakdown at high optical pump powers. By incorporating plasmonic contact electrodes, we demonstrate enhancing the optical-to-terahertz power conversion efficiency of a conventional photoconductive terahertz emitter by a factor of 50 10.

We describe methods for the design, fabrication, and experimental characterization of plasmonic photoconductive emitters, which offer two orders of magnitude higher terahertz power levels compared to conventional photoconductive emitters.

Plasmonic의 광전 테라 헤르츠 터의 설계, 제작 및 실험 특성

In this video article we present a detailed demonstration of a highly efficient method for generating terahertz waves. Our technique is based on ...

Implementation of a Reference Interferometer for Nanodetection

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing its free spectral range (FSR), the module is put in parallel with a fiber taper-microcavity system and then calibrated through isolating and eliminating random shifts in the laser frequency (i.e. laser jitter noise). To realize the taper-microcavity junction and to maximize the optical power that is transferred to the resonator, a single-mode optical fiber waveguide is pulled. Solutions containing polystyrene nanobeads are then prepared and flown to the microcavity in order to demonstrate the system&#8217;s ability to sense binding to the surface of the microcavity. Data is post-processed via adaptive curve fitting, which allows for high-resolution measurements of the quality factor as well as the plotting of time-dependent parameters, such as resonant wavelength and split frequency shifts. By carefully inspecting steps in the time-domain response and shifting in the frequency-domain response, this instrument can quantify discrete binding events.

A reference interferometer technique, which is designed to remove undesirable laser jitter noise for nanodetection, is utilized for probing an ultra-high quality factor microcavity. Instructions for assembly, setup, and data acquisition are provided, alongside the measurement process for specifying the cavity quality factor.

Nanodetection에 대한 참조 간섭계의 구현

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing ...

Utilization of Plasmonic and Photonic Crystal Nanostructures for Enhanced Micro- and Nanoparticle Manipulation

A method to manipulate the position and orientation of submicron particles nondestructively would be an incredibly useful tool for basic biological research. Perhaps the most widely used physical force to achieve noninvasive manipulation of small particles has been dielectrophoresis(DEP).1 However, DEP on its own lacks the versatility and precision that are desired when manipulating cells since it is traditionally done with stationary electrodes. Optical tweezers, which utilize a three dimensional electromagnetic field gradient to exert forces on small particles, achieve this desired versatility and precision.2 However, a major drawback of this approach is the high radiation intensity required to achieve the necessary force to trap a particle which can damage biological samples.3 A solution that allows trapping and sorting with lower optical intensities are optoelectronic tweezers (OET) but OET's have limitations with fine manipulation of small particles; being DEP-based technology also puts constraint on the property of the solution.4,5
This video article will describe two methods that decrease the intensity of the radiation needed for optical manipulation of living cells and also describe a method for orientation control. The first method is plasmonic tweezers which use a random gold nanoparticle (AuNP) array as a substrate for the sample as shown in Figure 1. The AuNP array converts the incident photons into localized surface plasmons (LSP) which consist of resonant dipole moments that radiate and generate a patterned radiation field with a large gradient in the cell solution. Initial work on surface plasmon enhanced trapping by Righini et al and our own modeling have shown the fields generated by the plasmonic substrate reduce the initial intensity required by enhancing the gradient field that traps the particle.6,7,8 The plasmonic approach allows for fine orientation control of ellipsoidal particles and cells with low optical intensities because of more efficient optical energy conversion into mechanical energy and a dipole-dependent radiation field. These fields are shown in figure 2 and the low trapping intensities are detailed in figures 4 and 5. The main problems with plasmonic tweezers are that the LSP's generate a considerable amount of heat and the trapping is only two dimensional. This heat generates convective flows and thermophoresis which can be powerful enough to expel submicron particles from the trap.9,10 The second approach that we will describe is utilizing periodic dielectric nanostructures to scatter incident light very efficiently into diffraction modes, as shown in figure 6.11 Ideally, one would make this structure out of a dielectric material to avoid the same heating problems experienced with the plasmonic tweezers but in our approach an aluminum-coated diffraction grating is used as a one-dimensional periodic dielectric nanostructure. Although it is not a semiconductor, it did not experience significant heating and effectively trapped small particles with low trapping intensities, as shown in figure 7. Alignment of particles with the grating substrate conceptually validates the proposition that a 2-D photonic crystal could allow precise rotation of non-spherical micron sized particles.10 The efficiencies of these optical traps are increased due to the enhanced fields produced by the nanostructures described in this paper.

Plasmonic tweezers and photonic crystal nanostructures are shown to produce useful enhancements in the efficiency and orientation control of optically trapping micro- and nano-particles.

향상된 마이크로 및 Nanoparticle 조작에 대한 Plasmonic 및 광자 크리스탈 Nanostructures 활용

A method to manipulate the position and orientation of submicron particles nondestructively would be an incredibly useful tool for basic biological ...

생체공학

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

초전도 공진기의 제조 및 특성

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using femtosecond laser-induced ablation. We show that thousands of periodic nano-craters are fabricated on an optical nanofiber by irradiating with just a single femtosecond laser pulse. For a typical sample, periodic nano-craters with a period of 350 nm and with diameter gradually varying from 50 - 250 nm over a length of 1 mm are fabricated on a nanofiber with diameter around 450 - 550 nm. A key aspect of such a nanofabrication is that the nanofiber itself acts as a cylindrical lens and focuses the femtosecond laser beam on its shadow surface. Moreover, the single-shot fabrication makes it immune to mechanical instabilities and other fabrication imperfections. Such periodic nano-craters on nanofiber, act as a 1-D PhC and enable strong and broadband reflection while maintaining the high transmission out of the stopband. We also present a method to control the profile of the nano-crater array to fabricate apodized and defect-induced PhC cavities on the nanofiber. The strong confinement of the field, both transverse and longitudinal, in the nanofiber-based PhC cavities and the efficient integration to the fiber networks, may open new possibilities for nanophotonic applications and quantum information science.

We present a protocol for fabricating 1-D photonic crystal cavities on subwavelength diameter silica fibers (optical nanofibers) using femtosecond laser-induced ablation.

펨토초 레이저에 의한 절제를 사용하여 나노 섬유에 1-D 광자 크리스탈 캐비티의 제작

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using ...