Name: fabrication and operation of a nano-optical conveyor belt
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The authors would like to thank Professor Yuzuru Takashima at the University of Arizona for discussions on optical imaging, Mr. Karl Urbanek for assistance with high power lasers, and Max Yuen for discussions of Brownian motion. The authors send further thanks to Professor Kenneth Crozier at Harvard University for helpful discussions on optical trapping experiments. Funding was provided in part by the United States National Science Foundation (award number 1028372).

<ol>
	<li>Ashkin, A., Dziedzic, J. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Optical+Trapping+and+Manipulation+Of+Viruses+and+Bacteria.">Optical Trapping and Manipulation Of Viruses and Bacteria.</a> Science. 235 (4795), 1517-1520 (1987).</li><li>Svoboda, K., Block, S. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Biological+Applications+of+Optical+Forces.">Biological Applications of Optical Forces.</a> Annu. Rev. Biophys. Biomol. Struct. 23 (1), 247-285 (1994).</li><li>Neuman, K., Block, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Optical+Trapping.">Optical Trapping.</a> Rev. Sci. Instrum. 75 (9), 2787-2809 (2004).</li><li>Fazal, F. M., Block, S. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Optical+Tweezers+Study+Life+Under+Tension.">Optical Tweezers Study Life Under Tension.</a> Nat. Photonics. 5 (6), 318-321 (2011).</li><li>Bockelmann, U., Thomen, P., Essevaz-Roulet, B., Viasnoff, V., Heslot, F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Unzipping+DNA+with+Optical+Tweezers:+High+Sequence+Sensitivity+and+Force+Flips.">Unzipping DNA with Optical Tweezers: High Sequence Sensitivity and Force Flips.</a> Biophys. J. 82 (3), 1537-1553 (2002).</li><li>Pang, Y., Gordon, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Optical+Trapping+of+Single+Protein.">Optical Trapping of Single Protein.</a> Nano Lett. 12 (1), 402-406 (2012).</li><li>Dholakia, K., C&#780;izm&#780;ar&#769;, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Shaping+the+Future+of+Manipulation.">Shaping the Future of Manipulation.</a> Nat. Photonics. 5 (6), 335-342 (2011).</li><li>Grier, D. G., Roichman, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Holographic+Optical+Trapping.">Holographic Optical Trapping.</a> Appl. Opt. 45 (5), 880-887 (2006).</li><li>Korda, P. T., Taylor, M. B., Grier, D. G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Kinetically+Locked-in+Colloidal+Transport+in+an+Array+of+Optical+Tweezers.">Kinetically Locked-in Colloidal Transport in an Array of Optical Tweezers.</a> Phys. Rev. Lett. 89 (12), 128301 (2002).</li><li>Pelton, M., Ladavac, K., Grier, D. G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Transport+and+Fractionation+in+Periodic+Potential-energy+Landscapes.">Transport and Fractionation in Periodic Potential-energy Landscapes.</a> Phys. Rev. E. 70 (3), 031108 (2004).</li><li>Eriksson, E., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+Microfluidic+System+in+Combination+with+Optical+Tweezers+for+Analyzing+Rapid+and+Reversible+Cytological+Alterations+in+Single+Cells+upon+Environmental+Changes.">A Microfluidic System in Combination with Optical Tweezers for Analyzing Rapid and Reversible Cytological Alterations in Single Cells upon Environmental Changes.</a> Lab Chip. 7 (1), 71-76 (2007).</li><li>Applegate, R. W., Squier, J., Vestad, T., Oakey, J., Marr, D. W. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Optical Trapping, Manipulation, and Sorting of Cells and Colloids in Microfluidic Systems with Diode Laser. 12 (19), 4390-4398 (2004).</li><li>MacDonald, G. C., Spalding, G. C., Dholakia, K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Microfluidic+Sorting+in+an+Optical+Lattice.">Microfluidic Sorting in an Optical Lattice.</a> Nature. 426 (6965), 421-424 (2003).</li><li>Neale, S. L., MacDonald, M. P., Dholakia, K., Krauss, T. F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=All-optical+Control+of+Microfluidic+Components+using+Form.">All-optical Control of Microfluidic Components using Form.</a> Nat. Mater. 4 (7), 530-533 (2005).</li><li>Juan, M. L., Righini, M., Quidant, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Plasmon+Nano-optical+Tweezers.+.">Plasmon Nano-optical Tweezers. .</a> Nat. Photonics. 5 (6), 349-356 (2011).</li><li>Kwak, E. S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Optical+Trapping+with+Integrated+Near-Field+Apertures.">Optical Trapping with Integrated Near-Field Apertures.</a> J. Phys. Chem. B. 108 (36), 13607-13612 (2004).</li><li>Righini, M., Zelenina, A. S., Girard, C., Quidant, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Parallel+and+Selective+Trapping+in+a+Patterned+Plasmonic+Landscape.">Parallel and Selective Trapping in a Patterned Plasmonic Landscape.</a> Nat. Phys. 3 (7), 477-480 (2007).</li><li>Zhang, W., Huang, L., Santschi, C., Martin, O. J. F. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Trapping+and+Sensing+10+nm+Metal+Nanoparticles+using+Plasmonic+Dipole+Antennas.">Trapping and Sensing 10 nm Metal Nanoparticles using Plasmonic Dipole Antennas.</a> Nano Lett. 10 (3), 1006-1011 (2010).</li><li>Wang, K., Schonbrun, E., Steinvurzel, P., Crozier, K. B. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Trapping+and+Rotating+Nanoparticles+using+a+Plasmonic+Nano-tweezer+with+an+Integrated+Heat+Sink.">Trapping and Rotating Nanoparticles using a Plasmonic Nano-tweezer with an Integrated Heat Sink.</a> Nat. Commun. 2, 469 (2011).</li><li>Shi, X., Hesselink, L., Thornton, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultrahigh+Light+Trans-+mission+through+a+C-shaped+Nanoaperture.">Ultrahigh Light Trans- mission through a C-shaped Nanoaperture.</a> Opt. 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Mater. 22 (39), 4345-4349 (2010).</li><li>Kaleli, B., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electron+Beam+Lithography+of+HSQ+and+PMMA+Resists+and+Importance+of+their+Properties+to+Link+the+Nano+World+to+the+Micro+World.">Electron Beam Lithography of HSQ and PMMA Resists and Importance of their Properties to Link the Nano World to the Micro World.</a> , 105-108 (2010).</li></ol>

The authors have nothing to disclose.

The NOCB combines the strong trapping forces and small trap size of plasmonic approaches with the capability to transport particles, long available only for conventional focused-beam techniques. Unique to the NOCB, the trapping and transport properties of the system are a result of surface patterning and not of shaping the illumination beam. Provided the illumination is bright enough and its polarization or wavelength can be modulated, particles can be held or moved in complicated protocols on the surface. We have demons...

Capture, interrogation and manipulation of single nanoparticles are of growing importance in nanotechnology. Optical tweezers have become a particularly successful manipulation technique for experiments in molecular biology1-4, chemistry5-7 and nano-assembly7-10, where they have enabled breakthrough experiments such as the measurement of the mechanical properties of single DNA molecules4&#160;and the sorting of cells by their optical properties11,12. Discoveries on these frontiers open up the study of even smaller systems, and they make way for the engineering of new practically beneficial products and techniques. In turn, this trend drives the need for new techniques to manipulate smaller, more rudimentary particles. In addition, there is a push to build &#39;lab-on-a-chip&#39; devices to perform these functions more cheaply and in a smaller package in order to bring chemical and biological tests out of the lab and into the field for medical and other purposes13,14.
Unfortunately, conventional optical trapping (COT) cannot meet all of nanotechnology&#39;s growing demands. COT operates on the mechanism of using a high numerical aperture (N.A.) objective lens to bring laser light to a tight focus, creating a localized peak in optical intensity and high gradients in the electromagnetic field energy. These energy density gradients exert a net force on light-scattering particles which generally draws them in towards the center of the focus. Trapping smaller particles requires higher optical power or a tighter focus. However, focused beams of light obey the principle of diffraction, which limits the minimal size of the focal spot and places an upper bound on the energy density gradient. This has two immediate consequences: COT cannot trap small objects efficiently, and COT has trouble discriminating between closely spaced particles, a trapping resolution limitation known as the &#39;fat fingers&#39; problem. In addition, implementing multiple particle trapping with COT requires systems of beam-steering optics or spatial light modulators, components which drastically increase the cost and complexity of an optical trapping system.
One way to circumvent the fundamental limitations of conventional focused beams of light, said to propagate in the far field, is to instead exploit the gradients of optical electromagnetic energy in the near field. The near field decays exponentially away from sources of electromagnetic fields, which means that not only is it highly localized to these sources, but it also exhibits very high gradients in its energy density. The near fields of nano-metallic resonators, such as bowtie apertures, nano pillars, and C-shaped engravings, have been shown to exhibit extraordinary concentrations of electromagnetic energy, further enhanced by the plasmonic action of gold and silver at near-infrared and optical wavelengths. These resonators have been used to trap extremely small particles at high efficiency and resolution15-22. While this technique has proven effective at trapping small particles, it has also proven to be limited in its ability to transport particles over appreciable range, which is necessary if near-field systems are to interface with far-field systems or microfluidics.
Recently, our group has proposed a solution to this problem. When resonators are placed very close together, a particle can in principle migrate from one near-field optical trap to the next without being released from the surface. The direction of transport can be determined if adjacent traps can be turned on and off separately. A linear array of three or more addressable resonators, in which each resonator is sensitive to a polarization or wavelength of light different from that of its neighbors, works as an optical conveyor belt, transporting nanoparticles over a distance of several microns on a chip.
The so-called &#39;Nano-Optical Conveyor Belt&#39; (NOCB) is unique among plasmonic resonator trapping schemes, as not only can it hold particles in place, but it can also move them at high speed along patterned tracks, gather or disperse particles, mix and queue them, and even sort them by properties such as their mobility23. All of these functions are controlled by modulating the polarization or wavelength of illumination, with no need for beam-steering optics. As a near-field optical trap, the NOCB trapping resolution is higher than that of conventional focused-beam optical traps, so it can differentiate between particles in close proximity; because it uses a metal nanostructure to concentrate light into a trapping well, it is power-efficient, and does not require expensive optical components such as a high N.A. objective. Furthermore, many NOCBs may be operated in parallel, at high packing density, on the same substrate, and 1 W of power can drive over 1200 apertures23.
We have recently demonstrated the first polarization-driven NOCB, smoothly propelling a nanoparticle back and forth along a 4.5 &#181;m track24. In this article we present the steps necessary to design and fabricate the device, optically activate it and reproduce the transport experiment. We hope that making this technique more widely available will help bridge the size gap between microfluidics, far-field optics, and nanoscale devices and experiments.

<table><tbody><tr><td>HSQ e-beam resist</td><td>Dow Corning</td><td>XR-1541-006</td><td></td></tr><tr><td>PMMA</td><td>MicroChem</td><td>950A2 M230002</td><td></td></tr><tr><td>Fast curing optical adhesive</td><td>Norland Optical Adhesive</td><td>NOA 81</td><td></td></tr><tr><td>Fluorescent carboxyl microspheres</td><td>Bangs Laboratories</td><td>FC02F, FC03F</td><td></td></tr><tr><td>Fluorescent carboxylate-modified microspheres</td><td>Molecular Probes</td><td>F-8888</td><td></td></tr><tr><td>Quartz slide</td><td>SPI Supplies</td><td>1020-AB</td><td></td></tr><tr><td>Inverted fluorescent microscope</td><td>Nikon</td><td>ECLIPSE TE2000-U</td><td></td></tr><tr><td>Nd:YAG laser</td><td>Lightwave Electronics</td><td>221-HD-V04</td><td></td></tr><tr><td>sCMOS camera</td><td>PCO</td><td>EDGE55</td><td></td></tr><tr><td>CCD camera</td><td>Watec</td><td>WAT-120N</td><td></td></tr><tr><td>Zero-order half-wave plate</td><td>Thorlabs</td><td>WPH05M-1064</td><td></td></tr><tr><td>Triton X-100</td><td>Sigma-Aldrich</td><td>T8787</td><td></td></tr><tr><td>Distilled water</td><td>Invitrogen</td><td>10977-023</td><td></td></tr><tr><td>Si Wafer</td><td>Silicon Quest International</td><td>708069</td><td></td></tr><tr><td>Optical lenses</td><td>Thorlabs</td><td></td><td></td></tr></tbody></table>

fabrication and operation of a nano-optical conveyor belt

The technique of using focused laser beams to trap and exert forces on small particles has enabled many pivotal discoveries in the nanoscale biological and physical sciences over the past few decades. The progress made in this field invites further study of even smaller systems and at a larger scale, with tools that could be distributed more easily and made more widely available. Unfortunately, the fundamental laws of diffraction limit the minimum size of the focal spot of a laser beam, which makes particles smaller than a half-wavelength in diameter hard to trap and generally prevents an operator from discriminating between particles which are closer together than one half-wavelength. This precludes the optical manipulation of many closely-spaced nanoparticles and&#160;limits the&#160;resolution of optical-mechanical systems. Furthermore, manipulation using focused beams requires beam-forming or steering optics, which can be very bulky and expensive. To address these limitations in the system scalability of conventional optical trapping our lab has devised an alternative technique which utilizes near-field optics to move particles across a chip. Instead of focusing laser beams in the far-field, the optical near field of plasmonic resonators produces the necessary local optical intensity enhancement to overcome the restrictions of diffraction and manipulate particles at higher resolution. Closely-spaced resonators produce strong optical traps which can be addressed to mediate the hand-off of particles from one to the next in a conveyor-belt-like fashion. Here, we describe how to design and produce a conveyor belt using a gold surface patterned with plasmonic C-shaped resonators and how to operate it with polarized laser light to achieve super-resolution nanoparticle manipulation and transport. The nano-optical conveyor belt chip can be produced using lithography techniques and easily packaged and distributed.

Figure 7 is a picture of the final device. At the center of the 1 cm x 1 cm gold surface is the matrix of CSE and conveyor patterns, which can be barely seen from an angled view. Figure 6 is a scanning electron microscopy image of an example CSE pattern on the final device.
The particle motion of a 390 nm polystyrene bead traveling across a nano-optical conveyor belt 5 &#181;m in length is shown in Figure 9. The curve shows the particle&#8217;...

Watch this Scientific Journal Video about Fabrication and Operation of a Nano-Optical Conveyor Belt at JoVE.com

Fabrication and Operation of a Nano-Optical Conveyor Belt

The scalability and resolution of conventional optical manipulation techniques are limited by diffraction. We circumvent the diffraction limit and describe a method of optically transporting nanoparticles across a chip using a gold surface patterned with a path of closely spaced C-shaped plasmonic resonators.

Herstellung und Betrieb eines Nano-Optical Fließband

The technique of using focused laser beams to trap and exert forces on small particles has enabled many pivotal discoveries in the nanoscale biological ...

fabrication-and-operation-of-a-nano-optical-conveyor-belt

Universidad San Sebastian

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Education

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JoVE Journal

Physics

Engineering

Unit 1

Electromagnetic Waves

SCIENTISTS IN ACTION

11.5K Aufrufe.  Stanford University. The scalability and resolution of conventional optical manipulation techniques are limited by diffraction. We circumvent the diffraction limit and describe a method of optically transporting nanoparticles across a chip using a gold surface patterned with a path of closely spaced C-shaped plasmonic resonators.

Serie: Fabrication and Operation of a Nano-Optical Conveyor Belt

A Method to Fabricate Disconnected Silver Nanostructures in 3D

The standard nanofabrication toolkit includes techniques primarily aimed at creating 2D patterns in dielectric media. Creating metal patterns on a submicron scale requires a combination of nanofabrication tools and several material processing steps. For example, steps to create planar metal structures using ultraviolet photolithography and electron-beam lithography can include sample exposure, sample development, metal deposition, and metal liftoff. To create 3D metal structures, the sequence is repeated multiple times. The complexity and difficulty of stacking and aligning multiple layers limits practical implementations of 3D metal structuring using standard nanofabrication tools. Femtosecond-laser direct-writing has emerged as a pre-eminent technique for 3D nanofabrication.1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses.3-7 However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm. The method enables the fabrication of patterns not feasible using other techniques, such as 3D arrays of disconnected silver voxels.8 Disconnected 3D metal patterns are useful for metamaterials where unit cells are not in contact with each other,9 such as coupled metal dot10,11or coupled metal rod12,13 resonators. Potential applications include negative index metamaterials, invisibility cloaks, and perfect lenses.
In femtosecond-laser direct-writing, the laser wavelength is chosen such that photons are not linearly absorbed in the target medium. When the laser pulse duration is compressed to the femtosecond time scale and the radiation is tightly focused inside the target, the extremely high intensity induces nonlinear absorption. Multiple photons are absorbed simultaneously to cause electronic transitions that lead to material modification within the focused region. Using this approach, one can form structures in the bulk of a material rather than on its surface.
Most work on 3D direct metal writing has focused on creating self-supported metal structures.14-16 The method described here yields sub-micrometer silver structures that do not need to be self-supported because they are embedded inside a matrix. A doped polymer matrix is prepared using a mixture of silver nitrate (AgNO3), polyvinylpyrrolidone (PVP) and water (H2O). Samples are then patterned by irradiation with an 11-MHz femtosecond laser producing 50-fs pulses. During irradiation, photoreduction of silver ions is induced through nonlinear absorption, creating an aggregate of silver nanoparticles in the focal region. Using this approach we create silver patterns embedded in a doped PVP matrix. Adding 3D translation of the sample extends the patterning to three dimensions.

Femtosecond-laser direct-writing is frequently used to create three-dimensional (3D) patterns in polymers and glasses. However, patterning metals in 3D remains a challenge. We describe a method for fabricating silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm.

Ein Verfahren zur Getrennt Silber Nanostrukturen in 3D Fabricate

The standard nanofabrication toolkit includes  techniques primarily aimed at creating 2D patterns in dielectric media. Creating  metal patterns on a ...

Forschung

Ingenieurwesen

Optical Trapping of Nanoparticles

Optical trapping is a technique for immobilizing and manipulating small objects in a gentle way using light, and it has been widely applied in trapping and manipulating small biological particles. Ashkin and co-workers first demonstrated optical tweezers using a single focused beam1. The single beam trap can be described accurately using the perturbative gradient force formulation in the case of small Rayleigh regime particles1. In the perturbative regime, the optical power required for trapping a particle scales as the inverse fourth power of the particle size. High optical powers can damage dielectric particles and cause heating. For instance, trapped latex spheres of 109 nm in diameter were destroyed by a 15 mW beam in 25 sec1, which has serious implications for biological matter2,3.
A self-induced back-action (SIBA) optical trapping was proposed to trap 50 nm polystyrene spheres in the non-perturbative regime4. In a non-perturbative regime, even a small particle with little permittivity contrast to the background can influence significantly the ambient electromagnetic field and induce a large optical force. As a particle enters an illuminated aperture, light transmission increases dramatically because of dielectric loading. If the particle attempts to leave the aperture, decreased transmission causes a change in momentum outwards from the hole and, by Newton's Third Law, results in a force on the particle inwards into the hole, trapping the particle. The light transmission can be monitored; hence, the trap can become a sensor. The SIBA trapping technique can be further improved by using a double-nanohole structure.
The double-nanohole structure has been shown to give a strong local field enhancement5,6. Between the two sharp tips of the double-nanohole, a small particle can cause a large change in optical transmission, thereby inducing a large optical force. As a result, smaller nanoparticles can be trapped, such as 12 nm silicate spheres7 and 3.4 nm hydrodynamic radius bovine serum albumin proteins8. In this work, the experimental configuration used for nanoparticle trapping is outlined. First, we detail the assembly of the trapping setup which is based on a Thorlabs Optical Tweezer Kit. Next, we explain the nanofabrication procedure of the double-nanohole in a metal film, the fabrication of the microfluidic chamber and the sample preparation. Finally, we detail the data acquisition procedure and provide typical results for trapping 20 nm polystyrene nanospheres.

The following setup approach details low power optical trapping of dielectric nanoparticles using a double-nanohole in metal film.

Optical Trapping von Nanopartikeln

Optical trapping is a technique for immobilizing and manipulating small objects in a gentle way using light, and it has been widely applied in trapping ...

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas allows the deposition of metal oxides with tunable morphology, structure, density and stoichiometry by a proper control of the plasma plume expansion dynamics. Such versatility can be exploited to produce nanostructured films from compact and dense to nanoporous characterized by a hierarchical assembly of nano-sized clusters. In particular we describe the detailed methodology to fabricate two types of Al-doped ZnO (AZO) films as transparent electrodes in photovoltaic devices: 1) at low O2 pressure, compact films with electrical conductivity and optical transparency close to the state of the art transparent conducting oxides (TCO) can be deposited at room temperature, to be compatible with thermally sensitive materials such as polymers used in organic photovoltaics (OPVs); 2) highly light scattering hierarchical structures resembling a forest of nano-trees are produced at higher pressures. Such structures show high Haze factor (&gt;80%) and may be exploited to enhance the light trapping capability. The method here described for AZO films can be applied to other metal oxides relevant for technological applications such as TiO2, Al2O3, WO3 and Ag4O4.

We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

Herstellung von transparenten leitenden Oxide durch Pulsed Laser Deposition Nano-engineered

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

Implementation of a Reference Interferometer for Nanodetection

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing its free spectral range (FSR), the module is put in parallel with a fiber taper-microcavity system and then calibrated through isolating and eliminating random shifts in the laser frequency (i.e. laser jitter noise). To realize the taper-microcavity junction and to maximize the optical power that is transferred to the resonator, a single-mode optical fiber waveguide is pulled. Solutions containing polystyrene nanobeads are then prepared and flown to the microcavity in order to demonstrate the system&#8217;s ability to sense binding to the surface of the microcavity. Data is post-processed via adaptive curve fitting, which allows for high-resolution measurements of the quality factor as well as the plotting of time-dependent parameters, such as resonant wavelength and split frequency shifts. By carefully inspecting steps in the time-domain response and shifting in the frequency-domain response, this instrument can quantify discrete binding events.

A reference interferometer technique, which is designed to remove undesirable laser jitter noise for nanodetection, is utilized for probing an ultra-high quality factor microcavity. Instructions for assembly, setup, and data acquisition are provided, alongside the measurement process for specifying the cavity quality factor.

Implementierung eines Referenz-Interferometer für Nanodetection

A thermally and mechanically stabilized fiber interferometer suited for examining ultra-high quality factor microcavities is fashioned. After assessing ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

Herstellung und Prüfung von Mikrofluidik-Optomechanische Oszillatoren

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Atomically Traceable Nanostructure Fabrication

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process being used in order to maintain exquisite control over both feature size and feature density. Here, we demonstrate a method for tracking atomically resolved and controlled structures from initial template definition through final nanostructure metrology, opening up a pathway for top-down atomic control over nanofabrication. Hydrogen depassivation lithography is the first step of the nanoscale fabrication process followed by selective atomic layer deposition of up to 2.8 nm of titania to make a nanoscale etch mask. Contrast with the background is shown, indicating different mechanisms for growth on the desired patterns and on the H passivated background. The patterns are then transferred into the bulk using reactive ion etching to form 20 nm tall nanostructures with linewidths down to ~6 nm. To illustrate the limitations of this process, arrays of holes and lines are fabricated. The various nanofabrication process steps are performed at disparate locations, so process integration is discussed. Related issues are discussed including using fiducial marks for finding nanostructures on a macroscopic sample and protecting the chemically reactive patterned Si(100)-H surface against degradation due to atmospheric exposure.

We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

Atomar Traceable Nanostrukturen

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process ...

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using femtosecond laser-induced ablation. We show that thousands of periodic nano-craters are fabricated on an optical nanofiber by irradiating with just a single femtosecond laser pulse. For a typical sample, periodic nano-craters with a period of 350 nm and with diameter gradually varying from 50 - 250 nm over a length of 1 mm are fabricated on a nanofiber with diameter around 450 - 550 nm. A key aspect of such a nanofabrication is that the nanofiber itself acts as a cylindrical lens and focuses the femtosecond laser beam on its shadow surface. Moreover, the single-shot fabrication makes it immune to mechanical instabilities and other fabrication imperfections. Such periodic nano-craters on nanofiber, act as a 1-D PhC and enable strong and broadband reflection while maintaining the high transmission out of the stopband. We also present a method to control the profile of the nano-crater array to fabricate apodized and defect-induced PhC cavities on the nanofiber. The strong confinement of the field, both transverse and longitudinal, in the nanofiber-based PhC cavities and the efficient integration to the fiber networks, may open new possibilities for nanophotonic applications and quantum information science.

We present a protocol for fabricating 1-D photonic crystal cavities on subwavelength diameter silica fibers (optical nanofibers) using femtosecond laser-induced ablation.

Die Herstellung von 1-D Photonic Kristallhöhle auf einer Nanofaser Mit Femtosekunden-Laser-induzierte Ablation

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using ...

Construction and Operation of a Light-driven Gold Nanorod Rotary Motor System

The possibility to generate and measure rotation and torque at the nanoscale is of fundamental interest to the study and application of biological and artificial nanomotors and may provide new routes towards single cell analysis, studies of non-equilibrium thermodynamics, and mechanical actuation of nanoscale systems. A facile way to drive rotation is to use focused circularly polarized laser light in optical tweezers. Using this approach, metallic nanoparticles can be operated as highly efficient scattering-driven rotary motors spinning at unprecedented rotation frequencies in water.
In this protocol, we outline the construction and operation of circularly-polarized optical tweezers for nanoparticle rotation and describe the instrumentation needed for recording the Brownian dynamics and Rayleigh scattering of the trapped particle. The rotational motion and the scattering spectra provides independent information on the properties of the nanoparticle and its immediate environment. The experimental platform has proven useful as a nanoscopic gauge of viscosity and local temperature, for tracking morphological changes of nanorods and molecular coatings, and as a transducer and probe of photothermal and thermodynamic processes.

Plasmonic gold nanorods can be trapped in liquids and rotated at kHz frequencies using circularly-polarized optical tweezers. Introducing tools for Brownian dynamics analysis and light scatteringspectroscopy leads to a powerful system for research and application in numerous fields of science.

Bau und Betrieb eines lichtgetriebenen Gold Nanorod Rotary Motor Systems

The possibility to generate and measure rotation and torque at the nanoscale is of fundamental interest to the study and application of biological and ...

Design and Fabrication of an Optical Fiber Made of Water

In this report, an optical fiber of which the core is made solely of water, while the cladding is air, is designed and manufactured. In contrast with solid-cladding devices, capillary oscillations are not restricted, allowing the fiber walls to move and vibrate. The fiber is constructed by a high direct current (DC) voltage of several thousand volts (kV) between two water reservoirs that creates a floating water thread, known as a water bridge. Through the choice of micropipettes, it is possible to control the maximal diameter and length of the fiber. Optical fiber couplers, at both sides of the bridge, activate it as an optical waveguide, allowing researchers to monitor the water fiber capillary body waves through transmission modulation and, therefore, deducing changes in surface tension.
Co-confining two important wave types, capillary and electromagnetic, opens a new path of research in the interactions between light and liquid-wall devices. Water-walled microdevices are a million times softer than their solid counterparts, accordingly improving the response to minute forces.

This protocol describes the design and manufacture of a water bridge and its activation as a water fiber. The experiment demonstrates that capillary resonances of the water fiber modulate its optical transmission.

Konstruktion und Fertigung einer optischen Faser aus Wasser gemacht

In this report, an optical fiber of which the core is made solely of water, while the cladding is air, is designed and manufactured. In contrast with ...

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

Controlled nanoscale manipulation of fluids is known to be exceptionally difficult due to the dominance of surface and viscous forces. Megahertz-order surface acoustic wave (SAW) devices generate tremendous acceleration on their surface, up to 108 m/s2, in turn responsible for many of the observed effects that have come to define acoustofluidics: acoustic streaming and acoustic radiation forces. These effects have been used for particle, cell, and fluid manipulation at the microscale, although more recently SAW has been used to produce similar phenomena at the nanoscale through an entirely different set of mechanisms. Controllable nanoscale fluid manipulation offers a broad range of opportunities in ultrafast fluid pumping and biomacromolecule dynamics useful for physical and biological applications. Here, we demonstrate nanoscale-height channel fabrication via room-temperature lithium niobate (LN) bonding integrated with a SAW device. We describe the entire experimental process including nano-height channel fabrication via dry etching, plasma-activated bonding on lithium niobate, the appropriate optical setup for subsequent imaging, and SAW actuation. We show representative results for fluid capillary filling and fluid draining in a nanoscale channel induced by SAW. This procedure offers a practical protocol for nanoscale channel fabrication and integration with SAW devices useful to build upon for future nanofluidics applications.

We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.

Herstellung von Nanohöhenkanälen mit Oberflächen-Akustikwellenbetätigung über Lithiumniobat für akustische Nanofluidik

Controlled nanoscale manipulation of fluids is known to be exceptionally difficult due to the dominance of surface and viscous forces. Megahertz-order ...