这项工作得到了香港特别行政区研究资助委员会（第17246116号）综合研究基金，中国国家自然科学基金（61306123）青年学者计划，基础研究计划 - 深圳市科技创新委员会通用计划（JCYJ20140903112959959），浙江省科技厅重点研究发展计划（2017C01058）。作者感谢Y.-T.黄和SP峰对光学测量的帮助。

注意:请注意电子束的安全。请戴上正确的防护眼镜和衣服。另外，请仔细处理所有易燃溶剂和溶液。 1.基于光刻的EMTE制造<ol><li> 光刻用于制造网格图案。 <ol><li>使用棉签将液体洗涤剂清洁FTO玻璃基板（3厘米×3厘米）。用干净的棉签将去离子水（DI）水彻底冲洗干净。使用超声波（频率= 40 kHz，温度= 25°C）在异丙醇（IPA）中进行30秒清洗，然后用压缩空气干燥。 小心:小心处理压缩空气。 </li><li> Spincoat在清洁的FTO玻璃上100μL光刻胶，以4,000rpm旋转60秒（对于2cm半径的样品，约350×g），得到1.8μm厚均匀的膜。 </li><li>将光致抗蚀剂膜在电热板上烘烤50秒100°C。 </li><li>使用UV掩模对准器以20mJ / cm 2的剂量通过具有网格图案（3μm线宽，50μm间距）的光掩模曝光光致抗蚀剂膜。 </li><li>通过将样品浸入显影液中50秒来显影光致抗蚀剂。 </li><li>用去离子水冲洗样品并用压缩空气干燥。 小心:小心处理压缩空气。 </li></ol></li><li> 电沉积金属。 <ol><li>将100mL镀铜水溶液倒入250 mL烧杯中。 注意:其他含水电镀溶液（ 如银，金，镍和锌）可用于制造具有各自金属的EMTE。 注意:注意化学品安全。 </li><li>将光致抗蚀剂覆盖的FTO玻璃连接到双电极电沉积装置的负极端子，并将其浸入作为工作电极的电镀溶液中。 </li><li>连接铜金属棒到作为对电极的双电极电沉积装置的正极。 </li><li>使用电压/电流源和测量仪器（ 例如源计量仪表）提供恒定的5 mA电流（电流密度:〜3 mA / cm 2 ）15分钟，以将金属沉积到约1.5μm的厚度。 </li><li>用去离子水彻底冲洗光刻胶涂覆的FTO玻璃样品，并用压缩空气干燥。 小心:小心处理压缩空气。 </li><li>将光刻胶涂覆的FTO玻璃样品放入丙酮中5分钟以溶解光致抗蚀剂膜，裸露的金属网眼在FTO玻璃的顶部。 </li></ol></li><li> 将金属网的热压印转印到柔性基板上。 <ol><li>将金属网覆盖的FTO玻璃样品放在热打印机的电加热压板上，并在样品的顶部放置100μm厚的柔性环烯烃共聚物（COC）膜，面向金属网面。 </li><li>将加热压机的板加热至100°C。 </li><li>施加15MPa的压印压力并保持5分钟。 小心:使用加热按压时要注意安全。 注意:压印可以在更低的压力下进行;这里报道的压力值（15MPa）相对较高。使用这种高压来确保金属网完全嵌入COC膜中。 </li><li>将加热的压板冷却至40°C的脱模温度。 </li><li>释放印记压力。 </li><li>从FTO玻璃上剥离COC膜，金属网完全嵌入COC膜中。 </li></ol></li></ol>亚微米EMTE的制造<ol><li> 使用电子束光刻（EBL）制造亚微米EMTE。 <ol><li> Spincoat在清洁的FTO玻璃上100μL聚甲基丙烯酸甲酯（PMMA）溶液（15k MW，苯甲醚为4重量％），用于60 sat 2,500rpm（对于具有2cm半径的样品，约140×g），以获得150nm厚均匀的膜。 </li><li>在170℃下将PMMA薄膜烘烤30分钟。 </li><li>打开EBL系统，并使用图案发生器29设计网格图案（400nm线宽，5μm间距）。 </li><li>将样品置于连接到图案发生器的扫描电子显微镜中，并执行写入过程29 。 </li><li>在甲基异丙基酮和异丙醇的混合溶液中以1:3的比例将抗蚀剂显影60秒。 </li><li>用去离子水冲洗样品并用压缩空气干燥。 小心:小心处理压缩空气。 </li><li>将100毫升铜水溶液放在中型烧杯中。 注意:其他含水电镀溶液（ 如银，金，镍和镀锌溶液）应用于制造具有各自金属的EMTE。/ LI&gt; <li>将PMMA涂层的FTO玻璃连接到双电极电沉积装置的负极端子，将其浸入电镀液中作为工作电极，并将铜金属棒连接到正极端子以完成电路。 注意:其他金属棒（ 即银，金，镍和锌）应用于相应的金属电沉积。 </li><li>将对应于大约3mA / cm 2的电流密度的合适电流施加到网格图案区域2分钟以将金属沉积到约200nm的厚度（实际厚度必须通过SEM或AFM确定）。 </li><li>用去离子水仔细洗涤样品并置于丙酮中5分钟以溶解PMMA膜。 </li><li>将金属网覆盖的FTO玻璃样品放在热冲击器的电加热板上，并将COC膜（100μm厚）放置在样品的顶部。 </li><li>将板加热至100°C，应用15MPa压印压力，并保持5分钟。 </li><li>将加热的压板冷却至40°C的脱模温度，释放压印压力。 </li><li>从FTO玻璃上剥离COC膜，以及完全嵌入COC膜中的亚微米金属网。 </li></ol></li></ol> 3. EMTE的性能测量<ol><li> 薄片电阻测量。 <ol><li>在正方形样品的两个相对边缘上涂抹银浆，并等待干燥。 </li><li>按照设备说明，将电阻测量装置的四个探头小心地放在银垫上。 </li><li>切换到电源/测量仪器的电阻测量模式，并在显示屏上记录该值。 </li></ol></li><li> 光传输测量。 <ol><li>打开UV-Vis测量设置并校准光谱仪（ 即，将读数相关联ha标准样品检查仪器的准确性）。 </li><li>将EMTE样品放在光谱仪样品架上，并正确对准光学方向。 </li><li>调整光谱仪100％的透光率。 注意:此处提供的所有透射率值通过裸露的COC膜基材归一化为绝对透射率。 </li><li>测量样品的透射率。 </li><li>保存设置的测量和注销。 </li></ol></li></ol>

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R., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Resolution+Limits+of+Electron-Beam+Lithography+toward+the+Atomic+Scale.">Resolution Limits of Electron-Beam Lithography toward the Atomic Scale.</a> Nano Lett. 13 (4), 1555-1558 (2013).</li><li>Khan, A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Solution-processed+Transparent+Nickel-mesh+Counter+Electrode+with+In-situ+Electrodeposited+Platinum+Nanoparticles+for+Full-Plastic+Bifacial+Dye-sensitized+Solar+Cells.">Solution-processed Transparent Nickel-mesh Counter Electrode with In-situ Electrodeposited Platinum Nanoparticles for Full-Plastic Bifacial Dye-sensitized Solar Cells.</a> ACS Appl Mater Interfaces. 9 (9), 8083-8091 (2017).</li><li>Lee, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+dual-scale+metal+nanowire+network+transparent+conductor+for+highly+efficient+and+flexible+organic+light+emitting+diodes.">A dual-scale metal nanowire network transparent conductor for highly efficient and flexible organic light emitting diodes.</a> Nanoscale. 9 (5), 1978-1985 (2017).</li><li>Khan, S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Direct+patterning+and+electrospray+deposition+through+EHD+for+fabrication+of+printed+thin+film+transistors.">Direct patterning and electrospray deposition through EHD for fabrication of printed thin film transistors.</a> Current Appl Phys. 11 (1), S271-S279 (2011).</li></ol>

作者没有什么可以披露的。

我们的制造方法可以进一步修改，以允许样品的特征尺寸和面积的可扩展性以及各种材料的使用。使用EBL成功制造亚微米线宽（ 图3a-3c ）的铜质EMTE证明了LETE制造中的EMTE结构和关键步骤，包括电镀和压印传输，可以可靠地缩小到亚微米范围。类似地，也可以使用其他大面积光刻工艺，例如相移光刻30 ，纳米压印光刻31和带电粒子束光刻...

在全球范围内，正在进行研究以寻找刚性透明导电氧化物（TCO）的替代物，例如氧化铟锡和氟掺杂氧化锡（FTO）膜，以便制造柔性/可拉伸的TE用于将来的柔性/可伸缩光电器件1 。这需要新的材料与新的制造方法。 已经研究了诸如石墨烯2 ，导电聚合物3,4 ，碳纳米管5和随机金属纳米线网络6,7,8,9,10,11等纳米材料，并已经证明了它们在柔性TE中的能力，解决了现有的基于TCO的TE，包括薄弱12 ，低红外透射13 ，低丰度14 。即使有这种潜力，在连续弯曲下也不会发生恶化，仍然难以获得高的电和光电导率。 在这种框架下，正常金属网15,16,17,18,19,20正在发展成为有望的候选者，并且已经实现了非常高的光学透明度和低的薄层电阻，这是可以根据需要调整的。然而，由于众多挑战，广泛使用金属网状TE已经受到阻碍。首先，制造通常涉及昂贵的真空沉积金属16,17 ， </sup&gt; 18，21 。第二，薄膜有机光电器件的厚度可能容易导致电气短路22,23,24,25 。第三，与基材表面的弱粘合导致柔性差26,27 。上述限制已经引起了对基于金属网的新型结构和其制造的可扩展方法的需求。 在本研究中，我们报告了一种新颖的柔性TE结构，其中包含完全嵌入聚合物膜的金属网。我们还描述了一种创新的，基于解决方案的低成本制造方法，其结合光刻，电沉积和印迹转印。样品EMTE已经实现了高达15k的FoM值。由于嵌入式的性质观察到EMTE显着的化学，机械和环境稳定性。此外，在这项工作中建立的解决方案处理的制造技术可以潜在地用于所提出的EMTE的低成本和高产量生产。这种制造技术可扩展到更精细的金属网线宽度，更大面积和一系列金属。

<table><tbody><tr><td>Acetone</td><td>Sigma-Aldrich</td><td>W332615</td><td>Highly flammable</td></tr><tr><td>Isopropanol</td><td>Sigma-Aldrich</td><td>190764</td><td>Highly flammable</td></tr><tr><td>FTO Glass Substrates</td><td>South China Xiang S&amp;amp;T, China</td><td></td><td></td></tr><tr><td>Photoresist</td><td>Clariant, Switzerland</td><td>54611L11</td><td>AZ 1500 Positive tone resist (20cP)</td></tr><tr><td>UV Mask Aligner</td><td>Chinese Academy of Sciences, China</td><td>URE-2000/35</td><td></td></tr><tr><td>Photoresist Developer</td><td>Clariant, Switzerland</td><td>184411</td><td>AZ 300 MIF Developer</td></tr><tr><td>Cu, Ag, Au, Ni, and Zn Electroplating solutions</td><td>Caswell, USA</td><td></td><td>Ready to use solutions (PLUG N&#039; PLATE)</td></tr><tr><td>Keithley 2400 SourceMeter</td><td>Keithley, USA</td><td>41J2103</td><td></td></tr><tr><td>COC Plastic Films</td><td>TOPAS, Germany</td><td>F13-19-1</td><td>Grade 8007 (Glass transition temperature: 78 &amp;deg;C)</td></tr><tr><td>Hydraulic Press</td><td>Specac Ltd., UK</td><td>GS15011</td><td>With low tonnage kit ( 0-1 ton guage)</td></tr><tr><td>Temperature Controller</td><td>Specac Ltd., UK</td><td>GS15515</td><td>Water cooled heated platens and controller</td></tr><tr><td>Chiller</td><td>Grant Instruments, UK</td><td>T100-ST5</td><td></td></tr><tr><td>Polymethyl Methacrylate (PMMA)</td><td>Sigma-Aldrich</td><td>200336</td><td></td></tr><tr><td>Anisole</td><td>Sigma-Aldrich</td><td>96109</td><td>Highly flammable</td></tr><tr><td>EBL Setup</td><td>Philips, Netherlands</td><td>FEI XL30</td><td>Scanning electron microscope equipped with a JC Nabity pattern generator&amp;nbsp;&amp;nbsp;</td></tr><tr><td>Isopropyl Ketone</td><td>Sigma-Aldrich</td><td>108-10-1</td><td></td></tr><tr><td>Silver Paste</td><td>Ted Pella, Inc, USA</td><td>16031</td><td></td></tr><tr><td>UV&amp;ndash;Vis Spectrometer</td><td>Perkin Elmer, USA</td><td>L950</td><td></td></tr></tbody></table>

scalable solution-processed fabrication strategy for high-performance, flexible, transparent electrodes with embedded metal mesh

在这里，作者报道了嵌入式金属网状透明电极（EMTE），一种新的透明电极（TE），其中金属网完全嵌入聚合物膜中。本文还为这种新型TE提出了一种低成本，无真空制造方法;该方法结合光刻，电镀和压印传输（LEIT）处理。 EMTE的嵌入性提供了许多优点，如高表面平滑度，这对于有机电子器件生产至关重要;弯曲时机械稳定性好;耐化学品和耐湿性良好;并与塑料薄膜粘附力强。 LEIT制造具有无电镀金属沉积的电镀工艺，有利于工业批量生产。此外，LEIT允许制造具有高纵横比（ 即，厚度至线宽）的金属网，显着增强其导电性而不会不利地丢失光学transmittance。我们展示了几种灵活的EMTE原型，薄片电阻低于1Ω/ sq，透光率大于90％，导致非常高的品质因数（FoM） - 高达1.5 x 10 4 - 这是最佳值出版文献

图1显示了EMTE样品的原理图和制造流程图。 如图1a所示 ，EMTE由完全嵌入聚合物膜中的金属网组成。网格的上表面与基底处于同一水平面上，显示出一般平滑的平台，用于随后的装置生产。制造技术在图1b - e中示意性地解释。在FTO玻璃基板上涂覆光致抗蚀剂膜之后，使用光刻技术通过UV曝光和?...

Watch this Scientific Journal Video about Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh at JoVE.com

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

该协议描述了一种基于解决方案的制造策略，用于高性能，灵活，透明的电极，具有完全嵌入的厚金属网。通过该方法制造的柔性透明电极表现出最高的报告性能，包括超低薄层电阻，高光透射率，弯曲下的机械稳定性，强的基板粘附性，表面光滑度和环境稳定性。

具有嵌入式金属网的高性能，灵活，透明电极的可扩展解决方案处理制造策略

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

scalable-solution-processed-fabrication-strategy-for-high-performance

Universidad San Sebastian

Research

Education

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Physics

Engineering

Unit 1

Gauss's Law

SCIENTISTS IN ACTION

10.1K 次观看.  University of Hong Kong. 该协议描述了一种基于解决方案的制造策略，用于高性能，灵活，透明的电极，具有完全嵌入的厚金属网。通过该方法制造的柔性透明电极表现出最高的报告性能，包括超低薄层电阻，高光透射率，弯曲下的机械稳定性，强的基板粘附性，表面光滑度和环境稳定性。 

视频: Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

Planar and Three-Dimensional Printing of Conductive Inks

Printed electronics rely on low-cost, large-area fabrication routes to create flexible or multidimensional electronic, optoelectronic, and biomedical devices1-3. In this paper, we focus on one- (1D), two- (2D), and three-dimensional (3D) printing of conductive metallic inks in the form of flexible, stretchable, and spanning microelectrodes.
Direct-write assembly4,5 is a 1-to-3D printing technique that enables the fabrication of features ranging from simple lines to complex structures by the deposition of concentrated inks through fine nozzles (~0.1 - 250 &mu;m). This printing method consists of a computer-controlled 3-axis translation stage, an ink reservoir and nozzle, and 10x telescopic lens for visualization. Unlike inkjet printing, a droplet-based process, direct-write assembly involves the extrusion of ink filaments either in- or out-of-plane. The printed filaments typically conform to the nozzle size. Hence, microscale features (&lt; 1 &mu;m) can be patterned and assembled into larger arrays and multidimensional architectures.
In this paper, we first synthesize a highly concentrated silver nanoparticle ink for planar and 3D printing via direct-write assembly. Next, a standard protocol for printing microelectrodes in multidimensional motifs is demonstrated. Finally, applications of printed microelectrodes for electrically small antennas, solar cells, and light-emitting diodes are highlighted.

Planar and three-dimensional printing of conductive metallic inks is described. Our approach provides new avenues for fabricating printed electronic, optoelectronic, and biomedical devices in unusual layouts at the microscale.

平面和立体印刷的导电油墨

Printed electronics rely on low-cost, large-area fabrication routes to create flexible or multidimensional electronic, optoelectronic, and biomedical ...

科研

生物工程

Bridging the Bio-Electronic Interface with Biofabrication

Advancements in lab-on-a-chip technology promise to revolutionize both research and medicine through lower costs, better sensitivity, portability, and higher throughput. The incorporation of biological components onto biological microelectromechanical systems (bioMEMS) has shown great potential for achieving these goals. Microfabricated electronic chips allow for micrometer-scale features as well as an electrical connection for sensing and actuation. Functional biological components give the system the capacity for specific detection of analytes, enzymatic functions, and whole-cell capabilities. Standard microfabrication processes and bio-analytical techniques have been successfully utilized for decades in the computer and biological industries, respectively. Their combination and interfacing in a lab-on-a-chip environment, however, brings forth new challenges. There is a call for techniques that can build an interface between the electrode and biological component that is mild and is easy to fabricate and pattern.
Biofabrication, described here, is one such approach that has shown great promise for its easy-to-assemble incorporation of biological components with versatility in the on-chip functions that are enabled. Biofabrication uses biological materials and biological mechanisms (self-assembly, enzymatic assembly) for bottom-up hierarchical assembly. While our labs have demonstrated these concepts in many formats 1,2,3, here we demonstrate the assembly process based on electrodeposition followed by multiple applications of signal-based interactions. The assembly process consists of the electrodeposition of biocompatible stimuli-responsive polymer films on electrodes and their subsequent functionalization with biological components such as DNA, enzymes, or live cells 4,5. Electrodeposition takes advantage of the pH gradient created at the surface of a biased electrode from the electrolysis of water 6,7,. Chitosan and alginate are stimuli-responsive biological polymers that can be triggered to self-assemble into hydrogel films in response to imposed electrical signals 8. The thickness of these hydrogels is determined by the extent to which the pH gradient extends from the electrode. This can be modified using varying current densities and deposition times 6,7. This protocol will describe how chitosan films are deposited and functionalized by covalently attaching biological components to the abundant primary amine groups present on the film through either enzymatic or electrochemical methods 9,10. Alginate films and their entrapment of live cells will also be addressed 11. Finally, the utility of biofabrication is demonstrated through examples of signal-based interaction, including chemical-to-electrical, cell-to-cell, and also enzyme-to-cell signal transmission. 
Both the electrodeposition and functionalization can be performed under near-physiological conditions without the need for reagents and thus spare labile biological components from harsh conditions. Additionally, both chitosan and alginate have long been used for biologically-relevant purposes 12,13. Overall, biofabrication, a rapid technique that can be simply performed on a benchtop, can be used for creating micron scale patterns of functional biological components on electrodes and can be used for a variety of lab-on-a-chip applications.

This article describes a biofabrication approach: deposition of stimuli-responsive polysaccharides in the presence of biased electrodes to create biocompatible films which can be functionalized with cells or proteins. We demonstrate a bench-top strategy for the generation of the films as well as their basic uses for creating interactive biofunctionalized surfaces for lab-on-a-chip applications.

生物电子界面衔接与Biofabrication

Advancements in lab-on-a-chip technology promise to revolutionize both research and medicine through lower costs, better sensitivity, portability, and ...

Fabrication Process of Silicone-based Dielectric Elastomer Actuators

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an elastomeric dielectric membrane sandwiched between two compliant electrodes. The large actuation strains of these transducers when used as actuators (over 300% area strain) and their soft and compliant nature has been exploited for a wide range of applications, including electrically tunable optics, haptic feedback devices, wave-energy harvesting, deformable cell-culture devices, compliant grippers, and propulsion of a bio-inspired fish-like airship. In most cases, DETs are made with a commercial proprietary acrylic elastomer and with hand-applied electrodes of carbon powder or carbon grease. This combination leads to non-reproducible and slow actuators exhibiting viscoelastic creep and a short lifetime. We present here a complete process flow for the reproducible fabrication of DETs based on thin elastomeric silicone films, including casting of thin silicone membranes, membrane release and prestretching, patterning of robust compliant electrodes, assembly and testing. The membranes are cast on flexible polyethylene terephthalate (PET) substrates coated with a water-soluble sacrificial layer for ease of release. The electrodes consist of carbon black particles dispersed into a silicone matrix and patterned using a stamping technique, which leads to precisely-defined compliant electrodes that present a high adhesion to the dielectric membrane on which they are applied.

This manuscript shows the fabrication process for the manufacture of dielectric elastomer soft actuators based on silicone membranes. The three key stages of production are presented in detail: blade casting of thin silicone membranes; pad printing of compliant electrodes; and the assembly of all the components.

有机硅为基础的介电弹性体致动器的制作工艺

This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an ...

工程学

Microfabrication of Chip-sized Scaffolds for Three-dimensional Cell cultivation

Using microfabrication technologies is a prerequisite to create scaffolds of reproducible geometry and constant quality for three-dimensional cell cultivation. These technologies offer a wide spectrum of advantages not only for manufacturing but also for different applications. The size and shape of formed cell clusters can be influenced by the exact and reproducible architecture of the microfabricated scaffold and, therefore, the diffusion path length of nutrients and gases can be controlled.1 This is unquestionably a useful tool to prevent apoptosis and necrosis of cells due to an insufficient nutrient and gas supply or removal of cellular metabolites.
Our polymer chip, called CellChip, has the outer dimensions of 2 x 2 cm with a central microstructured area. This area is subdivided into an array of up to 1156 microcontainers with a typical dimension of 300 m edge length for the cubic design (cp- or cf-chip) or of 300 m diameter and depth for the round design (r-chip).2
So far, hot embossing or micro injection moulding (in combination with subsequent laborious machining of the parts) was used for the fabrication of the microstructured chips. Basically, micro injection moulding is one of the only polymer based replication techniques that, up to now, is capable for mass production of polymer microstructures.3 However, both techniques have certain unwanted limitations due to the processing of a viscous polymer melt with the generation of very thin walls or integrated through holes. In case of the CellChip, thin bottom layers are necessary to perforate the polymer and provide small pores of defined size to supply cells with culture medium e.g. by microfluidic perfusion of the containers.
In order to overcome these limitations and to reduce the manufacturing costs we have developed a new microtechnical approach on the basis of a down-scaled thermoforming process. For the manufacturing of highly porous and thin walled polymer chips, we use a combination of heavy ion irradiation, microthermoforming and track etching. In this so called "SMART" process (Substrate Modification And Replication by Thermoforming) thin polymer films are irradiated with energetic heavy projectiles of several hundred MeV introducing so-called "latent tracks" Subsequently, the film in a rubber elastic state is formed into three dimensional parts without modifying or annealing the tracks. After the forming process, selective chemical etching finally converts the tracks into cylindrical pores of adjustable diameter.

We present two processes for the microfabrication of porous polymer chips for three-dimensional cell cultivation. The first one is hot embossing combined with a solvent vapour welding process. The second one uses a recently developed microthermoforming process combined with ion track technology leading to a significant simplification of manufacture.

芯片尺寸支架的三维细胞培养的微细

Using microfabrication technologies is a prerequisite to create scaffolds of reproducible geometry and constant quality for three-dimensional cell ...

生物学

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, but several challenging points remain, such as a low absorption efficiency due to a thin active layer and low flexibility. We present an advanced method to fabricate a flexible phototransistor array with an improved electrical performance. The outstanding electrical performance is driven by a low dark current owing to deep impurity doping. Stretchable and flexible metal interconnectors simultaneously offer electrical and mechanical stabilities in a highly deformed state. The protocol explicitly describes the fabrication process of the phototransistor using a thin silicon membrane. By measuring I-V characteristics of the completed device in deformed states, we demonstrate that this approach improves the mechanical and electrical stabilities of the phototransistor array. We expect that this approach to a flexible phototransistor can be widely used for the applications of not only next-generation imaging systems/optoelectronics but also wearable devices such as tactile/pressure/temperature sensors and health monitors.

We present a detailed method to fabricate a deformable lateral NIPIN phototransistor array for curved image sensors. The phototransistor array with an open mesh form, which is composed of thin silicon islands and stretchable metal interconnectors, provides flexibility and stretchability. The parameter analyzer characterizes the electrical property of the fabricated phototransistor.

基于侧向 NIPIN Phototransistors 的柔性图像传感器的研制

Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, ...

Fabrication of Thin Film Silver/Silver Chloride Electrodes with Finely Controlled Single Layer Silver Chloride

This paper aims to present a protocol to form smooth and well-controlled films of silver/silver chloride (Ag/AgCl) with designated coverage on top of thin film silver electrodes. Thin film silver electrodes sized 80 &#181;m x 80 &#181;m and 160 &#181;m x 160 &#181;m were sputtered on quartz wafers with a chromium/gold (Cr/Au) layer for adhesion. After passivation, polishing and cathodic cleaning processes, the electrodes underwent galvanostatic oxidation with consideration of Faraday&#39;s Law of Electrolysis to form smooth layers of AgCl with a designated degree of coverage on top of the silver electrode. This protocol is validated by inspection of scanning electron microscope (SEM) images of the surface of the fabricated Ag/AgCl thin film electrodes, which highlights the functionality and performance of the protocol. Sub-optimally fabricated electrodes are fabricated as well for comparison. This protocol can be widely used to fabricate Ag/AgCl electrodes with specific impedance requirements (e.g., probing electrodes for impedance sensing applications like impedance flow cytometry and interdigitated electrode arrays).

This paper aims to present a method to form smooth and well-controlled films of silver chloride (AgCl) with designated coverage on top of thin film silver electrodes.

薄膜银/银氯化银电极的制造，具有精细控制的单层氯化银

This paper aims to present a protocol to form smooth and well-controlled films of silver/silver chloride (Ag/AgCl) with designated coverage on top of thin ...

化学

A Simple and Scalable Fabrication Method for Organic Electronic Devices on Textiles

Today, wearable electronics devices combine a large variety of functional, stretchable, and flexible technologies. However, in many cases, these devices cannot be worn under everyday conditions. Therefore, textiles are commonly considered the best substrate to accommodate electronic devices in wearable use. In this paper, we describe how to selectively pattern organic electroactive materials on textiles from a solution in an easy and scalable manner. This versatile deposition technique enables the fabrication of wearable organic electronic devices on clothes.

In this paper, we present a protocol to selectively deposit organic materials on textiles, which allows for the direct integration of organic electronic devices with wearables. The fabricated devices can be fully integrated in textiles, respecting their mechanical appearance and enabling sensing capabilities.

关于纺织品有机电子设备的简单和可扩展的制作方法

Today, wearable electronics devices combine a large variety of functional, stretchable, and flexible technologies. However, in many cases, these devices ...

用于电容式压力传感的基于微流体通道的软电极

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing

Flexible and stretchable electrodes are essential components in soft artificial sensory systems. Despite recent advances in flexible electronics, most electrodes are either restricted by the patterning resolution or the capability of inkjet printing with high-viscosity super-elastic materials. In this paper, we present a simple strategy to fabricate microchannel-based stretchable composite electrodes, which can be achieved by scraping elastic conductive polymer composites (ECPCs) into lithographically embossed microfluidic channels. The ECPCs were prepared by a volatile solvent evaporation method, which achieves a uniform dispersion of carbon nanotubes (CNTs) in a polydimethylsiloxane (PDMS) matrix. Compared to conventional fabrication methods, the proposed technique can facilitate the rapid fabrication of well-defined stretchable electrodes with high-viscosity slurry. Since the electrodes in this work were made up of all-elastomeric materials, strong interlinks can be formed between the ECPCs-based electrodes and the PDMS-based substrate at the interfaces of the microchannel walls, which allows the electrodes to exhibit mechanical robustness under high tensile strains. In addition, the mechanical-electric response of the electrodes was also systematically studied. Finally, a soft pressure sensor was developed by combining a dielectric silicone foam and an interdigitated electrodes (IDE) layer, and this demonstrated great potential for pressure sensors in soft robotic tactile sensing applications.

作者聚焦：基于微流体通道的软电极及其在电容式压力传感中的应用  

Flexible electrodes have a wide range of applications in soft robotics and wearable electronics. The present protocol demonstrates a new strategy to fabricate highly stretchable electrodes with high resolution via lithographically defined microfluidic channels, which paves the way for future high-performance soft pressure sensors.

基于微流控通道的软电极及其在电容式压力传感中的应用

Flexible and stretchable electrodes are essential components in soft artificial sensory systems. Despite recent advances in flexible electronics, most ...

具有嵌入式金属网的高性能，灵活，透明电极的可扩展解决方案处理制造策略

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