Name: design and characterization methodology for efficient wide range tunable mems filters
Uploaded: 2018-02-04T13:00:00.000+00:00
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Description: Watch this Scientific Journal Video about Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters at JoVE.com

이 작품은 미국 육군 연구소, Adelphi, 메릴랜드, 미국, 그랜트 W91ZLK-12-P-0447 아래에 의해 지원 되었다. 공명 측정 마이클 돌과 안토니 브록의 도움으로 실시 했다. 열 카메라 측정 조지 워싱턴 대학에서 코노 버는 데이먼의 도움으로 실시 됐다.

1. 선택 하 고 최적 구조 설계
<ol><li>광범위 한 주파수 튜닝에 대 한 고정-고정 빔 선택 (다른 후보에 비해 수 있습니다 광범위 한 튜닝 주파수 (TCF)와 상수 무시할 수 열 확장의 그것의 큰 온도 계수 때문에 열 하는 때).</li>
	<li>목적은 효율성 개선 조정 하는 경우 더 이상 광선 디자인. 목적은 주파수 호핑 또는 신호 응용 프로그램을 추적 하는 경우 더 짧은 빔 디자인.</li>
</ol>2. 모델링 및 상보성 금속 산화물 반도체 (CMOS)에서 제조
<ol><li>디자인 하 고 FEM 기반 프로그램에서 MEMS 필터에 대 한 3D 모델을 만듭니다.</li>
	<li>집적 회로 (IC) 디자인 도구, 레이어, 레이어 gds 파일을 만드는에서 같은 레이아웃을 재구성 합니다.</li>
	<li>(우리는 CMOS 0.6 µ m 기술 사용) 제조에 대 한 CMOS 파운드리이 gds 파일을 제출 합니다.</li>
	<li>계속 후 CMOS 프로세스가 완료 되 면 처리 (칩 폴 리 실리콘, 알루미늄, 및 산화물 레이어 있어야 참고).<ol>
<li>행위 CHF3/O2 드라이 에칭 프로세스는 유도 결합된 플라즈마 (ICP)를 통해 에칭 시스템. 알루미늄 층 사이 SiO2 엣지 고 5.7의 가로 세로 비율에 광선을 형성 한다. 이 프로세스에 대 한 다음 매개 변수를 사용 하 여: CHF3 40 sccm, O2 5 sccm, 0.5에서 압력 Pa, ICP 파워 500 W, 및 56 분 총 100 W에서 샘플 파워 엣지 시간.</li>
		<li>XeF 적용2 엣지 광선 아래 9 µ m 깊이 구멍을 만들려고 실리콘 기판에 과정. 이 프로세스에 대 한 XeF2 60 s/사이클 3T에서 3 사이클 시스템을 에칭을 사용 합니다.</li>
	</ol>
</li>
	<li>스캐닝 전자 현미경 (SEM) 그들은 제대로 조작 되도록 장치 특징. 이 단계에 대 한 변경 광속 가속 전압 2.58 kV와 9.5 m m 작동 거리.</li>
</ol>3. 장치 테스트
참고: 장치 테스트 테스트 및 주파수 응답 시험을 열 줄을 포함 하 여 많은 단계가 이루어져 있다.
<ol><li>
포함 된 히터에 대 한 열 카메라 테스트
	<ol>
<li>칩 위에 열 카메라 놓고 그들은 광선을 열 수 있도록 포함 된 히터를 테스트 합니다.</li>
		<li>칩 패키지에 전원 공급 장치를 연결 하 고 광선에 걸쳐 온도 높이기 위해 작은 단위로 5.7 V 0 V에서에서 포함 된 히터에 DC 전압을 적용 합니다.</li>
		<li>가 열 과정 열 카메라를 통해 칩 패키지에 걸쳐 온도 프로 파일을 기록 합니다. 수치 컴퓨팅 프로그램에 결과 저장 하 고 난방 프로필 플롯.</li>
	</ol>
</li>
	<li>
LDV 및 테스트 설치를 보정
	<ol>
<li>120 µ m 긴 들보 위에 레이저를 놓습니다.</li>
		<li>모두 7 V DC를 적용할 두 120 µ m 긴 광선 사이의 공명 작업에 대 한 3 V AC 전압 전원 공급 장치를 연결 합니다. 최대 5.7 V 줄 공명 작업 중 광선에 난방을 적용 하려면 포함 된 히터를 추가 DC 바이어스 전압을 연결 합니다.</li>
		<li>저소음 레이저 반사를 빔 레이저 다른 장소로 이동 합니다. 소음 감소를 파란색 막대의 강도 증가 해야 합니다.</li>
		<li>화면 보정 측정 설치 시작 하 다중 뷰 나눕니다.</li>
		<li>수집 설정, FFT 측정 모드 설정, 할 하지 어떤 필터를 사용 하 여 이동한 2 mhz 대역폭을 설정 합니다.</li>
		<li>그것은 2.5 m h z의 최대 주파수를 지원할 수 있도록 속도 변경 합니다.</li>
		<li>정기적인 짹짹 파형을 사용 합니다. 참고: 여기, 진폭 AC 전압에 대 한 의미와 오프셋 DC 전압에 대 한 의미 합니다.</li>
		<li>이 새로운 설치와 함께 측정을 시작 합니다.</li>
		<li>1 V DC 전압을 변경 하 여 수집 설정을 업데이트 합니다.</li>
		<li>Ref1 보여줍니다 빨간 경보 (이 즉 신호는 시끄러운) 인수 설정 창에서 적용 된 바이어스 전압을 감소.</li>
		<li>신호 대 잡음 비율을 더욱 높이기 위해 빔 레이저 다른 장소로 이동 합니다. 때때로, 진동 바;에 빨간 경보를 발생 시키는 빔에 나쁜 점이 있을 수 있습니다. 이 경우에, 최고의 장소에 대 한 검색을 계속 합니다.</li>
	</ol>
</li>
	<li>
LDV 통해 68 µ m 긴 MEMS 필터 테스트
	<ol>
<li>테스트에 대 한 68 µ m 긴 MEMS 필터를 선택 합니다.</li>
		<li>25 V DC 전압 및 5 V AC 전압 두 68 µ m 오랫동안 인접 한 광속 사이 함께 적용 합니다. 여기, DC 전압 제공 절곡 하 고 AC 전압 공 진 작업을 수 있습니다.</li>
		<li>68 µ m 긴 빔에 포함 된 히터를 추가 DC 전압을 적용 하 고 작은 단위로 5.7 V 0 V에서에서 전압을 증가. 이 제공할 것 이다 주파수 튜닝은 줄에 따라 난방.</li>
		<li>관찰 하 고 공 진 주파수와 위상 응답 각 단계에서 적용 된 바이어스 전압에 관하여 기록 테이블에 결과 요약. 여기,이 샘플에 대 한 총 주파수 튜닝 때 약 874 kHz 5.7 V DC 전압 내장된 히터에 적용 됩니다. 참고: (왼쪽에) 실제 측정 및 시뮬레이션 (오른쪽)에 동기화 됩니다.</li>
	</ol>
</li>
	<li>
높은 모드 측정
	<ol>
<li>A/D 버튼 섹션 3.2에서 인수 설정 창으로 이동 하 고 그것은 매우 높은 주파수를 지원할 수 있도록 속도 변경.</li>
		<li>첫 번째 및 두 번째 모드 그들의 단계를 측정 합니다. 참고: 기본 공명 변위 Y 방향 모드-1 이며 모드 2 (현미경으로 그)는 Z 방향에서입니다.</li>
	</ol>
</li>
</ol>4. 장치 실패를 피하
<ol><li>
낮은 주파수 구형 파 신호 응용 프로그램 stiction를 해결 하기 위해
	<ol>
<li>두 개의 인접 한 광속 사이 정전기 충전 결과인 stiction 문제 해결을 1hz 구형 파 신호를 적용 합니다.</li>
		<li>오프셋된 상자에가 고 1 V AC 전압을 유지 하면서 DC 전압 1 V로 설정.</li>
		<li>주파수 상자에가 고 1 Hz로 주파수를 설정.</li>
		<li>활성화 하 고 광선에이 새로운 설치를 적용.</li>
		<li>광선의 분리를 관찰 합니다.</li>
	</ol>
</li>
	<li>
높은 열 스트레스와 레코딩
	<ol>
<li>열 스트레스 테스트에 대 한 추가 예제를 사용 합니다.</li>
		<li>장치 높은 열 스트레스로 인해 실패 하기 전에 허용 되는 최대 전압을 찾을 작은 증가 의해 포함 된 히터에 적용 된 바이어스 전압을 증가.</li>
	</ol>
</li>
</ol>5. 튜닝 기능 강화
<ol><li>총 661 kHz 주파수 변화 5.7 V, 0 V에서에서 포함 된 히터에 적용 된 바이어스 전압을 증가 하는 동안 두 개의 68 µ m 인접 한 광선 사이 25 V DC 전압 및 5 V AC 전압 함께 적용 됩니다.</li>
	<li>1 V AC 전압을 적용 하 고 같은 바이어스 전압 설정 내장된 히터에 유지 하는 동안 두 개의 68 µ m 오랫동안 인접 한 광선 사이 효과 부드럽게 추가 봄을 추가 하려면 35 V 25 V 적용된 바이어스 전압을 증가.</li>
	<li>875 킬로 헤르츠에서 효과 부드럽게 추가 봄 오는 661 kHz에서 증가 한다 전체 주파수 편이에 32% 향상을 기록 합니다. 참고: 우리의 지식 최선을 MEMS 공 진 기의 튜닝 기능을 변경 달성 되었다이 작품에서 처음으로.</li>
</ol>

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공개 하는 것이 없다.

MEMS 필터를 건물의 중요 한 단계 중 하나는 응용 프로그램 영역에 따라 장치를 디자인 하입니다. 이상 또는 대 한 얇은 빔 이어야 한다 더 나은 효율성 (ppm/mW), 하지만 짧은 또는 얇은 주파수 호핑 또는 신호 추적 응용 프로그램에 대 한 조정. 같은 방식으로, LDV 통해 명확한 신호 검출은 적어도 3-4 µ m 두께 빔 디자인 더 그래서 테스트 장치에서 중요 합니다. 그렇지 않으면 신호 시끄러운 것, 렌즈, ?...

그들의 높은 신뢰성, 저전력 소비, 소형 디자인, 높은 품질 계수, 및 낮은 비용으로 인해 MEMS 필터에 대 한 수요에 있다. 센서와 무선 통신의 핵심 부품으로 널리 사용 됩니다. 온도 센서1, 바이오 센서2,3,4가스 센서, 필터5,,67및 발진기는 가장 인기 있는 응용 분야. 가장 인기 있는 정전기 MEMS 필터는 고정-고정 빔5,8, 외팔보2, 튜닝 포크6, 무료 무료 빔6,7, 굴곡 디스크 디자인7, 그리고 사각형 모양 디자인9.
디자인 방법론 (응용 프로그램 기반 구조를 최적화, 광범위 주파수 튜닝 범위, 및 오류 방지) 및 특성 (빠른 프로토 타이핑, 피 기생 같은 MEMS 필터 실현에 많은 중요 한 단계는 커패시턴스, 그리고 감지 높은 모드)입니다. 주파수 튜닝 기능 제작 공차 또는 온도 변화 주파수 변경에 대 한 보상 필요 합니다. 다른 기술을10,,1112 ;이 요구 사항을 처리 하는 문학에서 보고 되었습니다. 그러나, 그들은 제한 된 주파수 튜닝 기능, 낮은 중심 주파수, 추가 후 처리 요구 사항 및 외부 히터10,11같은 몇 가지 단점이 있다.
선물이 광범위 주파수 튜닝은 줄에 의해 제한 된 주파수 범위는 탄성 계수를 통해 튜닝 방법5,13 난방이 연구에서 변경12 (2 개의 인접 한 광선 사이의 DC 바이어스 전압을 증가)와 자료 단계 전환 방법10,11. 또한, 최적의 구조 선택 하 고 응용 프로그램 기반 디자인 Göktaş와 Zaghloul의13에 요약 했다. 여기, 우리는 LDV의 도움으로 내장된 히터에 적용 되는 DC 전압을 증가 하 여 고정-고정 빔의 공명 주파수를 조정 하는 방법을 보여 줍니다. 유한 요소 해석 (FEM) 시뮬레이션 시각화 튜닝 메커니즘을 위해 동일한 프레임에 LDV 측정으로 동기화 됩니다. 난방과 빔을 통해 프로필 굽 힘 줄 포함 됩니다.
우리는 또한 (점화 장치 및 stiction) 오류 및 제안된 솔루션 제시. 줄 난방 방법 고정-고정 빔의 높은 열 스트레스와 함께에서 다양 한 주파수 튜닝 제공 하지만 동시에 탄된 장치는 특정 온도 수준에서 발생할 수 있습니다. 이것은 다른 재료14사이 높은 열 스트레스에 기인 합니다. 솔루션 차례로 튜닝 범위 (32%), 증가 하 고 높은 온도 대 한 필요성을 제거 하는 두 개의 인접 한 광선 사이의 DC 전압을 증가 하는. 이 "튜닝 튜닝 범위" 방법은 먼저 Göktaş 및 Zaghloul5에서, Göktaş 및 Zaghloul13, 좀 더 자세하게에서 설명 이었고 다시 여기에 제시. 다른 한편으로, Stiction, 제조 과정 또는 공명 작업 동안 자리를 차지할 수 있습니다. 접착 에너지15,16, 증가 표면 거칠기17, 그리고18레이저 수리 과정 줄이기 위해 표면 코팅을 적용 하는 등이 문제를 해결 하기 위해 제안 된 많은 기술이 있다. 대조적으로, 선물이 간단한 기술은 저주파 구형 파 신호는 두 개의 연결 된 광선 사이 적용 된 장소와 분리 LDV에 의해 성공적으로 기록 되었다. 이 메서드는 제거할 수 있는 추가 비용과 디자인 복잡성 감소.
최첨단 MEMS 필터에 또 다른 중요 한 단계는 특성화 및 검증. 네트워크 분석기와 특성화는 가장 인기 있고 널리 사용 방법; 그러나, 그것은 몇 가지 단점이 있다. 심지어 작은 기생 커패시턴스는 신호를 죽 일 수 있다 그래서이 일반적으로 잡음 제거를 위한 증폭기 회로3,,68 을 요구 하 고 그것은 단지 첫 번째 모드 공명을 검색할 수 있습니다. 다른 한편으로, LDV로 특성화는이 기생 커패시턴스 문제에서 무료 이며 많은 작은 변위를 검색할 수 있습니다. 빠른 프로토 타이핑을, 앰프 설계에 대 한 필요성을 제거 하는 동안 수 있습니다. 또한, LDV 높은 모드 공명 MEMS 필터를 검색할 수 있습니다. 이 기능은 매우 유망, 특히 고감도 바이오 센서 분야에서에서. 더 높은 외팔보 모드는 훨씬 더 감도19를 제공할 수 있습니다. LDV로 고정-고정 빔의 높은 모드 측정 표시 이며 FEM 시뮬레이션 측정에 적용 됩니다. FEM 시뮬레이션에서 조 결과 감도 고정-고정 빔의 첫 번째 모드에 비해 최대 46 시간 향상을 제공 합니다.

<table><tbody><tr><td>Laser Doppler Vibrometer</td><td>Polytec</td><td>Polytec MSA-500</td><td></td></tr><tr><td>Scanning Electron Microscope</td><td>Zeiss</td><td></td><td></td></tr><tr><td>Thermal Camera</td><td>X</td><td></td><td></td></tr><tr><td>Power Supply&amp;nbsp;</td><td>Egilent</td><td>(E3631A)</td><td></td></tr><tr><td>Microscope</td><td>X</td><td></td><td></td></tr><tr><td>Coventor</td><td>Coventor</td><td></td><td>Simulation Tool</td></tr><tr><td>Cadence Virtuoso</td><td>Cadence</td><td></td><td>Simulation Tool</td></tr><tr><td>Multisim</td><td>Multisim</td><td></td><td>Simulation Tool</td></tr></tbody></table>

design and characterization methodology for efficient wide range tunable mems filters

여기, 우리 기술을 응용 프로그램 기반 microelectromechanical 시스템 (MEMS) 필터를 만들고 (효율적으로 사용 하는 방법 뿐만 아니라 기존의 기법 (네트워크 분석기), 레이저 도플러 신발 (LDV)의 장점 설명 즉, 조정 기능을 조정 하 고 실패와 stiction 피하). LDV 높은 모드 감지 (고감도 바이오 센서 응용 프로그램) 및 공명 측정 아주 작은 장치 (빠른 프로토타입) 같은 네트워크 분석기와 가능 하지 않은 중요 한 측정을 수 있습니다. 따라서, LDV 특성 주파수 튜닝 범위와 공 진 주파수가이 연구에 대 한 내장 된 MEMS 필터의 다른 모드에서 사용 되었다. 이 광범위 한 주파수 튜닝 메커니즘은 줄 포함된 히터 및 고정-고정 빔의 온도 대해 상대적으로 높은 열 스트레스에서 난방 단순히을 기반으로 합니다. 그러나,이 방법의 또 다른 한계는 결과 높은 열 스트레스, 장치를 구울 수 있는 설명 합니다. 추가 개선 달성 되었고이 연구에서 처음으로 표시 되도록 튜닝 기능이 적용 된 DC 바이어스 전압 (35 V 25 V) 두 개의 인접 한 광선 사이의 증가 통해 32%로 증가 했다. 이 중요 한 찾는 넓은 주파수 튜닝 범위에서가 열 하는 여분의 줄에 대 한 필요가 없습니다. 다른 가능한 실패는 stiction 그리고 구조 최적화의 요구 사항을 통해: 저주파 구형 파 신호 응용 프로그램을 성공적으로 광선을 구분할 수 더 필요의 간단 하 고 쉽게 기술 제안 문학에서 정교 하 고 복잡 한 방법입니다. 위의 결과 디자인 방법론을 할 거 고 그래서 우리는 또한 응용 프로그램 기반 디자인을 제공.

Stiction 저주파 구형 파 신호를 적용 하 여 피 했다 고이 LDV (그림 1)를 사용 하 여 확인 했다. 때문에 높은 열 스트레스14 내장된 히터에 상대적으로 높은 바이어스 DC 전압을 적용할 때 오류 (그림 2) 현미경 확인 했습니다. FEM 프로그램 빔 (그림 3)에 대 한 높은 모드를 파생 하기 위하여 사용...

Watch this Scientific Journal Video about Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters at JoVE.com

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

설계 및 효율적인 넓은 범위 가변 MEMS 필터 특성 방법론

레이저 도플러 신발 (LDV), 튜닝, 튜닝 기능, 및 장치 실패 및 stiction, 회피의 수정 하는 주파수 측정을 포함 하 여를 사용 하는 고정-고정 빔 디자인에 대 한 프로토콜 제공 됩니다. 네트워크 분석기를 통해 LDV 방법의 우수성 때문에 그것의 더 높은 모드 기능 시연입니다.

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

design-characterization-methodology-for-efficient-wide-range-tunable

Universidad San Sebastian

Research

JoVE Journal

Engineering

6.1K 조회수.  Harran University. 레이저 도플러 신발 (LDV), 튜닝, 튜닝 기능, 및 장치 실패 및 stiction, 회피의 수정 하는 주파수 측정을 포함 하 여를 사용 하는 고정-고정 빔 디자인에 대 한 프로토콜 제공 됩니다. 네트워크 분석기를 통해 LDV 방법의 우수성 때문에 그것의 더 높은 모드 기능 시연입니다.

비디오: Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Fabrication of Silica Ultra High Quality Factor Microresonators

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the quality factor (Q) of the cavity, can be in excess of 500ns for cavities with Q factors above 100 million. As a result of their low material losses, silica microcavities have demonstrated some of the longest photon lifetimes to date1-2. Since a portion of the circulating light extends outside the resonator, these devices can also be used to probe the surroundings. This interaction has enabled numerous experiments in biology, such as single molecule biodetection and antibody-antigen kinetics, as well as discoveries in other fields, such as development of ultra-low-threshold microlasers, characterization of thin films, and cavity quantum electrodynamics studies.3-7
The two primary silica resonant cavity geometries are the microsphere and the microtoroid. Both devices rely on a carbon dioxide laser reflow step to achieve their ultra-high-Q factors (Q&gt;100 million).1-2,8-9 However, there are several notable differences between the two structures. Silica microspheres are free-standing, supported by a single optical fiber, whereas silica microtoroids can be fabricated on a silicon wafer in large arrays using a combination of lithography and etching steps. These differences influence which device is optimal for a given experiment.
Here, we present detailed fabrication protocols for both types of resonant cavities. While the fabrication of microsphere resonant cavities is fairly straightforward, the fabrication of microtoroid resonant cavities requires additional specialized equipment and facilities (cleanroom). Therefore, this additional requirement may also influence which device is selected for a given experiment.
Introduction
An optical resonator efficiently confines light at specific wavelengths, known as the resonant wavelengths of the device. 1-2 The common figure of merit for these optical resonators is the quality factor or Q. This term describes the photon lifetime (&tau;o) within the resonator, which is directly related to the resonator's optical losses. Therefore, an optical resonator with a high Q factor has low optical losses, long photon lifetimes, and very low photon decay rates (1/&tau;o). As a result of the long photon lifetimes, it is possible to build-up extremely large circulating optical field intensities in these devices. This very unique property has allowed these devices to be used as laser sources and integrated biosensors.10
A unique sub-class of resonators is the whispering gallery mode optical microcavity. In these devices, the light is confined in circular orbits at the periphery. Therefore, the field is not completely confined within the device, but evanesces into the environment. Whispering gallery mode optical cavities have demonstrated some of the highest quality factors of any optical resonant cavity to date.9,11 Therefore, these devices are used throughout science and engineering, including in fundamental physics studies and in telecommunications as well as in biodetection experiments. 3-7,12
Optical microcavities can be fabricated from a wide range of materials and in a wide variety of geometries. A few examples include silica and silicon microtoroids, silicon, silicon nitride, and silica microdisks, micropillars, and silica and polymer microrings.13-17 The range in quality factor (Q) varies as dramatically as the geometry. Although both geometry and high Q are important considerations in any field, in many applications, there is far greater leverage in boosting device performance through Q enhancement. Among the numerous options detailed previously, the silica microsphere and the silica microtoroid resonator have achieved some of the highest Q factors to date.1,9 Additionally, as a result of the extremely low optical loss of silica from the visible through the near-IR, both microspheres and microtoroids are able to maintain their Q factors over a wide range of testing wavelengths.18 Finally, because silica is inherently biocompatible, it is routinely used in biodetection experiments.
In addition to high material absorption, there are several other potential loss mechanisms, including surface roughness, radiation loss, and contamination loss.2 Through an optimization of the device size, it is possible to eliminate radiation losses, which arise from poor optical field confinement within the device. Similarly, by storing a device in an appropriately clean environment, contamination of the surface can be minimized. Therefore, in addition to material loss, surface scattering is the primary loss mechanism of concern.2,8
In silica devices, surface scattering is minimized by using a laser reflow technique, which melts the silica through surface tension induced reflow. While spherical optical resonators have been studied for many years, it is only with recent advances in fabrication technologies that researchers been able to fabricate high quality silica optical toroidal microresonators (Q&gt;100 million) on a silicon substrate, thus paving the way for integration with microfluidics.1
The present series of protocols details how to fabricate both silica microsphere and microtoroid resonant cavities. While silica microsphere resonant cavities are well-established, microtoroid resonant cavities were only recently invented.1 As many of the fundamental methods used to fabricate the microsphere are also used in the more complex microtoroid fabrication procedure, by including both in a single protocol it will enable researchers to more easily trouble-shoot their experiments.

We describe the use of a carbon dioxide laser reflow technique to fabricate silica resonant cavities, including free-standing microspheres and on-chip microtoroids. The reflow method removes surface imperfections, allowing long photon lifetimes within both devices. The resulting devices have ultra high quality factors, enabling applications ranging from telecommunications to biodetection.

실리카 초고 품질 팩터 Microresonators의 제작

Whispering gallery resonant cavities confine light in circular orbits at their periphery.1-2 The photon storage lifetime in the cavity, quantified by the ...

연구

공학

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

Metamaterials (MM), artificial materials engineered to have properties that may not be found in nature, have been widely explored since the first theoretical1 and experimental demonstration2 of their unique properties. MMs can provide a highly controllable electromagnetic response, and to date have been demonstrated in every technologically relevant spectral range including the optical3, near IR4, mid IR5 , THz6 , mm-wave7 , microwave8 and radio9 bands. Applications include perfect lenses10, sensors11, telecommunications12, invisibility cloaks13 and filters14,15. We have recently developed single band16, dual band17 and broadband18 THz metamaterial absorber devices capable of greater than 80% absorption at the resonance peak. The concept of a MM absorber is especially important at THz frequencies where it is difficult to find strong frequency selective THz absorbers19. In our MM absorber the THz radiation is absorbed in a thickness of ~ &lambda;/20, overcoming the thickness limitation of traditional quarter wavelength absorbers. MM absorbers naturally lend themselves to THz detection applications, such as thermal sensors, and if integrated with suitable THz sources (e.g. QCLs), could lead to compact, highly sensitive, low cost, real time THz imaging systems.

This protocol outlines the simulation, fabrication and characterization of THz metamaterial absorbers. Such absorbers, when coupled with an appropriate sensor, have applications in THz imaging and spectroscopy.

THz Metamaterial Absorbers 시뮬레이션, 제조 및 특성

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input bias voltage. However, the tradeoff for the improved switching performance is a relatively long settling time to reach each gap height in response to various applied voltages. Transient applied bias waveforms are employed to facilitate reduced switching times for electrostatic fringing-field MEMS actuators with high mechanical quality factors. Removing the underlying substrate of the fringing-field actuator creates the low mechanical damping environment necessary to effectively test the concept. The removal of the underlying substrate also a has substantial improvement on the reliability performance of the device in regards to failure due to stiction. Although DC-dynamic biasing is useful in improving settling time, the required slew rates for typical MEMS devices may place aggressive requirements on the charge pumps for fully-integrated on-chip designs. Additionally, there may be challenges integrating the substrate removal step into the back-end-of-line commercial CMOS processing steps. Experimental validation of fabricated actuators demonstrates an improvement of 50x in switching time when compared to conventional step biasing results. Compared to theoretical calculations, the experimental results are in good agreement.

The robust device design of fringing-field electrostatic MEMS actuators results in inherently low squeeze-film damping conditions and long settling times when performing switching operations using conventional step biasing. Real-time switching time improvement with DC-dynamic waveforms reduces the settling time of fringing-field MEMS actuators when transitioning between up-to-down and down-to-up states.

실시간 DC-동적 바이어스 방법 심각하게 부족 감쇠 프린 징 필드 정전기 MEMS 엑츄에이터에서 시간 개선을 전환하기위한

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including microresonators. However, because of the increased acoustic radiative losses during direct liquid immersion of optomechanical devices, almost all published optomechanical experiments have been performed in solid phase. This paper discusses a recently introduced hollow microfluidic optomechanical resonator. Detailed methodology is provided to fabricate these ultra-high-Q microfluidic resonators, perform optomechanical testing, and measure radiation pressure-driven breathing mode and SBS-driven whispering gallery mode parametric vibrations. By confining liquids inside the capillary resonator, high mechanical- and optical- quality factors are simultaneously maintained.

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

제작 및 미세 유체 광​​ 기계 발진기의 테스트

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Using Micro-Electro-Mechanical Systems (MEMS) to Develop Diagnostic Tools

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

I'm U De Mercy, I'm the principal investigator of Bio Stick MAMs in Medicine Labs. I did my PhD at Stanford University in electrical engineering. I did a postdoc at Harvard Medical School at MGH working on bio acoustic MAMs or mostly bio MAs.And now I'm continuing as a faculty at Harvard Medical School at Harvard MIT Health Sciences and Technology. And continuing with my research that I enjoy very much. The work that I did during my PhD was very much related to droplets and using acoustics to generate precise size droplets and control their location and position to deposit very sensitive polymers.Now we apply similar technologies to encapsulate cells in droplets and then position them on the surfaces for various applications in tissue engineering to print cells on the surfaces to pattern cells. Also, there are applications where you want to see that you can encapsulate few cells or a single cell or from the same population and to see the differences between the same population from one cell to another there being able to encapsulate cells in droplets at high throughput rates like 10, 000 cells per second kind of rates becomes very important and very useful to understand biological problems. So my research currently has two legs, I would say.One is this cell encapsulation work that I just talked about. How do we pack a cell in a droplet that's, and how can we do this repeatedly and reliably and without harming the cells? So after the cell is ejected or encapsulated in the droplet, we should be able to precisely located on a surface the cell should be functional and alive and viable.It shouldn't be harmed by the effects of ejection and so forth. So currently we have a system where we use acoustic drop focused waves to generate these droplets from open pools where we can encapsulate down to single cells in these really small droplets that are comparable to the cell size. That's very exciting in terms of applying this to cell printing and tissue engineering.The other side of my research is again using these MAMs micro electromechanical system technologies to develop low cost diagnostic tools. Mostly this research uses microfluidic approaches where we can introduce whole blood, very small volumes such as blood from a prick finger prick, less than 10 microliters that you can introduce to a chip. And from that blood we can encapsulate or you can capture certain sub-cellular populations from whole blood.Why is this important? Why should this be cheap for global health applications On top of the mountain in Africa, you want to be able to tell for a HIV patient, for instance, how many CD four T lymphocytes this patient has. Because World Health Organization says that below 200 CD four cells per microliter, you have to start treating the patients In the developed world, you use hundreds of thousands dollars of vert flow cytometers to be able to get this data.And it takes of course time to use and skill of course to be able to use these like huge table size machines. Our small chip can be introduced this small finger brick 10 microliters of whole blood and it'll capture the CD four cells using the surface protein affinities. And then you can rapidly count these cells that are captured because you know that there are CD four cells which are attached to CD four proteins antibodies on the surface of the chip.By controlling the flow rates and shear, you can make sure that the specificity and efficiency for these cell types are optimized. And there's of course always non specific binding, but by our sheer approaches we minimize these effects and make sure that between plus minus 10%errors, which is sufficient to make a diagnostic or prognostic decision on top mountain in Africa. So this has interesting applications for global health as well as these low cost techniques that are disposable can impact the developed world because now these fast blood tests which are really low cost can impact the tests that we use in the developed world.If they're optimized to higher levels of efficiency and specificity, which our initial data shows that they can be, then it'll definitely impact our lives. When I first finished my PhD, I knew more about microfluidics and that in MAMs more than anything else I could see, especially with the droplet application, I could see that if I could print cells and encapsulate cells or manipulate the few cells, single cells, that it'll have great applications in biotechnology area. And I was very interested in working on things that will actually impact people's lives.I used to apply these technologies to semiconductor industry, but then I wanted to to be useful directly to people. So I, that's what directed me towards problems in healthcare. And then that's why I made a big shift and came to a hospital, mass general hospital to the postdoc.And there, you know, I got exposed more and more to problems and it seems, and it's all clear that one of the biggest problems of the world today is global health and there comes illnesses like tuberculosis, HIV that kills thousands of people per day. And these people die not because the drugs are not there, but because there aren't enough diagnostic tools which is much more expensive than the existing drugs. So I know the technology side of the things very well.I get, I got exposed to the biological problems and the more I learned about them, the more I could see that I could make an impact. And that's how it all grew from there. And it's still continuing now.Like I seen biotechnology and in medicine there are like so many problems that actually directly cause our result into loss of people's lives and the technologies, the technology aspect of it and being able to apply it to real world medical problems is a great, I think path to follow. This is like how this whole biotechnology area I think is kind of growing and it's becoming very impactful. If you think about it, HIV cancer, those are big killers in the world.And current micro technologies, current approaches could maybe benefit from early detection of cancer by capturing these cells from blood or making it really cheap, which will make it available to masses. So all these things coming together, I think this whole microtechnology applications in healthcare in medicine could impact the future of human beings. So that's how all these things kind of come together I guess.And being in the Harvard MIT health sciences and technology where on one end you have the technology and on the other end you direct aspect, direct access to patients, direct access to doctors in Brigham and Women's Hospital where I work is a great environment. cause every person that you talk to have their problems and you could maybe it's coming from a different background, provide interesting solutions to those existing real world problems. So this is, I think how I see the whole perspective of how these medical problems meet the technology side.And we try to impact people's lives in a positive way. In single cell cap encapsulation or in cell encapsulation, the major challenge is to be able to encapsulate reliably and repeatably single cells. So you're ejecting 10, 000 hundred thousand cells per second.And how do you make sure that each droplet that you eject has a single cell? This statistics where you are changing the droplet size and minimizing the, optimizing the cell size over the droplet size, which goes into the old problem of packing spheres in a volume and what is the most efficient way to do it. So that's the biggest challenge in the cell printing area for from the technological side.The other aspect of it is now you can say print and precisely locate these cells. How can you generate these three dimensional tissues and how can you keep them alive and how can you transplant them? There comes in the biological end of the problems where you want to now exactly mimic the tissue.We have current approaches to be able to print an eyelet, a pancreas eyelet, and to be able to print using smooth muscle cells, a bladder tissue, directly mimicking what is in human or red bladder so that then we can make this tissue and test how well it performs compared to the real world existing native tissues. So that's the major challenge I guess by taking these novel technologies, how can you make this the ideal tissue that can be replaced, that can be transplanted, that's the, you know, biggest problem from the beginning because the control on single cell gives you the capability to precisely locate them. And then how do you kind of grow it from there?So it's something transplantable there where the impact of human life comes. So that's on that end, what the challenges are in the tissue engineering side of the things in southern encapsulation and in diagnostics using microfluidics, the challenge is to be able to capture a cell out of billions of cells. It's like you have a sugar particle in a salt can and you're trying to pull out that sugar particle and that's like one in a billion.So you, you're processing microliters to milliliters of whole blood and you want to be able to specifically and efficiently without any technological problems like clogging or any biological problems like non-specific binding, you want to be able to isolate at one cell out of billion cells in one microliter of whole blood, you have a few millions of cells. And for the CD four T lymphocyte case in that one microliter, we are after about thousand cells per microliter. So it's like one cell in a thousand kind of a problem where we have shown that it's doable.But when you want to go after circulating tumor cells for cancer, then the challenge becomes one in a billion. So to some summarize it, the challenge is how do we capture this one cell out of billions of other cells around it? And what is the technological aspects?What are the flow rates? What is the device design? What, what are the flow rates?What, what are the volumes of blood that has to be processed and how do you make sure that the cells you capture are the ones that you actually wanted to capture? All these aspects kind formed the whole challenge that can be summarized in one sentence, which is how do you capture this one rare cell out of billion others? So it's really a needle in a haystack kind of problem, which is exciting.And I think this is moving the technologies forward to address these problems is the current technological challenge. Being able to bring them to a level where they do the job that they're supposed to do is one thing. And then taking it to the clinic and making it a product has all different expertise such as being able to start a company, being able to patent these things and all those other aspects come into the picture.And I think we as scientists primarily don't have all of those skills that takes the products from desktop to products. So there comes in again, the importance of collaborations with people who have different backgrounds. And there are many technologies out there that I think could be very impactful and useful.They sometimes don't make it to the clinic or to the use of humankind either because it just didn't happen, wasn't the right time or other effects came into the picture that I just talked about. Or sometimes there isn't a direct link that you couldn't see that the technology could actually solve that problem. And the person who deals with the problem, or let's say the biologists or people in medicine are used to doing it one way for many years.And the people on the technology side mostly if you're not having a biotechnology focus, are not aware of the problems in medicine. So bringing these two sides together is a serious interdisciplinary research. And I think in the past years, the whole emphasis both at NIH level and that we see in research labs and universities is to generate interdisciplinary research.So people end up getting PhDs where they have to know multiple fields. For instance, for my PhD, I had to know acoustics, I had to know mems, I had to know microfluidics and I had to apply this for polymers. So now you see kinda very depth of knowledge in one field where you had to know actually three other fields quite well to be able to solve that problem.So I think the answer is in interdisciplinary research combined with people with business skills to make it available to use of the people, it's a whole big process and some inefficiencies that come in at certain locations. Cause that low percent of tech transfer.

진단 도구를 개발하기 위해 마이크로 전자 기계 시스템 (MEMS)를 사용

생물학

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

MEMS 검사 및 특성화를위한 소형 렌즈가없는 디지털 홀로그램 현미경

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Microfluidic Pneumatic Cages: A Novel Approach for In-chip Crystal Trapping, Manipulation and Controlled Chemical Treatment

The precise localization and controlled chemical treatment of structures on a surface are significant challenges for common laboratory technologies. Herein, we introduce a microfluidic-based technology, employing a double-layer microfluidic device, which can trap and localize in situ and ex situ synthesized structures on microfluidic channel surfaces. Crucially, we show how such a device can be used to conduct controlled chemical reactions onto on-chip trapped structures and we demonstrate how the synthetic pathway of a crystalline molecular material and its positioning inside a microfluidic channel can be precisely modified with this technology. This approach provides new opportunities for the controlled assembly of structures on surface and for their subsequent treatment.

Herein, we describe the fabrication and operation of a double-layer microfluidic system made of polydimethylsiloxane (PDMS). We demonstrate the potential of this device for trapping, directing the coordination pathway of a crystalline molecular material and controlling chemical reactions onto on-chip trapped structures.

미세 유체 압축 공기를 넣은 케이지 : A의 칩 크리스탈 트래핑, 조작에 대한 새로운 접근 방식 및 제어 화학 처리

The precise localization and controlled chemical treatment of structures on a surface are significant challenges for common laboratory technologies. ...

화학

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

초전도 공진기의 제조 및 특성

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long and hollow glassy carbon microfibers derived from human hairs is introduced. The long and hollow carbon structures were made by the pyrolysis of human hair at 900 &#176;C in a N2 atmosphere. The morphology and chemical composition of natural and pyrolyzed human hairs were investigated using scanning electron microscopy (SEM) and electron-dispersive X-ray spectroscopy (EDX), respectively, to estimate the physical and chemical changes due to pyrolysis. Raman spectroscopy was used to confirm the glassy nature of the carbon microstructures. Pyrolyzed hair carbon was introduced to modify screen-printed carbon electrodes ; the modified electrodes were then applied to the electrochemical sensing of dopamine and ascorbic acid. Sensing performance of the modified sensors was improved as compared to the unmodified sensors. To obtain the desired carbon structure design, carbon micro-/nanoelectromechanical system (C-MEMS/C-NEMS) technology was developed. The most common C-MEMS/C-NEMS fabrication process consists of two steps: (i) the patterning of a carbon-rich base material, such as a photosensitive polymer, using photolithography; and (ii) carbonization through the pyrolysis of the patterned polymer in an oxygen-free environment. The C-MEMS/NEMS process has been widely used to develop microelectronic devices for various applications, including in micro-batteries, supercapacitors, glucose sensors, gas sensors, fuel cells, and triboelectric nanogenerators. Here, recent developments of a high-aspect ratio solid and hollow carbon microstructures with SU8 photoresists are discussed. The structural shrinkage during pyrolysis was investigated using confocal microscopy and SEM. Raman spectroscopy was used to confirm the crystallinity of the structure, and the atomic percentage of the elements present in the material before and after pyrolysis was measured using EDX.

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Long and hollow glassy carbon microfibers were fabricated based on the pyrolysis of a natural product, human hair. The two fabrication steps of carbon microelectromechanical and carbon nanoelectromechanical systems, or C-MEMS and C-NEMS, are: (i) photolithography of a carbon-rich polymer precursor and (ii) pyrolysis of the patterned polymer precursor.

3D 탄소 미세 전자 기계 시스템 (C-MEMS) 제작

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long ...

Rapid Repetition Rate Fluctuation Measurement of Soliton Crystals in a Microresonator

Temporal solitons have attracted great interest in the past decades for their behavior in a steady state, where the dispersion is balanced by the nonlinearity in a propagation Kerr medium. The development of dissipative Kerr solitons (DKSs) in high-Q microcavities drives a novel, compact, chip-scale soliton source. When DKSs serve as femtosecond pulses, the repetition rate fluctuation can be applied to ultrahigh precision metrology, high-speed optical sampling, and optical clocks, etc. In this paper, the rapid repetition rate fluctuation of soliton crystals (SCs), a special state of DKSs where particle-like solitons are tightly packed and fully occupy a resonator, is measured based on the well-known delayed self-heterodyne method. The SCs are generated using a thermal-controlled method. The pump is a frequency fixed laser with a linewidth of 100 Hz. The integral time in frequency fluctuation measurements is controlled by the length of the delay fiber. For a SC with a single vacancy, the repetition rate fluctuations are ~53.24 Hz within 10 &#181;s and ~509.32 Hz within 125 &#181;s, respectively.

Here, we present a protocol to generate soliton crystals in a butterfly-packaged micro-ring resonator using a thermal tuned method. Further, the repetition rate fluctuations of a soliton crystal with a single vacancy are measured using a delayed self-heterodyne method.

설계 및 효율적인 넓은 범위 가변 MEMS 필터 특성 방법론

요약

더 많은 비디오 탐색

이 비디오의 챕터

실리카 초고 품질 팩터 Microresonators의 제작

THz Metamaterial Absorbers 시뮬레이션, 제조 및 특성

실시간 DC-동적 바이어스 방법 심각하게 부족 감쇠 프린 징 필드 정전기 MEMS 엑츄에이터에서 시간 개선을 전환하기위한

제작 및 미세 유체 광 기계 발진기의 테스트

진단 도구를 개발하기 위해 마이크로 전자 기계 시스템 (MEMS)를 사용

MEMS 검사 및 특성화를위한 소형 렌즈가없는 디지털 홀로그램 현미경

미세 유체 압축 공기를 넣은 케이지 : A의 칩 크리스탈 트래핑, 조작에 대한 새로운 접근 방식 및 제어 화학 처리

초전도 공진기의 제조 및 특성

3D 탄소 미세 전자 기계 시스템 (C-MEMS) 제작

마이크로레소네이터에서 솔리톤 크리스탈의 신속한 반복 속도 변동 측정

설계 및 효율적인 넓은 범위 가변 MEMS 필터 특성 방법론

요약

더 많은 비디오 탐색

이 비디오의 챕터

실리카 초고 품질 팩터 Microresonators의 제작

THz Metamaterial Absorbers 시뮬레이션, 제조 및 특성

실시간 DC-동적 바이어스 방법 심각하게 부족 감쇠 프린 징 필드 정전기 MEMS 엑츄에이터에서 시간 개선을 전환하기위한

제작 및 미세 유체 광​​ 기계 발진기의 테스트

진단 도구를 개발하기 위해 마이크로 전자 기계 시스템 (MEMS)를 사용

MEMS 검사 및 특성화를위한 소형 렌즈가없는 디지털 홀로그램 현미경

미세 유체 압축 공기를 넣은 케이지 : A의 칩 크리스탈 트래핑, 조작에 대한 새로운 접근 방식 및 제어 화학 처리

초전도 공진기의 제조 및 특성

3D 탄소 미세 전자 기계 시스템 (C-MEMS) 제작

마이크로레소네이터에서 솔리톤 크리스탈의 신속한 반복 속도 변동 측정

제작 및 미세 유체 광 기계 발진기의 테스트