Name: microparticle manipulation by standing surface acoustic waves with dual-frequency excitations
Uploaded: 2018-08-21T14:30:00.000+00:00
Duration: 6 min 51 s
Description: Watch this Scientific Journal Video about Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations at JoVE.com

この仕事は、学術研究基金 (AcRF) Tier 1 (RG171/15)、文部科学省のシンガポールが主催しました。

1. マイクロ チャネルの作製
<ol><li>10:1 の比率で基本エラストマーとポリ ジメチルシロキサン (PDMS) を混ぜます。</li>
	<li>ドガの混合物、真空オーブン、シリコンウエハ上に否定的なトーンのフォトレジスト パターンの上に注ぐ。</li>
	<li>パターン化されたシリコンウェハーを再びドガし、凝固過程のインキュベーターで 3 h の 70 ° C で加熱します。</li>
</ol>2. すだれ状トランスデューサーの作製
<ol><li>Cr と 400 のデポジット 20 nm; LiNbO3ウェーハ上の Al の nmパターン 20 はポジ型フォトレジストを基板に堆積することで 150 μ m 幅、写真平版用プラスチック マスクに 2 cm の開口部のストリップします。</li>
	<li>アセトンと非汚染地域の Cr-al レイヤーを削除します。</li>
	<li>60 の 30 W の消費電力で (2:1 の窒素と酸素の比) を酸素プラズマを用いた表面を扱う s。</li>
	<li>PDMS マイクロ チャンネルを合わせ、親指で押すと、数秒間で LiNbO3基板にそれを結合します。</li>
	<li>統合デバイス 3 h 60 ° C で加熱室に置きます。</li>
</ol>3. 二周波励起
<ol><li>同時に 2 つの周波数成分を適用 (f1とf3、基本周波数と捏造の IDT の 3 倍波それぞれ)、Idt のペア間位相差φ作り出された見たとおり表現されます。 <img alt="Equation 1" src="/files/ftp_upload/58085/58085eq1.jpg"> ここは <img alt="Equation 2" src="/files/ftp_upload/58085/58085eq2.jpg"><img alt="Equation 3" src="/files/ftp_upload/58085/58085eq3.jpg"> = 音響圧力。</li>
	<li>100 MS/秒のサンプリング周波数であるアプリケーション ソフトウェアの数式エディターを使用してデュアル周波数波形を合成してから格納する関数発生器に SAW 励振実験ではの任意入力として経由でUSB ケーブル。</li>
	<li>出力電力の合計に基本周波数の電源を異なる<img alt="Equation 4" src="/files/ftp_upload/58085/58085eq4.jpg">0% (純粋な第 3 高調波で励起); 100% (純粋な基本周波数で加振) から良い比較のため変更が、同じ電力を維持します。</li>
	<li>デュアル周波数振動を 0 ° から 360 ° の位相差が異なります。</li>
</ol>4. シミュレーション
<ol><li>低レイノルズと非圧縮性層流の運動を記述する (すなわち、 Re = 0.55) マッハ番号35では次のように。 <img alt="Equation 5" src="/files/ftp_upload/58085/58085eq5.jpg"> <img alt="Equation 6" src="/files/ftp_upload/58085/58085eq6.jpg"> ここは <img alt="Equation 7" src="/files/ftp_upload/58085/58085eq7.jpg">流体の速度を = <img alt="Equation 8" src="/files/ftp_upload/58085/58085eq8.jpg">= 動粘性係数 <img alt="Equation 9" src="/files/ftp_upload/58085/58085eq9.jpg">= 流体の密度 <img alt="Equation 10" src="/files/ftp_upload/58085/58085eq10.jpg">流体の圧力を = <img alt="Equation 11" src="/files/ftp_upload/58085/58085eq11.jpg">恒等行列を = と <img alt="Equation 12" src="/files/ftp_upload/58085/58085eq12.jpg">外部の力を = します。</li>
	<li>オブジェクトの次36として作り出されたストーク抵抗力を説明します。 <img alt="Equation 13" src="/files/ftp_upload/58085/58085eq13.jpg"> ここは <img alt="Equation 14" src="/files/ftp_upload/58085/58085eq14.jpg">微粒子、半径 = <img alt="Equation 15" src="/files/ftp_upload/58085/58085eq15.jpg">= 流体の速度と <img alt="Equation 16" src="/files/ftp_upload/58085/58085eq16.jpg">微粒子の速度を = します。</li>
	<li>Xマイクロ流路内の微粒子に適用される音響放射力を得る-と単一周波数で (マイクロ チャネル幅) を軸に続く16 。 <img alt="Equation 17" src="/files/ftp_upload/58085/58085eq17.jpg"> ここは <img alt="Equation 18" src="/files/ftp_upload/58085/58085eq18.jpg">各巻、微粒子の <img alt="Equation 19" src="/files/ftp_upload/58085/58085eq19.jpg">微粒子の密度を = <img alt="Equation 20" src="/files/ftp_upload/58085/58085eq20.jpg">媒体の密度を = <img alt="Equation 21" src="/files/ftp_upload/58085/58085eq21.jpg">=、微粒子の圧縮率と <img alt="Equation 22" src="/files/ftp_upload/58085/58085eq22.jpg">メディアの圧縮を = します。</li>
	<li>とおり二周波励起の結果の音響放射力を派生します。 <img alt="Equation 23" src="/files/ftp_upload/58085/58085eq23.jpg">
</li>
	<li>チャネル幅を横方向の動きを表現 (に沿ってy-軸) [音響放射力と、ストークス抗力次のようにニュートンの第 2 法則によって支配されます。 <img alt="Equation 24" src="/files/ftp_upload/58085/58085eq24.jpg">
</li>
	<li>パソコンで 4 次ルンゲ ・ クッタ法を使用して、上の常微分方程式 (オード) を解決します。セット時間ステップと総期間は 1 μ s と 20 s、それぞれ。</li>
</ol>5. 実験的観察
<ol><li>ソリューションをスピン 5.9 x 10 の濃度で 4 μ m と7緑の蛍光のポリスチレン ビーズ約 2-3 分のための渦による 1 mL あたりと、それを没頭しての超音波の 10 分の超音波発生、各テストの前に任意の凝集を妨害する装置。</li>
	<li>3 mL 注射器に混合物を記入し、3-5 μ L/分の流量でシリンジ ポンプとそれを駆動します。</li>
	<li>IDT デュアル周波数信号の電力増幅器に続いて関数発生器から車で。</li>
	<li>40 倍の倍率での顕微鏡の下で下流のマイクロで安定した微粒子を観察し、デジタル カメラで画像を記録します。</li>
	<li>ImageJ と確立されたスケールを使用してキャプチャしたデジタル画像で蓄積された微粒子の位置を測定し、定量的で正規化された蛍光明るさで蓄積された微粒子の濃度を決定各圧力ノード。</li>
</ol>

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二周波励起で SSAW によるマイクロ流路内微粒子の運動をこの研究で調べた広範囲および二周波励起信号を変化させることにより効果的に可変パターン形成技術が開発され、テストします。このような波形の生産はほとんどの関数発生器によって簡単に実現、調整のアプローチは非常に便利です。S12- と S11-捏造 Idt の周波数応答を示すいくつかの共鳴モード34?...

LOC 技術は、生物学、化学、生物物理学、生体プロセスのマイクロ チップの 1 つまたは複数の機能を統合します。LOC 規模で研究室のセットアップを可能、サブ ミリメートル、高速反応速度、短い応答時間、高いプロセス制御、少量消費 (以下の廃棄物は、低い試薬コストと必要なサンプル ボリューム少ない)、高いスループットのためにより小さい並列化、低コスト、将来的に大量生産とコスト効果の高い消耗品、化学、放射性、または生物学的研究、安全性の高い、コンパクトでポータブル デバイス1,2の利点。正確なセルの操作 (すなわち、蓄積および分離) は、LOC に基づく分析と診断3,の4が重要です。ただし、精度と再現性微小物体操作のさまざまな課題があります。電気浸透5、誘電泳動 (DEP)6magnetophoresis7働く8,910光学的アプローチなど、多くの技術、オプトエレクトロニクス アプローチ11、流体力学的アプローチ12と acoustophoresis13,14,15、開発されています。比較では、音響のアプローチは、LOC のアプリケーションに適して、微粒子/セルの多くの種類の効果的に操作方法と非侵襲的コントラストが十分に高い (密度と圧縮率) と比較して、理論的に周囲の流体。したがって、相手と比較して、音響のアプローチは本質的にほとんどの微粒子と関係なく、光、電気、磁気的特性16の生物学的オブジェクトの対象となります。
表面弾性波 (鋸)、Idt からはスネルの法則17によるといくつかの波長の厚さで圧電体基板のマイクロ流体にレイリーの角度でリークの表面主に伝達します。 18,19,20,21,22。エネルギー、高周波での素晴らしい設計の柔軟性、良いシステム統合マイクロ流路と小型化を使用しての彼らのローカリゼーションに伴う表面に沿って高エネルギー効率の技術的な利点があります。マイクロ電子機械システム (MEMS) 技術と量産23の可能性が高い。このプロトコルではのこぎりを同一 Idt のペアから生成され、中断された微粒子が応用音響によって大抵圧力ノードにプッシュされます、マイクロで定在波または SSAW、生成する反対の方向で反映放射力24。このような結果として生じる力の振幅は、その音響コントラスト率22,25微粒子サイズ、励起周波数によって決定されます。
このような acoustophoresis が簡単に調節可能な所定の操作パターンの制限があります。Idt の励起周波数は、帯域幅がかなり限られているので、彼らの定期的な距離によって決まります。いくつかの戦略は、可変特性と操作の機能を高めるために開発されています。マイクロのさまざまな部分に適用される音響定在波の最初と 2 番目のモード節線26に向かって異なるモーション速度によるとより効果的に微粒子の分離可能性があります。これらの 2 つのモードはマイクロの全体の部分にも適用できるし、切り替えてまた27,28,29。ただし、このため、装置 (すなわち、3 つの関数発生器、2 つのインピー ダンス マッチング ユニット、電磁リレー) の数が多い必要がのおかげで、別の実験の設定のコストと制御の複雑さ基本周波数と、圧電セラミックの第 3 高調波で電気インピー ダンスはプレート30です。さらに、傾斜指用すだれ状トランスデューサー (SFITs) は、セルと特定共鳴20,31の斜指の励磁によるパターニング微粒子調整に適用でした。しかし、その後、帯域幅は斜指の数に反比例します。複数の圧力節線従来 SSAW ベース微粒子区切り記号で分離効率が高く、単一の節線と比較して感度があります。また、圧力のノードの場所は設計32,332 Idt に適用の位相差を調整することによって単にまた変更でした。
彼らを励起できること同時に、微粒子操作34より多くの可変性を提供するので、基本周波数と Idt の第 3 高調波と同様の周波数応答があります。単一周波数で従来の IDT 励振と比較して二周波励起とそれらの間の位相の音響の圧力を調整するまでなどの技術的な一意性を提供 〜 倍節圧力に運動時間を短縮ラインまたはマイクロ、様々 な数と圧力の節線と微粒子濃度の場所の中心。

<table><tbody><tr><td>poly-dimethylsiloxane</td><td>Dow Corning</td><td>Sylgard 184</td><td></td></tr><tr><td>poly-dimethylsiloxane elastomer base</td><td>Dow Corning</td><td>Sylgard 184</td><td></td></tr><tr><td>silicon wafer</td><td>Bonda Technology</td><td>SI8PSPD</td><td></td></tr><tr><td>negative tone photoresist</td><td>Microchem</td><td>SU-8</td><td></td></tr><tr><td>double-side polished LiNbO&lt;sub&gt;3&lt;/sub&gt; wafer</td><td>University Wafer</td><td>Y-128&amp;deg;</td><td></td></tr><tr><td>positive photoresist</td><td>Nicolaus-Otto-Stra&amp;szlig;e</td><td>AZ 9260</td><td></td></tr><tr><td>oxygen plasma</td><td>Harrick Plasma</td><td></td><td></td></tr><tr><td>plastic mask</td><td>Infinite Graphics</td><td></td><td></td></tr></tbody></table>

microparticle manipulation by standing surface acoustic waves with dual-frequency excitations

ラボ-オン-チップ (LOC) システムの微粒子操作のため立っている表面音響波 (SSAW) のチューニング能力を高めるための方法を示します。基本周波数とすだれ状トランスデューサー (Idt) のペアの二周波励起と呼ばれるその第 3 調波の同時励起マイクロ流路における弾性波の立っての新しい型を生成でした。力および二周波励起位相の異なる信号をマイクロ微粒子に適用されます音響放射力の再構成可能なフィールドの結果 (例えば数、圧力ノードの位置と、対応する微粒子濃度圧力ノード)。1 つだけ圧力ノードに微粒子の運動時間を削減できると説明 〜 2 倍 ~ 90% 以上基本周波数の電力比で。対照的に、ノードがある 3 つの圧力のマイクロより小さい場合このしきい値。さらに、基本周波数と第 3 高調波結果 SSAW 圧力ノードが 3 つの異なる運動率だけでなく、マイクロ チャネル内の各圧力ノードで微粒子の割合、間最初の段階を調整します。実験観察と数値予測との良い一致があります。この小説の励振法簡単かつ非侵襲的に統合できます LOC システム全体の耐久性と実験のセットアップにいくつかの変更のみ。

音圧の分布と周波励起 (6.2 と 18.6 MHz) で SSAW の音響放射力は図 1のとおりです。146 の音響パワーで 300 μ m の幅を持つマイクロ チャンネル内二周波励起がポリスチレン微粒子 (直径 4 μ m) で発生しますここで、mW。結果として音圧は、 P1 > 90% 圧力ノードを 1 つだけであるyの段階で常に = 150 μ m です。対照的に、3 つの圧力ノ?...

Watch this Scientific Journal Video about Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations at JoVE.com

Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations

二周波励起マイクロ流路における微粒子を操作するためのプロトコルが表示されます。

立って二周波励起表面波による微小物体操作

We demonstrate a method for increasing the tuning ability of a standing surface acoustic wave (SSAW) for microparticles manipulation in a lab-on-a-chip ...

microparticle-manipulation-standing-surface-acoustic-waves-with-dual

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6.9K ビュー.  Nanyang Technological University. 二周波励起マイクロ流路における微粒子を操作するためのプロトコルが表示されます。

ビデオ: Microparticle Manipulation by Standing Surface Acoustic Waves with Dual-frequency Excitations

Activating Molecules, Ions, and Solid Particles with Acoustic Cavitation

The chemical and physical effects of ultrasound arise not from a direct interaction of molecules with sound waves, but rather from the acoustic cavitation: the nucleation, growth, and implosive collapse of microbubbles in liquids submitted to power ultrasound. The violent implosion of bubbles leads to the formation of chemically reactive species and to the emission of light, named sonoluminescence. In this manuscript, we describe the techniques allowing study of extreme intrabubble conditions and chemical reactivity of acoustic cavitation in solutions. The analysis of sonoluminescence spectra of water sparged with noble gases provides evidence for nonequilibrium plasma formation. The photons and the "hot" particles generated by cavitation bubbles enable to excite the non-volatile species in solutions increasing their chemical reactivity. For example the mechanism of ultrabright sonoluminescence of uranyl ions in acidic solutions varies with uranium concentration: sonophotoluminescence dominates in diluted solutions, and collisional excitation contributes at higher uranium concentration. Secondary sonochemical products may arise from chemically active species that are formed inside the bubble, but then diffuse into the liquid phase and react with solution precursors to form a variety of products. For instance, the sonochemical reduction of Pt(IV) in pure water provides an innovative synthetic route for monodispersed nanoparticles of metallic platinum without any templates or capping agents. Many studies reveal the advantages of ultrasound to activate the divided solids. In general, the mechanical effects of ultrasound strongly contribute in heterogeneous systems in addition to chemical effects. In particular, the sonolysis of PuO2 powder in pure water yields stable colloids of plutonium due to both effects.

Acoustic cavitation in liquids submitted to power ultrasound creates transient extreme conditions inside the collapsing bubbles, which are the origin of unusual chemical reactivity and light emission, known as sonoluminescence. In the presence of noble gases, nonequilibrium plasma is formed. The "hot" particles and the photons generated by collapsing bubbles are able to excite species in solution.

分子、イオン、および音響キャビテーションと固体粒子を活性化

The chemical and physical effects of ultrasound arise not from a direct interaction of molecules with sound waves, but rather from the acoustic ...

化学

Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics

Surface acoustic waves (SAWs) can be used to drive liquids in portable microfluidic chips via the acoustic counterflow phenomenon. In this video we present the fabrication protocol for a multilayered SAW acoustic counterflow device. The device is fabricated starting from a lithium niobate (LN) substrate onto which two interdigital transducers (IDTs) and appropriate markers are patterned. A polydimethylsiloxane (PDMS) channel cast on an SU8 master mold is finally bonded on the patterned substrate. Following the fabrication procedure, we show the techniques that allow the characterization and operation of the acoustic counterflow device in order to pump fluids through the PDMS channel grid. We finally present the procedure to visualize liquid flow in the channels. The protocol is used to show on-chip fluid pumping under different flow regimes such as laminar flow and more complicated dynamics characterized by vortices and particle accumulation domains.

In this video we first describe fabrication and operation procedures of a surface acoustic wave (SAW) acoustic counterflow device. We then demonstrate an experimental setup that allows for both qualitative flow visualization and quantitative analysis of complex flows within the SAW pumping device.

表面弾性波駆動型アコースティック·逆流マイクロフルイディクスで製作、操作と流れの可視化

Surface acoustic waves (SAWs) can be used to drive liquids in portable microfluidic chips via the acoustic counterflow phenomenon. In this video we ...

工学

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

Acoustophoresis refers to the displacement of suspended objects in response to directional forces from sound energy. Given that the suspended objects must be smaller than the incident wavelength of sound and the width of the fluidic channels are typically tens to hundreds of micrometers across, acoustofluidic devices typically use ultrasonic waves generated from a piezoelectric transducer pulsating at high frequencies (in the megahertz range). At characteristic frequencies that depend on the geometry of the device, it is possible to induce the formation of standing waves that can focus particles along desired fluidic streamlines within a bulk flow. Here, we describe a method for the fabrication of acoustophoretic devices from common materials and clean room equipment. We show representative results for the focusing of particles with positive or negative acoustic contrast factors, which move towards the pressure nodes or antinodes of the standing waves, respectively. These devices offer enormous practical utility for precisely positioning large numbers of microscopic entities (e.g., cells) in stationary or flowing fluids for applications ranging from cytometry to assembly.

Acoustofluidic devices use ultrasonic waves within microfluidic channels to manipulate, concentrate and isolate suspended micro and nanoscopic entities. This protocol describes the fabrication and operation of such a device supporting bulk acoustic standing waves to focus particles in a central streamline without the aid of sheath fluids.

作製とAcoustofluidicのデバイスの動作は、粒子のフォーカシングSheathlessためのバルク弾性定在波を支援

Acoustophoresis refers to the displacement of suspended objects in response to directional forces from sound energy. Given that the suspended objects must ...

A Microfluidic Platform for Precision Small-volume Sample Processing and Its Use to Size Separate Biological Particles with an Acoustic Microdevice

A major advantage of microfluidic devices is the ability to manipulate small sample volumes, thus reducing reagent waste and preserving precious sample. However, to achieve robust sample manipulation it is necessary to address device integration with the macroscale environment. To realize repeatable, sensitive particle separation with microfluidic devices, this protocol presents a complete automated and integrated microfluidic platform that enables precise processing of 0.15&#8211;1.5 ml samples using microfluidic devices. Important aspects of this system include modular device layout and robust fixtures resulting in reliable and flexible world to chip connections, and fully-automated fluid handling which accomplishes closed-loop sample collection, system cleaning and priming steps to ensure repeatable operation. Different microfluidic devices can be used interchangeably with this architecture. Here we incorporate an acoustofluidic device, detail its characterization, performance optimization, and demonstrate its use for size-separation of biological samples. By using real-time feedback during separation experiments, sample collection is optimized to conserve and concentrate sample. Although requiring the integration of multiple pieces of equipment, advantages of this architecture include the ability to process unknown samples with no additional system optimization, ease of device replacement, and precise, robust sample processing.

This protocol describes a system architecture for performing automated small volume (0.15&#8211;1.5 ml) particle separations using a microfluidic device, and discusses methods to optimize acoustofluidic device performance and operation.

マイクロ流体精密小容量サンプル処理のためのプラットフォームとアコースティックマイクロデバイスで区切り生物学的粒子サイズのためのその使用

A major advantage of microfluidic devices is the ability to manipulate small sample volumes, thus reducing reagent waste and preserving precious sample. ...

生物工学

Multiplexing Focused Ultrasound Stimulation with Fluorescence Microscopy

By focusing low-intensity ultrasound pulses that penetrate soft tissues, LIPUS represents a promising biomedical technology to remotely and safely manipulate neural firing, hormonal secretion and genetically-reprogrammed cells. However, the translation of this technology for medical applications is currently hampered by a lack of biophysical mechanisms by which targeted tissues sense and respond to LIPUS. A suitable approach to identify these mechanisms would be to use optical biosensors in combination with LIPUS to determine underlying signaling pathways. However, implementing LIPUS to a fluorescence microscope may introduce undesired mechanical artefacts due to the presence of physical interfaces that reflect, absorb and refract acoustic waves. This article presents a step-by-step procedure to incorporate LIPUS to commercially-available upright epi-fluorescence microscopes while minimizing the influence of physical interfaces along the acoustic path. A simple procedure is described to operate a single-element ultrasound transducer and to bring the focal zone of the transducer into the objective focal point. The use of LIPUS is illustrated with an example of LIPUS-induced calcium transients in cultured human glioblastoma cells measured using calcium imaging.

Low-Intensity Pulsed Ultrasound Stimulation (LIPUS) is a modality for non-invasive mechanical stimulation of endogenous or engineered cells with high spatial and temporal resolution. This article describes how to implement LIPUS to an epi-fluorescence microscope and how to minimize acoustic impedance mismatch along the ultrasound path to prevent unwanted mechanical artefacts.

多重蛍光顕微鏡と超音波刺激を集中

By focusing low-intensity ultrasound pulses that penetrate soft tissues, LIPUS represents a promising biomedical technology to remotely and safely ...

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

Controlled nanoscale manipulation of fluids is known to be exceptionally difficult due to the dominance of surface and viscous forces. Megahertz-order surface acoustic wave (SAW) devices generate tremendous acceleration on their surface, up to 108 m/s2, in turn responsible for many of the observed effects that have come to define acoustofluidics: acoustic streaming and acoustic radiation forces. These effects have been used for particle, cell, and fluid manipulation at the microscale, although more recently SAW has been used to produce similar phenomena at the nanoscale through an entirely different set of mechanisms. Controllable nanoscale fluid manipulation offers a broad range of opportunities in ultrafast fluid pumping and biomacromolecule dynamics useful for physical and biological applications. Here, we demonstrate nanoscale-height channel fabrication via room-temperature lithium niobate (LN) bonding integrated with a SAW device. We describe the entire experimental process including nano-height channel fabrication via dry etching, plasma-activated bonding on lithium niobate, the appropriate optical setup for subsequent imaging, and SAW actuation. We show representative results for fluid capillary filling and fluid draining in a nanoscale channel induced by SAW. This procedure offers a practical protocol for nanoscale channel fabrication and integration with SAW devices useful to build upon for future nanofluidics applications.

We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.

音響ナノ流体工学のための表面音響波作動を組み込んだナノ高さチャネルの作製

Controlled nanoscale manipulation of fluids is known to be exceptionally difficult due to the dominance of surface and viscous forces. Megahertz-order ...

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order surface acoustic wave (SAW) devices generate enormous accelerations on their surface, up to 108 m/s2, in turn responsible for many of the observed effects that have come to define acoustofluidics: acoustic streaming and acoustic radiation forces. These effects have been used for particle, cell, and fluid handling at the microscale&#8212;and even at the nanoscale. In this paper we explicitly demonstrate two major fabrication methods of SAW devices on lithium niobate: the details of lift-off and wet etching techniques are described step-by-step. Representative results for the electrode pattern deposited on the substrate as well as the performance of SAW generated on the surface are displayed in detail. Fabrication tricks and troubleshooting are covered as well. This procedure offers a practical protocol for high frequency SAW device fabrication and integration for future microfluidics applications.

Two fabrication techniques, lift-off and wet etching, are described in producing interdigital electrode transducers upon a piezoelectric substrate, lithium niobate, widely used to generate surface acoustic waves now finding broad utility in micro to nanoscale fluidics. The as-produced electrodes are shown to efficiently induce megahertz order Rayleigh surface acoustic waves.&#160;

ニオブエートリチウムにおける表面音響波装置の作製

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order ...

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

We present a technique to fabricate simple thickness mode piezoelectric devices using lithium niobate (LN). Such devices have been shown to atomize liquid more efficiently, in terms of &#64258;ow rate per power input, than those that rely on Rayleigh waves and other modes of vibration in LN or lead zirconate titanate (PZT). The complete device is composed of a transducer, a transducer holder, and a &#64258;uid supply system. The fundamentals of acoustic liquid atomization are not well known, so techniques to characterize the devices and to study the phenomena are also described. Laser Doppler vibrometry (LDV) provides vibration information essential in comparing acoustic transducers and, in this case, indicates whether a device will perform well in thickness vibration. It can also be used to &#64257;nd the resonance frequency of the device, though this information is obtained more quickly via impedance analysis. Continuous &#64258;uid atomization, as an example application, requires careful &#64258;uid flow control, and we present such a method with high-speed imaging and droplet size distribution measurements via laser scattering.

Fabrication of piezoelectric thickness mode transducers via direct current sputtering of plate electrodes on lithium niobate is described. Additionally, reliable operation is achieved with a transducer holder and &#64258;uid supply system and characterization is demonstrated via impedance analysis, laser doppler vibrometry, high-speed imaging, and droplet size distribution using laser scattering.

微粒化およびアユースト流体のための厚さモード圧電デバイスの作製と特性

We present a technique to fabricate simple thickness mode piezoelectric devices using lithium niobate (LN). Such devices have been shown to atomize liquid ...

Induction of Microstreaming by Nonspherical Bubble Oscillations in an Acoustic Levitation System

When located near biological barriers, oscillating microbubbles may increase cell membrane permeability, allowing for drug and gene internalization. Experimental observations suggest that the temporary permeabilization of these barriers may be due to shear stress that is exerted on cell tissues by cavitation microstreaming. Cavitation microstreaming is the generation of vortex flows which arise around oscillating ultrasound microbubbles. To produce such liquid flows, bubble oscillations must deviate from purely spherical oscillations and include either a translational instability or shape modes. Experimental studies of bubble-induced flows and shear stress on nearby surfaces are often restricted in their scope due to the difficulty of capturing shape deformations of microbubbles in a stable and controllable manner. We describe the design of an acoustic levitation chamber for the study of symmetry-controlled nonspherical oscillations. Such control is performed by using a coalescence technique between two approaching bubbles in a sufficiently intense ultrasound field. The control of nonspherical oscillations opens the way to a controlled cavitation microstreaming of a free surface-oscillating microbubble. High-frame rate cameras allow investigating quasi-simultaneously the nonspherical bubble dynamics at the acoustic timescale and the liquid flow at a lower timescale. It is shown that a large variety of fluid patterns may be obtained and that they are correlated to the modal content of the bubble interface. We demonstrate that even the high-order shape modes can create large-distance fluid patterns if the interface dynamics contain several modes, highlighting the potential of nonspherical oscillations for targeted and localized drug delivery.

A fast and reliable technique is proposed to control the shape oscillations of a single, trapped acoustic bubble that is based on coalescence technique between two bubbles. The steady-state, symmetry-controlled bubble shape oscillations allow analysis of the fluid flow generated in the vicinity of the bubble interface.

音響浮上システムにおける非球面気泡振動によるマイクロストリーミングの誘導

When located near biological barriers, oscillating microbubbles may increase cell membrane permeability, allowing for drug and gene internalization. ...

Assembly and Characterization of an External Driver for the Generation of Sub-Kilohertz Oscillatory Flow in Microchannels

Microfluidic technology has become a standard tool in chemical and biological laboratories for both analysis and synthesis. The injection of liquid samples, such as chemical reagents and cell cultures, is predominantly accomplished through steady flows that are typically driven by syringe pumps, gravity, or capillary forces. The use of complementary oscillatory flows is seldom considered in applications despite its numerous advantages as recently demonstrated in the literature. The significant technical barrier to the implementation of oscillatory flows in microchannels is likely responsible for the lack of its widespread adoption. Advanced commercial syringe pumps that can produce oscillatory flow, are often more expensive and only work for frequencies less than 1 Hz. Here, the assembly and operation of a low-cost, plug-and-play type speaker-based apparatus that generates oscillatory flow in microchannels is demonstrated. High-fidelity harmonic oscillatory flows with frequencies ranging from 10-1000 Hz can be achieved along with independent amplitude control. Amplitudes ranging from 10-600 &#181;m can be achieved throughout the entire range of operation, including amplitudes &#62; 1 mm at the resonant frequency, in a typical microchannel. Although the oscillation frequency is determined by the speaker, we illustrate that the oscillation amplitude is sensitive to fluid properties and channel geometry. Specifically, the oscillation amplitude decreases with increasing channel circuit length and liquid viscosity, and in contrast, the amplitude increases with increasing speaker tube thickness and length. Additionally, the apparatus requires no prior features to be designed on the microchannel and is easily detachable. It can be used simultaneously with a steady flow created by a syringe pump to generate pulsatile flows.

The protocol demonstrates a convenient method to produce harmonic oscillatory flow from 10-1000 Hz in microchannels. This is performed by interfacing a computer-controlled speaker diaphragm to the microchannel in a modular manner.

マイクロチャネルにおけるサブキロヘルツ振動流を生成するための外部ドライバの組み立てと特性評価

Microfluidic technology has become a standard tool in chemical and biological laboratories for both analysis and synthesis. The injection of liquid ...